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1. 发明授权

US5319216A Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter 失效
标题翻译：具有以交错方式布置的发光和接收元件的基板检测器和偏振滤光器
公开(公告)号：US5319216A
公开(公告)日：1994-06-07
申请号：US105166
申请日：1993-08-12
申请人： Shori Mokuo , Yoichi Deguchi , Mitsuo Nishi , Shinji Tadakuma
发明人： Shori Mokuo , Yoichi Deguchi , Mitsuo Nishi , Shinji Tadakuma
IPC分类号： G01V8/20 , G01V9/04
CPC分类号： G01V8/20 , Y10S414/138
摘要： A substrate detector device comprises a boat or chuck for holding substrates, a light emitting section having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates, a light receiving section, facing the light emitting section and having a plurality of light receiving elements, for receiving light beams passed through the substrates, the light receiving elements arranged side by side so as not face the light emitting elements, a polarization filter provided on optical axes of the respective optical beams incident on the light receiving elements, a memory for storing, as reference data, an amount of light received by a receiving element which has been measured in advance when a light beam is applied to a substrate in a state where no other substrate is present on either side of the substrate, and controller for discriminating the presence, the number, and the state of arrangement of the substrates on the holding means based on the reference data and measured data based on the amount of light received by the light receiving elements after a light beam scattered by the substrate to be detected and a light beam wraparound substrates adjacent thereto are removed by the polarization filter.
摘要翻译：基板检测器装置包括用于保持基板的船或卡盘，具有并排布置的用于分别向基板施加光束的多个发光元件的发光部分，面向发光部分的光接收部分，以及具有多个光接收元件，用于接收通过基板的光束，并排设置为不面对发光元件的光接收元件，设置在入射到光的各个光束的光轴上的偏振滤光器接收元件，用于存储作为参考数据的存储器，由接收元件接收的光量，该接收元件在将光束施加到基板上时已经预先测量到，在不存在其它基板的状态下基板和控制器，用于基于保持装置识别基板的布置的存在，数量和状态基于由被检测基板散射的光束和与其相邻的光束环绕基板之后的光接收元件所接收的光量的基准数据和测量数据被偏振滤光器去除。

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