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    • 2. 发明授权
    • Film-forming apparatus and method
    • 成膜装置及方法
    • US09194056B2
    • 2015-11-24
    • US13568872
    • 2012-08-07
    • Kunihiko SuzukiShinichi MitaniYuusuke Sato
    • Kunihiko SuzukiShinichi MitaniYuusuke Sato
    • C30B23/02C30B29/06C30B25/12C23C16/44C23C16/455
    • C30B29/06C23C16/4411C23C16/45565C23C16/45589C30B25/12
    • A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.
    • 一种成膜装置和方法,包括:用于提供反应气体的成膜室,设置在成膜室中的圆柱形衬垫,设置在衬套上方的用于反应气体通过的矫直叶片,其中外部 成膜室通过从整形叶片封闭衬垫的上部开口的位置移动矫直叶片,通过设置在成膜室的壁处的衬底转移部分来连接衬里的内部。 一种基板支撑部分,其设置在所述衬垫中,用于在成膜之前支撑所述基板以在垂直方向上移动所述基板;基板转移单元,其能够通过所述基板转移部分在所述成膜室内移动,其中所述基板为 在衬底支撑部分和衬底转移单元之间转移。
    • 3. 发明授权
    • Deposition apparatus and method
    • 沉积装置和方法
    • US09194044B2
    • 2015-11-24
    • US13029402
    • 2011-02-17
    • Kunihiko SuzukiShinichi Mitani
    • Kunihiko SuzukiShinichi Mitani
    • C23C16/00C23C16/455
    • C23C16/4557
    • A deposition apparatus 50 includes a chamber 1 having at its top section a gas inlet 4 for supplying deposition gas 25. Inside chamber 1 is a susceptor 7 on which to place a substrate 6; a heater 8 located below the substrate 6; and a liner 2 for covering the inner walls of the chamber 1. Apparatus 50 deposits a film on the substrate 6 by supplying deposition gas 25 from gas inlet 4 into chamber 1 while heating substrate 6. An upper electric resistance heater cluster 35 is located between the inner walls of the chamber 1 and liner 2 such that the upper heater 35 surrounds the liner 2. The upper heater 35 is divided vertically into electric resistance heaters 36, 37, and 38 which are independently temperature-controlled. The substrate 6 is heated with the use of both heater 8 and the upper heater cluster 35.
    • 沉积设备50包括在其顶部具有用于供应沉积气体25的气体入口4的腔室1.腔室1内是放置衬底6的基座7; 位于基板6下方的加热器8; 以及用于覆盖室1的内壁的衬垫2.装置50通过在加热衬底6的同时将气体入口4的沉积气体25供应到室1中而将衬底6沉积在衬底6上。上电阻加热器组35位于 腔室1和衬套2的内壁,使得上部加热器35围绕衬垫2.上部加热器35被垂直分割成独立温度控制的电阻加热器36,37和38。 使用加热器8和上加热器簇35来加热基板6。
    • 5. 发明申请
    • PARTICULATE MATTER PROCESSING APPARATUS
    • 颗粒物加工设备
    • US20140007650A1
    • 2014-01-09
    • US13519021
    • 2011-03-16
    • Shinichi MitaniHiroshi NomuraEiji Murase
    • Shinichi MitaniHiroshi NomuraEiji Murase
    • G01N27/04
    • G01N27/04B03C3/0175B03C3/41B03C3/68B03C2201/24B03C2201/30F01N11/00F01N11/007F01N2560/05F01N2560/12F01N2900/1606G01N15/0606Y02T10/47
    • An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.
    • 以高精度估计颗粒物质的聚集量。 在其中安装有电极的处理部件的颗粒物处理装置设置在内燃机的排气通道中,其中通过在电极和处理部件之间产生电位差而使颗粒物质聚集, 与电极连接并对其施加电压的电源,检测通过电极的电流的电流检测装置,基于在电极上检测到的电流来估计颗粒物的聚集量的估计装置, 对电极施加电压的时间,检测或估计通过排气通路的排气的空燃比的空燃比检测装置,以及禁止在估计装置中进行的估计的禁止装置 超大空燃比的情况。