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1. 发明授权

US08416491B2 Method and system for three-dimensional polarization-based confocal microscopy 有权
标题翻译：用于三维偏振聚焦显微镜的方法和系统
公开(公告)号：US08416491B2
公开(公告)日：2013-04-09
申请号：US12647903
申请日：2009-12-28
申请人： Liang-Chia Chen , Shih-Hsuan Kuo , Sheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
发明人： Liang-Chia Chen , Shih-Hsuan Kuo , Sheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
IPC分类号： G02B21/00 , G02B21/06
CPC分类号： G02B21/0068 , G01B11/2513 , G01B11/2527 , G02B21/0032
摘要： A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.
摘要翻译：在本公开中提供了一种用于三维偏振的共焦显微镜的方法和系统，用于分析物体的表面轮廓。在本公开中，由光栅形成的线偏振结构光投影在物体底层轮廓测量上。通过一组偏振器和移动结构光的步骤，使用共焦原理获得关于与物体相关联的不同图像获取位置的一系列图像。接下来，获得分别对应于每个图像的多个检查像素的多个聚焦指标，用于形成相对于测量深度的聚焦曲线，并获得与每个深度响应曲线相关联的峰值。最后，获得相对于每个深度响应曲线的峰值的深度位置，用于重构对象的表面轮廓。

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