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    • 4. 发明授权
    • Semiconductor device with recess and fin structure
    • 具有凹槽和鳍结构的半导体器件
    • US08110871B2
    • 2012-02-07
    • US12323391
    • 2008-11-25
    • Sang Don LeeSung Woong Chung
    • Sang Don LeeSung Woong Chung
    • H01L29/78
    • H01L29/66795H01L21/823437H01L29/4236H01L29/66621H01L29/7851
    • The semiconductor device includes an active region, a recess, a Fin channel region, a gate insulating film, and a gate electrode. The active region is defined by a device isolation structure formed in a semiconductor substrate. The recess is formed by etching the active region and its neighboring device isolation structure using an island shaped recess gate mask as an etching mask. The Fin channel region is formed on the semiconductor substrate at a lower part of the recess. The gate insulating film is formed over the active region including the Fin channel region and the recess. The gate electrode is formed over the gate insulating film to fill up the Fin channel region and the recess.
    • 半导体器件包括有源区,凹槽,Fin沟道区,栅极绝缘膜和栅电极。 有源区由半导体衬底中形成的器件隔离结构限定。 通过使用岛状凹陷栅极掩模作为蚀刻掩模来蚀刻有源区及其邻近的器件隔离结构来形成凹部。 鳍状沟道区在凹部的下部形成在半导体衬底上。 栅极绝缘膜形成在包括鳍状沟道区域和凹部的有源区域上。 栅电极形成在栅极绝缘膜上,以填充鳍沟道区域和凹槽。
    • 5. 发明授权
    • Method for forming semiconductor device
    • US07785969B2
    • 2010-08-31
    • US12755222
    • 2010-04-06
    • Sang Don Lee
    • Sang Don Lee
    • H01L21/336
    • H01L29/7851H01L29/66795H01L29/66818
    • A method for forming a semiconductor device of the present invention solves problems in a process for forming a fin type gate including a recess region, such as, a complicated process, low production margin, and difficulty in forming an accurate fin shape. In a process for forming an isolation dielectric film defining an active region, a nitride film pattern is formed in such a manner that the size of the nitride film is adjusted according to line width of a fin portion in a fin type active region formed in a subsequent process step, and an isolation dielectric film is formed in every region except for the nitride film pattern of a semiconductor substrate. Then, a recess is etched, and the isolation dielectric film is removed from a region where the line width of the nitride film pattern was reduced to a certain degree. Consequently, a process margin for forming a fin type active region is increased, and the shape of a fin shaped portion can be adjusted accurately, which together contribute to improved electrical properties in the semiconductor devices.
    • 6. 发明申请
    • METHOD FOR FORMING SEMICONDUCTOR DEVICE
    • 形成半导体器件的方法
    • US20100190305A1
    • 2010-07-29
    • US12755222
    • 2010-04-06
    • Sang Don Lee
    • Sang Don Lee
    • H01L21/8242H01L21/28
    • H01L29/7851H01L29/66795H01L29/66818
    • A method for forming a semiconductor device of the present invention solves problems in a process for forming a fin type gate including a recess region, such as, a complicated process, low production margin, and difficulty in forming an accurate fin shape. In a process for forming an isolation dielectric film defining an active region, a nitride film pattern is formed in such a manner that the size of the nitride film is adjusted according to line width of a fin portion in a fin type active region formed in a subsequent process step, and an isolation dielectric film is formed in every region except for the nitride film pattern of a semiconductor substrate. Then, a recess is etched, and the isolation dielectric film is removed from a region where the line width of the nitride film pattern was reduced to a certain degree. Consequently, a process margin for forming a fin type active region is increased, and the shape of a fin shaped portion can be adjusted accurately, which together contribute to improved electrical properties in the semiconductor devices.
    • 本发明的半导体装置的形成方法解决了形成包括凹陷区域的翅片型浇口的工艺,复杂的工艺,低的生产裕度以及难以形成精确的翅片形状的问题。 在形成限定有源区的隔离电介质膜的工艺中,以如下方式形成氮化膜图案:使氮化膜的尺寸根据在 随后的工艺步骤,并且除了半导体衬底的氮化物膜图案之外的每个区域中形成隔离电介质膜。 然后,蚀刻凹部,从氮化膜图案的线宽减小到一定程度的区域去除隔离电介质膜。 因此,用于形成翅片型有源区的工艺余量增加,并且可以精确地调节翅片形状部分的形状,这一起有助于改善半导体器件中的电性能。