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1. 发明授权

US05997656A Semiconductor wet processing equipment having integrated input and emergency output port units and a method of controlling the loading and unloading of lots in the same 有权
标题翻译：具有集成输入和紧急输出端口单元的半导体湿式加工设备以及控制其中装载和卸载的方法
公开(公告)号：US05997656A
公开(公告)日：1999-12-07
申请号：US184849
申请日：1998-11-03
申请人： Seok-hyun Kim
发明人： Seok-hyun Kim
IPC分类号： H01L21/677 , H01L21/00 , H01L21/304 , H01L21/68 , B08B3/02
CPC分类号： H01L21/67276 , H01L21/67057 , Y10S134/902
摘要： Wet processing equipment automatically and rapidly unloads unit lots of semiconductor devices at an input port unit without any intervention of an operator in the event of an emergency, and thereby prevents unforeseen operational problems. The semiconductor wet processing equipment includes an emergency output port unit integral with the input port unit. The emergency output port unit will transfer lots directly from the loading position established by the input port unit and set the lots at an emergency unloading position when a predetermined condition occurs in the wet processing equipment. When such a condition occurs, a process canceling command is input from a host computer. If the process canceling command is input, the controller determines whether the lot is in a standby state at the loading position. If the lot is in the standby state, the process canceling command is downloaded into the processing equipment. Then a determination is made as to whether the lot has been unloaded from the input port unit onto the emergency output port unit. If the lot has been unloaded from the input port unit onto the emergency output port unit, an AGV operating command is downloaded into an AGV server.
摘要翻译：湿处理设备在输入端口单元处自动且快速地卸载单元批量的半导体器件，而在紧急情况下无需操作人员的任何干预，从而防止不可预见的操作问题。半导体湿式处理设备包括与输入端口单元集成的紧急输出端口单元。紧急输出端口单元将直接从输入端口单元建立的装载位置传送批量，并在湿式处理设备中发生预定条件时将批量设置在紧急卸载位置。当发生这种情况时，从主计算机输入处理取消命令。如果输入过程取消命令，则控制器确定批次是否在加载位置处于待机状态。如果批次处于待机状态，则将处理取消命令下载到处理设备中。然后确定批次是否从输入端口单元卸载到紧急输出端口单元上。如果批次已从输入端口单元卸载到紧急输出端口单元上，则AGV操作命令将下载到AGV服务器中。

2. 发明申请

US20120139021A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：US20120139021A1
公开(公告)日：2012-06-07
申请号：US13241435
申请日：2011-09-23
申请人： Seok-Hyun Kim , Deok-Sung Hwang , Yun-Jae Lee , Chul Lee , Yoon-Taek Jang , Chang-Hoon Jeon , Sang-Bin Ahn , Jun-Hyeok Ahn
发明人： Seok-Hyun Kim , Deok-Sung Hwang , Yun-Jae Lee , Chul Lee , Yoon-Taek Jang , Chang-Hoon Jeon , Sang-Bin Ahn , Jun-Hyeok Ahn
IPC分类号： H01L27/108
CPC分类号： H01L27/10876 , H01L21/765
摘要： A semiconductor memory device includes a transistor having a channel region buried in a substrate and source/drain regions formed to provide low contact resistance. A field isolation structure is formed in the substrate to define active structures. The field isolation structure includes a gap-fill pattern, a first material layer surrounding the gap-fill pattern, and a second material layer surrounding at least a portion of the first material layer. Each active structure includes a first active pattern having a top surface located beneath the level of the top surface of the field isolation structure, and a second active pattern disposed on the first active pattern and whose top is located above the level of the top surface of the field isolation structure.
摘要翻译：半导体存储器件包括具有掩埋在衬底中的沟道区和形成为提供低接触电阻的源极/漏极区的晶体管。在衬底中形成场隔离结构以限定有源结构。场隔离结构包括间隙填充图案，围绕间隙填充图案的第一材料层和围绕第一材料层的至少一部分的第二材料层。每个有源结构包括第一有源图案，其具有位于场隔离结构的顶表面的平面下方的顶表面，以及布置在第一有源图案上的第二有源图案，其顶部位于第一有源图案的顶表面的高度之上现场隔离结构。

3. 发明授权

US06604012B1 Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same 有权
标题翻译：根据前述处理的结果和相同的装置在后续处理中可变地布置处理设备和/或处理条件的批量调度方法
公开(公告)号：US06604012B1
公开(公告)日：2003-08-05
申请号：US09644294
申请日：2000-08-23
申请人： Dae-Sik Cho , Hee-Sun Chae , Seok-Hyun Kim , Seung-Hoon Tong , Tae-Yang Yoon , Doh-Soon Kwak , Hee-Se Kang , Yll-Seug Park , Jae-Seok Oh
发明人： Dae-Sik Cho , Hee-Sun Chae , Seok-Hyun Kim , Seung-Hoon Tong , Tae-Yang Yoon , Doh-Soon Kwak , Hee-Se Kang , Yll-Seug Park , Jae-Seok Oh
IPC分类号： G06F1900
CPC分类号： G05B19/41875 , G05B2219/32077 , G05B2219/32198 , G05B2219/32263 , G05B2219/45031 , Y02P90/12 , Y02P90/20 , Y02P90/22
摘要： A lot dispatching method and system for variably applying the most suitable processing equipment and/or processing condition in a succeeding process of a semiconductor manufacturing process, wherein the succeeding process is influenced by the result of a preceding process. A lot processed by the preceding process is dispatched to the succeeding processing equipment according to a systematic analysis result obtained from a relationship between a process result of the preceding process and an efficiency and the characteristics of a plurality of processing equipment in the succeeding process. A plurality of process conditions for the succeeding process corresponding to the performance of the preceding process is provided. A respective process condition has characteristics that minimize the difference in performance in the succeeding process from a desired or target performance. By systematically analyzing the quality of the lot waiting to be dispatched, the succeeding process is performed with the most suitable process condition.
摘要翻译：用于在半导体制造过程的后续过程中可变地应用最合适的处理设备和/或处理条件的大量调度方法和系统，其中后续处理受到前一处理的结果的影响。根据从前一处理的处理结果与效率之间的关系获得的系统分析结果和后续处理中的多个处理设备的特性，将由前述处理进行的许多处理分派到后续处理设备。提供了与前述处理的执行相对应的用于后续处理的多个处理条件。相应的处理条件具有使从后续处理中的性能与期望性能或目标性能的差异最小化的特征。通过系统地分析等待发送的批次的质量，以最合适的处理条件进行后续处理。

4. 发明申请

US20120150741A1 MOBILE DEVICE FOR PROVIDING SMART WALLET SERVICE AND LAYER STRUCTURE FOR OPERATING SMART WALLET SERVICE 审中-公开
标题翻译：用于提供智能电子钱包服务的移动设备和用于操作智能电子钱包服务的层结构
公开(公告)号：US20120150741A1
公开(公告)日：2012-06-14
申请号：US13324506
申请日：2011-12-13
申请人： Sangrae CHO , Dae Seon CHOI , Young Seob CHO , Jong-Hyouk NOH , Soo Hyung KIM , Seung-Hyun KIM , Seung Hun JIN , Seok Hyun KIM , Hyun sook CHO
发明人： Sangrae CHO , Dae Seon CHOI , Young Seob CHO , Jong-Hyouk NOH , Soo Hyung KIM , Seung-Hyun KIM , Seung Hun JIN , Seok Hyun KIM , Hyun sook CHO
IPC分类号： G06Q20/36
CPC分类号： G06Q20/105 , G06Q20/363
摘要： A smart wallet service module includes: a management unit for installing, activating, and terminating a smart wallet service or receiving and managing a user's setting; a security unit for providing an authentication service through an authenticated certificate or electronic signature; a storage unit for storing data in a database of a mobile device and managing the stored data; and a functional unit connected to a storage medium inside the mobile device and providing a service related to electronic commerce or credit card issuing.
摘要翻译：智能钱夹服务模块包括：用于安装，激活和终止智能钱包服务或接收和管理用户设置的管理单元; 用于通过认证证书或电子签名提供认证服务的安全单元; 存储单元，用于将数据存储在移动设备的数据库中并管理所存储的数据; 以及连接到移动设备内部的存储介质并提供与电子商务或信用卡发行相关的服务的功能单元。

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