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    • 8. 发明授权
    • Method of fabricating field emission display employing carbon nanotubes
    • 使用碳纳米管制造场发射显示的方法
    • US06935915B2
    • 2005-08-30
    • US10209937
    • 2002-08-02
    • Shang-hyeun ParkDeuk-seok ChungHang-woo Lee
    • Shang-hyeun ParkDeuk-seok ChungHang-woo Lee
    • B82B3/00H01J1/30H01J9/02
    • B82Y10/00H01J9/025H01J2201/30469
    • A method of fabricating a field emission display employing carbon nanotubes (CNTs) as electron emitters is provided. The method includes forming a cathode on a substrate; forming a gate insulation layer having a plurality of gate holes on the cathode; forming a gate electrode having a plurality of via-holes corresponding to the gate holes, respectively, on the gate insulation layer; forming a plurality of conductive columns higher than the gate electrode on the cathode within the respective gate holes; adhering the CNTs to the bottom of a plate template which is separately provided; bringing the bottom of the template having the CNTs to contact the tops of the conductive columns to adhere the CNTs to the tops of the conductive columns; and firing the conductive columns to lower the levels thereof. Accordingly, the problems of conventional methods, such as sinking of CNTs caused by screen printing, residual CNTs remaining within a gate when a lift-off method is used and short circuiting between gate and cathode due to the residual CNTs, can be solved. In addition, CNTs are applied to only a part for field emission, that is, only the top of a conductive column, thereby requiring fewer CNTs and decreasing fabrication cost. Moreover, the method uses stamping in order to form CNTs, so it is very advantageous in mass production.
    • 提供了使用碳纳米管(CNT)作为电子发射体制造场致发射显示器的方法。 该方法包括在基板上形成阴极; 在所述阴极上形成具有多个栅极孔的栅极绝缘层; 在所述栅极绝缘层上分别形成具有与所述栅极孔对应的多个通孔的栅电极; 在各个门孔内形成比阴极上的栅电极高的多个导电柱; 将CNT粘附到单独提供的板模板的底部; 使具有CNT的模板的底部接触导电柱的顶部以将CNT粘附到导电柱的顶部; 并且烧制导电柱以降低其水平。 因此,可以解决常规方法的问题,例如由丝网印刷引起的CNT的沉没,使用剥离方法时残留在栅极内的残留CNT以及由于残留CNT而引起的栅极和阴极之间的短路。 此外,CNT仅被施加到用于场发射的部分,即仅导电柱的顶部,从而需要更少的CNT并降低制造成本。 此外,该方法使用冲压以形成CNT,因此在批量生产中是非常有利的。