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1. 发明申请

US20050123383A1 Substrate holding device 有权
标题翻译：基板保持装置
公开(公告)号：US20050123383A1
公开(公告)日：2005-06-09
申请号：US10959163
申请日：2004-10-07
申请人： Hirohiko Goto , Shiro Oda
发明人： Hirohiko Goto , Shiro Oda
IPC分类号： B25J15/00 , B25J15/08 , B65B69/00 , B65G49/07 , H01L21/00 , H01L21/677 , H01L21/68 , H01L21/687
CPC分类号： H01L21/67259 , H01L21/67781 , H01L21/681 , H01L21/68707 , Y10S414/137
摘要： A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.
摘要翻译：一种基板保持装置，包括：保持构件，其构造成保持基板，所述保持构件沿着预定排列方向布置并且可沿着所述布置方向移动; 互锁机构，联动所述保持构件，用于沿着所述排列方向同时坐标移动，以改变所述保持构件之间相对于所述排列方向的间隔; 用于驱动所述保持构件至少沿所述排列方向移动的驱动单元; 以及控制单元，用于根据关于沿着排列方向布置的基板的布置状况的映射信息，分别控制驱动单元将保持构件移动到基板取出位置，其中保持构件能够保持基板。

2. 发明授权

US07260448B2 Substrate holding device 有权
标题翻译：基板保持装置
公开(公告)号：US07260448B2
公开(公告)日：2007-08-21
申请号：US10959163
申请日：2004-10-07
申请人： Hirohiko Goto , Shiro Oda
发明人： Hirohiko Goto , Shiro Oda
IPC分类号： G06F7/00
CPC分类号： H01L21/67259 , H01L21/67781 , H01L21/681 , H01L21/68707 , Y10S414/137
摘要： A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.
摘要翻译：一种基板保持装置，包括：保持构件，其构造成保持基板，所述保持构件沿着预定排列方向布置并且可沿着所述布置方向移动; 互锁机构，联动所述保持构件，用于沿着所述排列方向同时坐标移动，以改变所述保持构件之间相对于所述排列方向的间隔; 用于驱动所述保持构件至少沿所述排列方向移动的驱动单元; 以及控制单元，用于根据关于沿着排列方向布置的基板的布置状况的映射信息，分别控制驱动单元将保持构件移动到基板取出位置，其中保持构件能够保持基板。

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