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    • 3. 发明授权
    • Modularized probe card with compressible electrical connection device
    • 带可压缩电气连接装置的模块化探头卡
    • US06781392B1
    • 2004-08-24
    • US10435560
    • 2003-05-12
    • Shih-Jye ChengAn-Hong LiuYeong-Her WangYuan-Ping TsengYao-Jung Lee
    • Shih-Jye ChengAn-Hong LiuYeong-Her WangYuan-Ping TsengYao-Jung Lee
    • G01R3102
    • G01R1/07378
    • A modularized probe card comprising an interface board, a probe head and at least a compressible electrical connection device is disclosed. The compressible electrical connection device comprises an insulation layer with a plurality of circuits on one of its surface. Two ends of each circuit connect respectively to the first contacting pad and the second contacting pad which combine with elastic contact members. Each elastic contact member has a supporter combining with a conductive layer for electrical connections by pushing and compressing. While a probe head is modularized installed on an interface board, the elastic contact members of the compressible electrical connection device is elastically contacted and compressed the probe head and the interface board to acquire modularized electrical connection of the probe card.
    • 公开了一种包括接口板,探头和至少可压缩电连接装置的模块化探针卡。 可压缩电连接装置包括在其表面之一上具有多个电路的绝缘层。 每个电路的两端分别连接到与弹性接触构件组合的第一接触垫和第二接触垫。 每个弹性接触构件具有通过推压和压缩与电连接的导电层组合的支撑件。 当探头头被模块化安装在接口板上时,可压缩电连接装置的弹性接触件弹性接触并压缩探针头和接口板,以获得探针卡的模块化电连接。
    • 5. 发明授权
    • Modularized probe head
    • 模块化探头
    • US06946860B2
    • 2005-09-20
    • US10680230
    • 2003-10-08
    • Shih-Jye ChengAn-Hong LiuYeong-Her WangYeong-Ching ChaoYao-Jung Lee
    • Shih-Jye ChengAn-Hong LiuYeong-Her WangYeong-Ching ChaoYao-Jung Lee
    • G01R31/28G01R31/02G01R31/26
    • G01R31/2887
    • A modularized probe head for modularly assembling on a probe card is configured for probing a semiconductor wafer under test. The probe head includes a silicon substrate having an active surface and an opposing back surface. The back surface of the silicon substrate is attached on a holder. The silicon substrate has a plurality of peripheral bond pads and contact pads on its active surface. At least a probing chip is mounted on the active surface of the silicon substrate. The probing chip has probing tips and side electrodes. The side electrodes are connected with the contact pads by means of solder material. The peripheral bonding pads of the silicon substrate are connected with a flexible printed circuit for electrically connecting to a multi-layer printed circuit board of a probe card.
    • 用于模块化组装在探针卡上的模块化探头被配置用于探测被测半导体晶片。 探头包括具有活性表面和相对背面的硅衬底。 硅衬底的背面附着在支架上。 硅衬底在其有源表面上具有多个外围接合焊盘和接触焊盘。 至少探测芯片安装在硅衬底的有源表面上。 探测芯片具有探测尖端和侧面电极。 侧电极通过焊料与接触焊盘连接。 硅衬底的周边接合焊盘与用于电连接到探针卡的多层印刷电路板的柔性印刷电路连接。