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    • 1. 发明授权
    • Liquid phase laser ablation method and apparatus
    • 液相激光烧蚀方法及装置
    • US09339891B2
    • 2016-05-17
    • US14000721
    • 2012-02-13
    • Sanshiro Nagare
    • Sanshiro Nagare
    • B23K26/122B82Y40/00B23K26/12B29C59/16B23K26/16B23K26/36B29C35/08
    • B23K26/122B23K26/0622B23K26/0643B23K26/0648B23K26/082B23K26/1224B23K26/16B23K26/361B23K26/362B29C59/16B29C2035/0838B82Y40/00
    • A liquid phase laser ablation apparatus is provided, which includes a vessel for storing liquid in which a component to be atomized is arranged; a laser oscillating device for oscillating a laser light irradiated to the component through the liquid; a reflecting mirror configured to freely change an angle of incidence of the laser light with respect to a surface of the liquid; a focusing lens for focusing the laser light oscillated from the laser oscillating device; a cover body for covering an upper surface of the vessel; and a laser light introduction port provided on the cover body or a side surface of the vessel above the surface of the liquid. Accordingly, liquid will not adhere to optical components constituting the apparatus, there is little contamination and damage to the optical components, and laser ablation can occur in a continuous and stable manner for a long period of time.
    • 提供了一种液相激光烧蚀装置,其包括用于储存液体的容器,其中布置有被雾化的部件; 激光振荡装置,用于使通过所述液体照射到所述部件的激光振荡; 反射镜,被配置为自由地改变激光相对于液体的表面的入射角; 聚焦透镜,用于聚焦从激光振荡装置振荡的激光; 用于覆盖容器的上表面的盖体; 以及设置在所述盖体上的所述液体的表面上方的所述容器的侧面的激光导入口。 因此,液体不会附着在构成装置的光学部件上,对光学部件的污染和损伤小,激光烧蚀可以长时间连续稳定地进行。