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1. 发明专利

TWI230684B 硫酸回收再處理裝置 RETREATING DEVICE FOR RECOVERED SULFATE 失效
简体标题：硫酸回收再处理设备 RETREATING DEVICE FOR RECOVERED SULFATE
公开(公告)号：TWI230684B
公开(公告)日：2005-04-11
申请号：TW090107324
申请日：2001-03-28
申请人：山得可系統股份有限公司 SUNTEC SYSTEM CO., LTD.
发明人：安田興光 OKIMITSU YASUDA , 藤井誠一 SEIICHI FUJII
IPC分类号： C01B , C02F , H01L
CPC分类号： H01L21/67057 , B08B3/00 , C01B17/88 , Y10S134/902
摘要：本發明提供一種將晶圓洗淨後濃度已降低的硫酸，濃縮至可再利用的濃度為止的硫酸回收再處理裝置。詳言之，
在將由硫酸及過氧化氫水混合而成的晶圓洗淨液Ｃ中之硫酸進行回收再處理的硫酸回收再處理裝置1中，設置至少具有導入口12及排出口13等2個開口部，將從導入口12所導入的晶圓洗淨處理後之晶圓洗淨廢液Ａ中之硫酸進行濃縮作成濃縮硫酸Ｂ後，將濃縮硫酸Ｂ從排出口排出的反應槽10、和將濃縮硫酸Ｂ送往晶圓處理槽100的供給裝置70。
简体摘要：本发明提供一种将晶圆洗净后浓度已降低的硫酸，浓缩至可再利用的浓度为止的硫酸回收再处理设备。详言之，在将由硫酸及过氧化氢水混合而成的晶圆洗净液Ｃ中之硫酸进行回收再处理的硫酸回收再处理设备1中，设置至少具有导入口12及排出口13等2个开口部，将从导入口12所导入的晶圆洗净处理后之晶圆洗净废液Ａ中之硫酸进行浓缩作成浓缩硫酸Ｂ后，将浓缩硫酸Ｂ从排出口排出的反应槽10、和将浓缩硫酸Ｂ送往晶圆处理槽100的供给设备70。

2. 发明专利

HK1047270A1 Sulfuric acid rycycle apparatus. 未知
公开(公告)号：HK1047270A1
公开(公告)日：2003-02-14
申请号：HK02109012
申请日：2002-12-12
申请人： SUNTEC SYSTEM CO LTD
发明人： YASUDA OKIMITSU , FUJII SEIICHI
IPC分类号： C01B20060101 , C01B17/88 , C02F20060101 , C02F1/02 , H01L20060101 , H01L21/02 , C01B , C02F , H01L

3. 发明专利

DE69619942T2 未知
公开(公告)号：DE69619942T2
公开(公告)日：2002-12-19
申请号：DE69619942
申请日：1996-12-06
申请人： SUNTEC SYSTEM CO LTD , NAGANO HIROSHI
发明人： FUJII SEIICHI , NAGANO HIROSHI
IPC分类号： B01D45/16 , B01D45/12
摘要： An exhaust gas processing system (10) is provided with a particle separating apparatus (20) capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes (42, 43) forming the exhaust gas discharge line (41). The particle separating apparatus (20) comprises a gas vessel (21) defining a gas chamber (22) for receiving the exhaust gas containing particles and discharged through a rear end portion (42a) of the front exhaust pipe (42), and an exhaust gas guide member (31) disposed in the gas chamber (22) and having guide walls (32, 33) defining an internal space and provided with openings (34) by means of which the internal space communicates with the gas chamber (22). The guide walls (32, 33) are formed so as to guide the exhaust gas discharged into the gas chamber (22) through the rear end portion (42a) of the front exhaust pipe (42) so that the exhaust gas flows in vertical, whirling currents in the gas chamber (22). A particle receiving unit (28a) of a particle container (28) is connected to a particle discharge unit (26) of the particle separating apparatus (20). The gas contained in the particle container (28) is replaced with an inert gas by a gas replacing apparatus (60) before separating the particle container (28) from the particle separating apparatus (20).

4. 发明专利

SG42448A1 Exhaust gas processing system 未知
公开(公告)号：SG42448A1
公开(公告)日：1997-08-15
申请号：SG1996011576
申请日：1996-12-07
申请人： SUNTEC SYSTEM CO LTD , NAGANO HIROSHI
发明人： SEIICHI FUJII , NAGANO HIROSHI
IPC分类号： B01D45/16 , B01D46/00
摘要： An exhaust gas processing system (10) is provided with a particle separating apparatus (20) capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes (42, 43) forming the exhaust gas discharge line (41). The particle separating apparatus (20) comprises a gas vessel (21) defining a gas chamber (22) for receiving the exhaust gas containing particles and discharged through a rear end portion (42a) of the front exhaust pipe (42), and an exhaust gas guide member (31) disposed in the gas chamber (22) and having guide walls (32, 33) defining an internal space and provided with openings (34) by means of which the internal space communicates with the gas chamber (22). The guide walls (32, 33) are formed so as to guide the exhaust gas discharged into the gas chamber (22) through the rear end portion (42a) of the front exhaust pipe (42) so that the exhaust gas flows in vertical, whirling currents in the gas chamber (22). A particle receiving unit (28a) of a particle container (28) is connected to a particle discharge unit (26) of the particle separating apparatus (20). The gas contained in the particle container (28) is replaced with an inert gas by a gas replacing apparatus (60) before separating the particle container (28) from the particle separating apparatus (20).

5. 发明专利

CA2192865A1 EXHAUST GAS PROCESSING SYSTEM 未知
公开(公告)号：CA2192865A1
公开(公告)日：1997-06-15
申请号：CA2192865
申请日：1996-12-13
申请人： SUNTEC SYSTEM CO LTD , NAGANO HIROSHI
发明人： FUJII SEIICHI , NAGANO HIROSHI
IPC分类号： B01D45/16 , B01D45/12
摘要： An exhaust gas processing system is provided with a particle separating apparatus capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes forming the exhaust gas discharge line. The particle separating apparatus comprises a gas vessel defining a gas chamber for receiving the exhaust gas containing particles and discharged through a rear end portion of the front exhaust pipe, and an exhaust gas guide member disposed in the gas chamber and having guide walls defining an internal space and provided with openings by means of which the internal space communicates with the gas chamber. The guide walls are formed so as to guide the exhaust gas discharged into the gas chamber through the rear end portion of the front exhaust pipe so that the exhaust gas flows in vertical, whirling currents in the gas chamber. A particle receiving unit of a particle container is connected to a particle discharge unit of the particle separating apparatus. The gas contained in the particle container is replaced with an inert gas by a gas replacing apparatus before separating the particle container from the particle separating apparatus.

6. 发明专利

SG119142A1 Sulfuric acid recycle apparatus 未知
公开(公告)号：SG119142A1
公开(公告)日：2006-02-28
申请号：SG200107198
申请日：2001-11-20
申请人： SUNTEC SYSTEM CO LTD
发明人： OKIMITSU YASUDA , SEIICHI FUJII
IPC分类号： C01B20060101 , C01B17/88 , C02F20060101 , C02F1/02 , H01L20060101 , H01L21/02

7. 发明专利

DE69619942D1 未知
公开(公告)号：DE69619942D1
公开(公告)日：2002-04-25
申请号：DE69619942
申请日：1996-12-06
申请人： SUNTEC SYSTEM CO LTD , NAGANO HIROSHI
发明人： FUJII SEIICHI , NAGANO HIROSHI
IPC分类号： B01D45/16 , B01D45/12
摘要： An exhaust gas processing system (10) is provided with a particle separating apparatus (20) capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes (42, 43) forming the exhaust gas discharge line (41). The particle separating apparatus (20) comprises a gas vessel (21) defining a gas chamber (22) for receiving the exhaust gas containing particles and discharged through a rear end portion (42a) of the front exhaust pipe (42), and an exhaust gas guide member (31) disposed in the gas chamber (22) and having guide walls (32, 33) defining an internal space and provided with openings (34) by means of which the internal space communicates with the gas chamber (22). The guide walls (32, 33) are formed so as to guide the exhaust gas discharged into the gas chamber (22) through the rear end portion (42a) of the front exhaust pipe (42) so that the exhaust gas flows in vertical, whirling currents in the gas chamber (22). A particle receiving unit (28a) of a particle container (28) is connected to a particle discharge unit (26) of the particle separating apparatus (20). The gas contained in the particle container (28) is replaced with an inert gas by a gas replacing apparatus (60) before separating the particle container (28) from the particle separating apparatus (20).

8. 发明授权

EP0779092B1 Exhaust gas processing system 失效
标题翻译：废气处理系统
公开(公告)号：EP0779092B1
公开(公告)日：2002-03-20
申请号：EP96119641.7
申请日：1996-12-06
申请人： Suntec System Co., Ltd. , Nagano, Hiroshi
发明人： Fujii, Seiichi , Nagano, Hiroshi
IPC分类号： B01D45/16 , B01D45/12
CPC分类号： B01D45/16

9. 发明公开

EP0779092A2 Exhaust gas processing system 失效
标题翻译： BehandlungssystemfürAbgas
公开(公告)号：EP0779092A2
公开(公告)日：1997-06-18
申请号：EP96119641.7
申请日：1996-12-06
申请人： Suntec System Co., Ltd. , Nagano, Hiroshi
发明人： Fujii, Seiichi , Nagano, Hiroshi
IPC分类号： B01D45/16
CPC分类号： B01D45/16
摘要： An exhaust gas processing system (10) is provided with a particle separating apparatus (20) capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes (42, 43) forming the exhaust gas discharge line (41). The particle separating apparatus (20) comprises a gas vessel (21) defining a gas chamber (22) for receiving the exhaust gas containing particles and discharged through a rear end portion (42a) of the front exhaust pipe (42), and an exhaust gas guide member (31) disposed in the gas chamber (22) and having guide walls (32, 33) defining an internal space and provided with openings (34) by means of which the internal space communicates with the gas chamber (22). The guide walls (32, 33) are formed so as to guide the exhaust gas discharged into the gas chamber (22) through the rear end portion (42a) of the front exhaust pipe (42) so that the exhaust gas flows in vertical, whirling currents in the gas chamber (22). A particle receiving unit (28a) of a particle container (28) is connected to a particle discharge unit (26) of the particle separating apparatus (20). The gas contained in the particle container (28) is replaced with an inert gas by a gas replacing apparatus (60) before separating the particle container (28) from the particle separating apparatus (20).
摘要翻译：废气处理系统（10）具有能够从废气中分离除去包含在废气中的颗粒的颗粒分离装置（20），并且配置在前后排气管（42,43）之间，形成排气排出管路（41）。颗粒分离装置（20）包括气体容器（21），其限定用于接收含有废气的颗粒并通过前排气管（42）的后端部分（42a）排出的气体室（22）气体引导构件（31），其设置在气体室（22）中并具有限定内部空间并具有开口（34）的引导壁（32,33），内部空间与气体室（22）连通。引导壁（32,33）形成为引导排气通过前排气管（42）的后端部（42a）排出到气室（22）中，使得排气垂直流动，气室（22）中的旋转电流。颗粒容器（28）的颗粒接收单元（28a）连接到颗粒分离装置（20）的颗粒排放单元（26）。在将颗粒容器（28）从颗粒分离装置（20）分离之前，通过气体置换装置（60）将包含在颗粒容器（28）中的气体置换成惰性气体。

10. 发明公开

EP0779092A3 Exhaust gas processing system 失效
标题翻译：废气处理系统
公开(公告)号：EP0779092A3
公开(公告)日：1998-07-01
申请号：EP96119641
申请日：1996-12-06
申请人： SUNTEC SYSTEM CO LTD , NAGANO HIROSHI
发明人： FUJII SEIICHI , NAGANO HIROSHI
IPC分类号： B01D45/16
CPC分类号： B01D45/16
摘要： An exhaust gas processing system (10) is provided with a particle separating apparatus (20) capable of separating and removing particles contained in an exhaust gas from the exhaust gas, and disposed between a front and a back exhaust pipes (42, 43) forming the exhaust gas discharge line (41). The particle separating apparatus (20) comprises a gas vessel (21) defining a gas chamber (22) for receiving the exhaust gas containing particles and discharged through a rear end portion (42a) of the front exhaust pipe (42), and an exhaust gas guide member (31) disposed in the gas chamber (22) and having guide walls (32, 33) defining an internal space and provided with openings (34) by means of which the internal space communicates with the gas chamber (22). The guide walls (32, 33) are formed so as to guide the exhaust gas discharged into the gas chamber (22) through the rear end portion (42a) of the front exhaust pipe (42) so that the exhaust gas flows in vertical, whirling currents in the gas chamber (22). A particle receiving unit (28a) of a particle container (28) is connected to a particle discharge unit (26) of the particle separating apparatus (20). The gas contained in the particle container (28) is replaced with an inert gas by a gas replacing apparatus (60) before separating the particle container (28) from the particle separating apparatus (20).

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