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    • 2. 发明申请
    • NAND TYPE NONVOLATILE SEMICONDUCTOR MEMORY DEVICE HAVING SIDEFACE ELECTRODE SHARED BY MEMORY CELLS
    • 具有由存储单元共享的边缘电极的NAND型非易失性半导体存储器件
    • US20090059669A1
    • 2009-03-05
    • US12052149
    • 2008-03-20
    • Shuichi ToriyamaKazuya Matsuzawa
    • Shuichi ToriyamaKazuya Matsuzawa
    • G11C11/34
    • G11C16/0483H01L21/84H01L27/115H01L27/11521H01L27/11524H01L27/1203
    • An electrically erasable programmable read-only memory (EEPROM) device of the NAND type having sideface electrodes as auxiliary electrodes on the opposite lateral surfaces of a transistor channel region to thereby improve operation margins is disclosed. The NAND EEPROM, also known as NAND flash memory, has on a semiconductive substrate an array of memory cells including a serial combination of memory cell transistors. Each of memory cell transistors has a pair of source and drain regions, a channel region, a tunnel insulator film, a charge storage layer, a control dielectric film, a control electrode, a sideface dielectric film on the sidefaces of the channel region, and sideface electrodes which are formed on the side surfaces of channel region with the channel region being laterally interposed therebetween. The sideface electrodes are commonized or “shared” by adjacent ones of the serially coupled memory cell transistors.
    • 公开了一种NAND型电可擦除可编程只读存储器(EEPROM)器件,其具有在晶体管沟道区域的相对侧表面上的辅助电极的侧面电极,从而提高了操作余量。 NAND EEPROM(也称为NAND闪速存储器)在半导体衬底上具有包括存储单元晶体管的串联组合的存储单元阵列。 每个存储单元晶体管具有一对源极和漏极区,沟道区,隧道绝缘膜,电荷存储层,控制电介质膜,控制电极,沟道区域的侧面上的侧面电介质膜,以及 在通道区域的侧表面上形成有横向插入其间的侧面电极。 侧面电极被串联耦合的存储单元晶体管中的相邻电极共同化或“共享”。
    • 4. 发明授权
    • NAND type nonvolatile semiconductor memory device having sideface electrode shared by memory cells
    • 具有由存储单元共享的侧面电极的NAND型非易失性半导体存储器件
    • US07643346B2
    • 2010-01-05
    • US12052149
    • 2008-03-20
    • Shuichi ToriyamaKazuya Matsuzawa
    • Shuichi ToriyamaKazuya Matsuzawa
    • G11C11/34
    • G11C16/0483H01L21/84H01L27/115H01L27/11521H01L27/11524H01L27/1203
    • An electrically erasable programmable read-only memory (EEPROM) device of the NAND type having sideface electrodes as auxiliary electrodes on the opposite lateral surfaces of a transistor channel region to thereby improve operation margins is discusssed. The NAND EEPROM, also known as NAND flash memory, has on a semiconductive substrate an array of memory cells including a serial combination of memory cell transistors. Each of memory cell transistors has a pair of source and drain regions, a channel region, a tunnel insulator film, a charge storage layer, a control dielectric film, a control electrode, a sideface dielectric film on the sidefaces of the channel region, and sideface electrodes which are formed on the side surfaces of channel region with the channel region being laterally interposed therebetween. The sideface electrodes are commonized or “shared” by adjacent ones of the serially coupled memory cell transistors.
    • 在具有侧面电极作为辅助电极的NAND类型的电可擦除可编程只读存储器(EEPROM)器件的晶体管沟道区域的相对侧表面上,从而提高了操作余量。 NAND EEPROM(也称为NAND闪速存储器)在半导体衬底上具有包括存储单元晶体管的串联组合的存储单元阵列。 每个存储单元晶体管具有一对源极和漏极区,沟道区,隧道绝缘膜,电荷存储层,控制电介质膜,控制电极,沟道区域的侧面上的侧面电介质膜,以及 在通道区域的侧表面上形成有横向插入其间的侧面电极。 侧面电极被串联耦合的存储单元晶体管中的相邻电极共同化或“共享”。