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1. 发明授权

US08796654B2 Scan device for microscope measurement instrument 有权
标题翻译：扫描仪用于显微镜测量仪器
公开(公告)号：US08796654B2
公开(公告)日：2014-08-05
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/86 , G01V8/00 , G01N35/10 , G01Q10/06 , H01J37/20 , H01J37/26 , H01J37/28 , B82Y35/00
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译：将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

2. 发明申请

US20110261352A1 Scan Device 有权
标题翻译：扫描设备
公开(公告)号：US20110261352A1
公开(公告)日：2011-10-27
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/01
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译：将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

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