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1. 发明授权

US6082200A Electronic device and method of use thereof 有权
标题翻译：电子装置及其使用方法
公开(公告)号：US6082200A
公开(公告)日：2000-07-04
申请号：US154478
申请日：1998-09-16
申请人： Dean M. Aslam , Sondes Sahli
发明人： Dean M. Aslam , Sondes Sahli
IPC分类号： G01B7/16 , G01L1/18
CPC分类号： G01B7/16 , G01L1/18
摘要： A miniature piezoresistive sensor includes an undoped single crystal and a doped diamond film deposited by a chemical vapor deposition process on the undoped polycrystalline diamond and having a single crystal grain size of about 1 micron to 1 millimeter. The sensor preferably includes metal contacts in contact with the doped film. The resistance of the sensor varies as a function of strain on the doped diamond film transmitted through the single grain. This inexpensive highly-sensitive sensor can be used for sensing pressure, acceleration, strain or weight. It can also be used as a thermistor.
摘要翻译：微型压阻传感器包括未掺杂的单晶和通过化学气相沉积工艺沉积在未掺杂的多晶金刚石上并具有约1微米至1毫米的单晶粒度的掺杂金刚石膜。传感器优选地包括与掺杂膜接触的金属触点。传感器的电阻随着透过单颗晶粒的掺杂金刚石薄膜的应变而变化。这种廉价的高灵敏度传感器可用于感测压力，加速度，应变或重量。它也可以用作热敏电阻。

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