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    • 2. 发明申请
    • Complementary metal oxide semiconductor image sensor and method for fabricating the same
    • 互补金属氧化物半导体图像传感器及其制造方法
    • US20060011932A1
    • 2006-01-19
    • US11022858
    • 2004-12-28
    • Shang Kim
    • Shang Kim
    • H01L33/00H01L21/00
    • H01L27/14627
    • A CMOS image sensor and a method for fabricating the same is disclosed, to enhance the efficiency in condensing the light by forming a multi-layered micro lens with various materials having different refractive indexes, in which the CMOS image sensor includes a plurality of photosensitive devices on a semiconductor substrate; an insulating interlayer on the plurality of photosensitive devices; a plurality of color filter layers in correspondence with the respective photosensitive devices, to filter the light by respective wavelengths; a first micro-lens layer on an entire surface of the color filter layers, to condense the light; and a plurality of second micro-lens layers on the first micro-lens layer in correspondence with the respective photosensitive devices, wherein the second micro-lens layer has the different refractive index from that of the first micro-lens layer.
    • 公开了CMOS图像传感器及其制造方法,以通过用具有不同折射率的各种材料形成多层微透镜来提高冷凝光的效率,其中CMOS图像传感器包括多个感光装置 在半导体衬底上; 多个感光装置上的绝缘中间层; 与各个感光装置对应的多个滤色器层,通过各波长对光进行滤光; 在滤色器层的整个表面上的第一微透镜层,以冷凝光; 以及与所述各个感光装置对应的所述第一微透镜层上的多个第二微透镜层,其中所述第二微透镜层的折射率与所述第一微透镜层的折射率不同。
    • 3. 发明申请
    • Complementary metal oxide semiconductor image sensor and method for fabricating the same
    • 互补金属氧化物半导体图像传感器及其制造方法
    • US20060033131A1
    • 2006-02-16
    • US11022647
    • 2004-12-28
    • Shang Kim
    • Shang Kim
    • H01L31/113H01L31/062H01L31/0232
    • H01L27/14685H01L27/14621H01L27/14627
    • A CMOS image sensor and a method for fabricating the same is disclosed, to enhance the image-sensing efficiency by forming a concave lens area for improving the light-condensing efficiency in a planarization layer formed before a micro-lens array, in which the CMOS image sensor includes a plurality of photosensitive devices on a semiconductor substrate; an insulating interlayer on the plurality of photosensitive devices; a plurality of color filter layers in correspondence with the respective photosensitive devices, to filter the light by respective wavelengths; a planarization layer on the color filter layers, and having first micro-lens by intaglio in correspondence with the respective photosensitive patterns to condense the light secondly; and a plurality of second micro-lens layers on the planarization layer in correspondence with the respective photosensitive devices, to condense the light firstly.
    • 公开了一种CMOS图像传感器及其制造方法,以通过形成用于提高在微透镜阵列之前形成的平坦化层中的聚光效率的凹透镜区域来增强图像感测效率,其中CMOS 图像传感器包括在半导体衬底上的多个光敏器件; 多个感光装置上的绝缘中间层; 与各个感光装置对应的多个滤色器层,通过各波长对光进行滤光; 在滤色器层上的平坦化层,并且具有与各个感光图案对应的凹版的第一微透镜,以二次冷凝光; 以及与各个感光装置对应的平坦化层上的多个第二微透镜层,以首先冷凝光。
    • 5. 发明申请
    • Complementary metal oxide semiconductor image sensor and method for fabricating the same
    • 互补金属氧化物半导体图像传感器及其制造方法
    • US20070120163A1
    • 2007-05-31
    • US11641831
    • 2006-12-20
    • Shang Kim
    • Shang Kim
    • H01L31/062H01L31/0232
    • H01L27/14685H01L27/14621H01L27/14627
    • A CMOS image sensor and a method for fabricating the same is disclosed, to enhance the image-sensing efficiency by forming a concave lens area for improving the light-condensing efficiency in a planarization layer formed before a micro-lens array, in which the CMOS image sensor includes a plurality of photosensitive devices on a semiconductor substrate; an insulating interlayer on the plurality of photosensitive devices; a plurality of color filter layers in correspondence with the respective photosensitive devices, to filter the light by respective wavelengths; a planarization layer on the color filter layers, and having first micro-lens by intaglio in correspondence with the respective photosensitive patterns to condense the light secondly; and a plurality of second micro-lens layers on the planarization layer in correspondence with the respective photosensitive devices, to condense the light firstly.
    • 公开了CMOS图像传感器及其制造方法,通过形成用于提高在微透镜阵列之前形成的平坦化层中的聚光效率的凹透镜区域来提高图像感测效率,其中CMOS 图像传感器包括在半导体衬底上的多个光敏器件; 多个感光装置上的绝缘中间层; 与各个感光装置对应的多个滤色器层,通过各波长对光进行滤光; 在滤色器层上的平坦化层,并且具有与各个感光图案对应的凹版的第一微透镜,以二次冷凝光; 以及与各个感光装置对应的平坦化层上的多个第二微透镜层,以首先冷凝光。