专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08120753B2 Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process 有权
标题翻译：用于产生校准瞳孔核的方法，程序产品和装置及其在光刻仿真过程中的使用方法
公开(公告)号：US08120753B2
公开(公告)日：2012-02-21
申请号：US11979839
申请日：2007-11-08
申请人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
发明人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
IPC分类号： G03B27/32 , G03B27/54
CPC分类号： G03F7/70216 , G03F7/705 , G03F7/70675
摘要： A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.
摘要翻译：一种生成用于模拟具有瞳孔的光学成像系统的成像性能的模型的方法。该方法包括以下步骤：定义光学成像系统和由光学成像系统利用的过程; 并且定义表示光学成像系统和过程的成像性能的模型方程，其中模型方程式包括校准的瞳孔核心。校准瞳孔代表瞳孔表现的线性模型。

2. 发明申请

US20110236808A1 Method and Apparatus for Performing Dark Field Double Dipole Lithography (DDL) 有权
公开(公告)号：US20110236808A1
公开(公告)日：2011-09-29
申请号：US13155259
申请日：2011-06-07
申请人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
发明人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
IPC分类号： G03F1/00
CPC分类号： G03F1/36 , G03F1/70 , G03F7/70125 , G03F7/70466
摘要： A method of generating complementary masks for use in a dark field double dipole imaging process. The method includes the steps of identifying a target pattern having a plurality of features, including horizontal and vertical features; generating a horizontal mask based on the target pattern, where the horizontal mask includes low contrast vertical features. The generation of the horizontal mask includes the steps of optimizing the bias of the low contrast vertical features contained in the horizontal mask; and applying assist features to the horizontal mask. The method further includes generating a vertical mask based on the target pattern, where the vertical mask contains low contrast horizontal features. The generation of the vertical mask includes the steps of optimizing the bias of low contrast horizontal features contained in the vertical mask; and applying assist features to the vertical mask.

3. 发明授权

US07981576B2 Method and apparatus for performing dark field double dipole lithography (DDL) 有权
标题翻译：用于进行暗场双偶极子光刻（DDL）的方法和装置
公开(公告)号：US07981576B2
公开(公告)日：2011-07-19
申请号：US12890494
申请日：2010-09-24
申请人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
发明人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
IPC分类号： G03F1/00 , G03F1/14 , G06F17/50
CPC分类号： G03F1/36 , G03F1/70 , G03F7/70125 , G03F7/70466
摘要： A method of generating complementary masks for use in a dark field double dipole imaging process. The method includes the steps of identifying a target pattern having a plurality of features, including horizontal and vertical features; generating a horizontal mask based on the target pattern, where the horizontal mask includes low contrast vertical features. The generation of the horizontal mask includes the steps of optimizing the bias of the low contrast vertical features contained in the horizontal mask; and applying assist features to the horizontal mask. The method further includes generating a vertical mask based on the target pattern, where the vertical mask contains low contrast horizontal features. The generation of the vertical mask includes the steps of optimizing the bias of low contrast horizontal features contained in the vertical mask; and applying assist features to the vertical mask.
摘要翻译：一种产生用于暗场双偶极成像过程的互补掩模的方法。该方法包括以下步骤：识别具有多个特征的目标图案，包括水平和垂直特征; 基于目标图案生成水平掩模，其中水平掩模包括低对比度垂直特征。水平掩模的生成包括优化包含在水平掩模中的低对比度垂直特征的偏压的步骤; 并将辅助特征应用于水平掩模。该方法还包括基于目标图案生成垂直掩模，其中垂直掩模包含低对比度水平特征。垂直掩模的产生包括优化垂直掩模中包含的低对比度水平特征的偏差的步骤; 并将辅助特征应用于垂直掩模。

4. 发明申请

US20090138500A1 METHOD OF COMPACT DISPLAY COMBINED WITH PROPERTY-TABLE-VIEW FOR A COMPLEX RELATIONAL DATA STRUCTURE 审中-公开
标题翻译：与复杂的关系数据结构的属性表视图组合的紧凑显示方法
公开(公告)号：US20090138500A1
公开(公告)日：2009-05-28
申请号：US12248833
申请日：2008-10-09
申请人： Zhiqiang YUAN , Jang Fung Chen , Sangbong Park
发明人： Zhiqiang YUAN , Jang Fung Chen , Sangbong Park
IPC分类号： G06F17/30
CPC分类号： G06F16/289 , G06F16/2246
摘要： A method of managing data with a relational data structure, wherein the data having one or more tree structures having sub-tree structures, each tree or sub-tree structure comprising nodes, and relationship information indicating a relationship between the nodes, comprises allocating at least one of the tree structures or the sub-tree structures into another tree structure according to the relationship information, if the relationship information indicates that a node in the at least one of the tree structures or the sub-tree structures relates to one or more of the nodes of the another tree structure.
摘要翻译：一种使用关系数据结构管理数据的方法，其中具有一个或多个具有子树结构的树结构的数据，包括节点的每个树或子树结构以及指示节点之间的关系的关系信息包括至少分配如果所述关系信息指示所述至少一个所述树结构或所述子树结构中的节点与所述树结构或所述子树结构中的一个或多个相关联，则根据所述关系信息将所述树结构或所述子树结构中的一个重构为另一个树结构另一个树结构的节点。

5. 发明授权

US07494753B2 Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation 有权
标题翻译：用于改进临界尺寸计算中使用的抗蚀剂模型校准的方法，程序产品和装置
公开(公告)号：US07494753B2
公开(公告)日：2009-02-24
申请号：US11339827
申请日：2006-01-26
申请人： Jang Fung Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
发明人： Jang Fung Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
IPC分类号： G03F9/00 , G03C5/00
CPC分类号： G03F7/70625 , G03F1/36 , G03F1/68 , G03F7/705 , G03F7/70516
摘要： Improved calibration of a resist model used in critical dimension (CD) calculation is disclosed. A dose function is obtained based on optical tool to be used form the resist on a wafer. The dose function indicates the amount of energy in a resist. The dose function is convolved with a convolution kernel to obtain a modified dose function. The convolution kernel has variable diffusion lengths in different directions. The convolution kernel may include multiple Gaussian kernels each having variable diffusion lengths in different directions. The modified dose function is converted into a CD value which is compared with a target value. If necessary, the diffusion lengths of the Gaussian kernels are adjusted based on the comparison result.
摘要翻译：公开了在关键尺寸（CD）计算中使用的抗蚀剂模型的改进的校准。基于晶片上的抗蚀剂使用的光学工具获得剂量函数。剂量函数表示抗蚀剂中的能量。剂量函数与卷积核卷积以获得修改的剂量函数。卷积核在不同方向具有可变扩散长度。卷积核可以包括在不同方向上具有可变扩散长度的多个高斯核。将修改的剂量函数转换为与目标值进行比较的CD值。如果需要，基于比较结果调整高斯核的扩散长度。

6. 发明授权

US06506818B1 Polyester resin compositions for film 失效
标题翻译：聚酯树脂组合物
公开(公告)号：US06506818B1
公开(公告)日：2003-01-14
申请号：US09716407
申请日：2000-11-21
申请人： Wooseok Choi , Sangbong Park
发明人： Wooseok Choi , Sangbong Park
IPC分类号： C08K334
CPC分类号： C08J5/18 , C08J2367/02 , C08K3/34 , C08L67/02
摘要： The polyester composition for films includes, based on 100 parts by weight of a polyester resin, 0.01 to 5 parts by weight of aluminum silicate particles containing aluminum and silica as principal components and an alkali metal. To provide polyester films suitable for magnetic recording media, the polymer composition contains surface- modified aluminum silicate particles and two additional particles distinct in particle diameter. The polyester films thus obtained have excellent abrasion resistance and scratch resistance.
摘要翻译：用于膜的聚酯组合物包含基于100重量份的聚酯树脂，0.01至5重量份的含有铝和二氧化硅作为主要成分的铝硅酸盐颗粒和碱金属。为了提供适用于磁记录介质的聚酯薄膜，聚合物组合物含有表面改性的硅酸铝颗粒和两个粒径不同的另外的颗粒。由此获得的聚酯膜具有优异的耐磨性和耐擦伤性。

7. 发明授权

US08632930B2 Method and apparatus for performing dark field double dipole lithography (DDL) 有权
标题翻译：用于进行暗场双偶极子光刻（DDL）的方法和装置
公开(公告)号：US08632930B2
公开(公告)日：2014-01-21
申请号：US13155259
申请日：2011-06-07
申请人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
发明人： Duan-Fu Stephen Hsu , Sangbong Park , Douglas Van Den Broeke , Jang Fung Chen
IPC分类号： G03F1/36
CPC分类号： G03F1/36 , G03F1/70 , G03F7/70125 , G03F7/70466
摘要： A method of generating complementary masks for use in a dark field double dipole imaging process. The method includes the steps of identifying a target pattern having a plurality of features, including horizontal and vertical features; generating a horizontal mask based on the target pattern, where the horizontal mask includes low contrast vertical features. The generation of the horizontal mask includes the steps of optimizing the bias of the low contrast vertical features contained in the horizontal mask; and applying assist features to the horizontal mask. The method further includes generating a vertical mask based on the target pattern, where the vertical mask contains low contrast horizontal features. The generation of the vertical mask includes the steps of optimizing the bias of low contrast horizontal features contained in the vertical mask; and applying assist features to the vertical mask.
摘要翻译：一种产生用于暗场双偶极成像过程的互补掩模的方法。该方法包括以下步骤：识别具有多个特征的目标图案，包括水平和垂直特征; 基于目标图案生成水平掩模，其中水平掩模包括低对比度垂直特征。水平掩模的生成包括优化包含在水平掩模中的低对比度垂直特征的偏压的步骤; 并将辅助特征应用于水平掩模。该方法还包括基于目标图案生成垂直掩模，其中垂直掩模包含低对比度水平特征。垂直掩模的产生包括优化垂直掩模中包含的低对比度水平特征的偏差的步骤; 并将辅助特征应用于垂直掩模。

8. 发明授权

US07818151B2 Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool 有权
标题翻译：用于获得光刻模拟工具的短程火炬模型参数的方法，程序产品和设备
公开(公告)号：US07818151B2
公开(公告)日：2010-10-19
申请号：US11415423
申请日：2006-05-02
申请人： Tamer Coskun , Sangbong Park , Jang Fung Chen , Bernd Geh
发明人： Tamer Coskun , Sangbong Park , Jang Fung Chen , Bernd Geh
IPC分类号： G06F17/50
CPC分类号： G03F7/70941 , G03F7/705
摘要： A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
摘要翻译：公开了一种获得表示短距离火炬的短距离火炬模型参数的过程，其降低了由光刻工具产生的图像的对比度。从图像中测量短程光晕，以获得测量的短距离闪光数据。基于短距离火炬模型参数进行模拟，以获得模拟的短距离火炬数据。将模拟的短程火炬数据与测量的短距离火炬数据进行比较。根据比较结果确定模拟中使用的短程火炬模型参数是否合适。如果用于模拟的短距离火炬模型参数不合适，则根据测得的短距离数据和模拟的短距离火炬数据优化短距离火炬模型参数。

9. 发明授权

US08937601B2 Method and apparatus of recognizing gesture with untouched way 有权
标题翻译：以不变的方式识别手势的方法和装置
公开(公告)号：US08937601B2
公开(公告)日：2015-01-20
申请号：US13226877
申请日：2011-09-07
申请人： Hoh Peter In , Jungyeon Kim , Do-Hoon Kim , Sangbong Park
发明人： Hoh Peter In , Jungyeon Kim , Do-Hoon Kim , Sangbong Park
IPC分类号： G06F3/041 , G06F3/0488 , G06F3/01
CPC分类号： G06F3/04883 , G06F3/017 , G06F3/041 , G06F2203/04108
摘要： Provided is a method of recognizing a gesture, which includes: storing sensing information of a sensor in a case where the sensing information is obtained by sensing an object within a preset distance from the sensor; and recognizing a gesture from the stored sensing information, wherein said storing of sensing information stores the sensing information obtained by the sensor during a preset time after the sensor senses an object within the preset distance. This method allows a terminal and contents to be controlled by recognizing a gesture of a user even though the user does not touch the terminal screen.
摘要翻译：提供了一种识别手势的方法，其包括：在通过感测距离传感器的预设距离内的对象获得感测信息的情况下，存储传感器的感测信息; 以及从存储的感测信息识别手势，其中所述感测信息的存储在传感器在预设距离内感测到对象之前的预设时间期间存储由传感器获得的感测信息。该方法允许通过识别用户的手势来控制终端和内容，即使用户不接触终端屏幕。

10. 发明申请

US20110307631A1 SYSTEM AND METHOD FOR PROVIDING ASYNCHRONOUS DATA COMMUNICATION IN A NETWORKED ENVIRONMENT 审中-公开
标题翻译：在网络环境中提供异步数据通信的系统和方法
公开(公告)号：US20110307631A1
公开(公告)日：2011-12-15
申请号：US13155717
申请日：2011-06-08
申请人： Sangbong Park , Cheng Zhang , Hyun Jin Cho , Lindsay John Lawrence
发明人： Sangbong Park , Cheng Zhang , Hyun Jin Cho , Lindsay John Lawrence
IPC分类号： G06F15/16
CPC分类号： G06Q30/0201 , G06Q10/101 , G06Q30/0241 , G06Q50/01
摘要： A method and system for providing asynchronous data communication between a plurality of devices in a networked environment is disclosed. A user using a first device views view media content received from a first content provider of a plurality of service providers. At a request of the user, a message including a data link to the media content is generated and asynchronously sent to a second device via a network. The data link contained in the received message on the second device is used to retrieve the media content from a second content provider. Various action commands contained in the message are used to control the operation of the media content on the second device.
摘要翻译：公开了一种用于在网络环境中的多个设备之间提供异步数据通信的方法和系统。使用第一设备的用户观看从多个服务提供商的第一内容提供商接收的媒体内容。在用户的请求下，生成包括到媒体内容的数据链接的消息，并通过网络异步地发送到第二设备。包含在第二设备上的接收到的消息中的数据链接用于从第二内容提供商检索媒体内容。包含在消息中的各种动作命令用于控制第二设备上的媒体内容的操作。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式