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    • 3. 发明授权
    • Method for producing a semiconductor laser element
    • 半导体激光元件的制造方法
    • US4306351A
    • 1981-12-22
    • US185810
    • 1980-09-10
    • Sigeo OhsakaKanji FujiwaraTakao Fujiwara
    • Sigeo OhsakaKanji FujiwaraTakao Fujiwara
    • H01L21/301H01L21/304H01L21/78H01S5/00H01S5/02H01L31/18
    • H01L33/025H01L21/3043H01L21/78H01L33/0062H01S5/0201
    • A method for producing semiconductor laser elements from a wafer wherein the wafer is prepared having light emitting regions and then the wafer is scribed and cracked in order to form the semiconductor elements. The scribing is executed on a major surface of the wafer in such a way that scratches are formed along a separation line only on the surface of a crystal substrate of the wafer but not on the substrate over the formed light emitting regions. The cleaved surface developed by the cracking step is very flat in an area where the light emitting region is exposed to provide a mirror surface that forms a laser resonator. Desirably, the major surface of the wafer is covered with a protective film on at least the part of the surface over the light emitting region, prior to performing the scribe step. More desirably, this protective film consists of an electrode metal, such as Au or a resin, such as a photoresist material. The scribing is executed wherein scratches are not formed on the crystal substrate surface under the region that is covered with the protection film. This method effectively realizes the cleavage process and results in excellent reproducibility of the physical dimensions of the laser element, while obtaining highly satisfactory characteristics of a laser resonator.
    • 一种用于从晶片制造半导体激光元件的方法,其中制备具有发光区域的晶片,然后将晶片划线和破裂以形成半导体元件。 在晶片的主表面上执行刻划,使得仅在晶片的晶体基板的表面上沿着分离线形成划痕,而不在形成的发光区域上的基板上形成划痕。 通过裂纹步骤形成的裂开表面在发光区域暴露的区域中非常平坦,以提供形成激光谐振器的镜面。 理想地,在执行划线步骤之前,晶片的主表面在发光区域的至少部分表面上被保护膜覆盖。 更优选地,该保护膜由诸如Au的电极金属或诸如光致抗蚀剂材料的树脂组成。 执行划线,其中在被保护膜覆盖的区域下的结晶基板表面上没有形成划痕。 该方法有效地实现了切割过程,并且在获得激光谐振器的非常令人满意的特性的同时,导致了激光元件的物理尺寸的优异再现性。