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1. 发明申请

US20170159168A1 Thin Film Deposition Apparatus Having Plurality of Evaporation Sources 审中-公开
公开(公告)号：US20170159168A1
公开(公告)日：2017-06-08
申请号：US15324119
申请日：2014-07-10
申请人： SUNIC SYSTEM LTD.
发明人： Myoung Soo Kim , Jeong Taek Kim , Jong Jin Kim , Young Jong Lee
IPC分类号： C23C14/24 , C23C14/54
CPC分类号： C23C14/243 , C23C14/12 , C23C14/542 , C23C16/45563
摘要： The present invention relates to a thin film deposition apparatus, which includes: a deposition chamber supporting a substrate therein; a plurality of crucibles keeping a deposition material to be deposited on the substrate; a distribution conduits coupled to the crucibles, respectively, and arranged in a line to spray an evaporated deposition material through a plurality of nozzles; a separator disposed between the distribution conduits for uniformity of a thin film deposited on the substrate and limiting a spray range of the evaporated deposition material; distribution conduit heaters independently installed and facing outer sides of the distribution conduits to heat the distribution conduits; crucible heaters heating the crucibles to evaporate the deposition material; and a top plate having an exit port corresponding to the nozzles and disposed over the distribution conduits.

2. 发明公开

US20240087519A1 OLEDOS PIXEL COMPENSATION CIRCUIT FOR REMOVING SUBSTRATE EFFECT, AND METHOD FOR CONTROLLING SAME 审中-公开
公开(公告)号：US20240087519A1
公开(公告)日：2024-03-14
申请号：US18263047
申请日：2022-01-11
申请人： SUNIC SYSTEM. LTD. , ARTETECHNOLOGY
发明人： Hye Dong KIM , Jong Jin KIM , Seong Ik JEONG
IPC分类号： G09G3/3233 , G09G3/3266 , G09G3/3291
CPC分类号： G09G3/3233 , G09G3/3266 , G09G3/3291 , G09G2310/08 , G09G2320/0233
摘要： The present invention relates to an OLED pixel compensation circuit for removing a substrate effect. The pixel compensation circuit according to the present invention uses six transistors and two storage batteries to fix both a source voltage and a body voltage of a driving transistor that drives an OLED, thereby having the effects of eliminating errors due to a substrate effect and presenting more accurate pixel compensation results.

3. 发明专利

JP2001267789A METHOD AND DEVICE FOR COATING ELECTROMAGNETIC WAVE SHIELDING FILM 失效
公开(公告)号：JP2001267789A
公开(公告)日：2001-09-28
申请号：JP2000343003
申请日：2000-11-10
申请人： SUNIC SYSTEM LTD
发明人： KIN DOKON , RI IUNGUCHOKU , KIN TOGEN , RI GENSHO , RI ENSHO
IPC分类号： C23C14/02 , C23C14/18 , C23C14/34 , C23C14/35 , C23C14/50 , H05K9/00
摘要： PROBLEM TO BE SOLVED: To provide a coating device for an electromagnetic wave shielding film wherein an adhesion between an object to be coated and the electromagnetic wave shielding film is improved for even coating with no variation, regenerative characteristics in mass production is well, hazard in operation is eliminated, and pollution-free operation is provided by a dry process. SOLUTION: A plurality of objects to be coated are installed at a rotating cylindrical rotary jig. Under this condition, the objects are coated with the electromagnetic wave shielding film by sputtering.

4. 发明申请

WO2009134041A3 EVAPORATOR AND VACUUM DEPOSITION APPARATUS HAVING THE SAME 审中-公开
标题翻译：蒸发器和真空沉积装置
公开(公告)号：WO2009134041A3
公开(公告)日：2010-02-04
申请号：PCT/KR2009002185
申请日：2009-04-27
申请人： SUNIC SYSTEM LTD , KIM JONG WOON , LEE JAE SEUNG , CHA DONG IL , KIM SUN HYUK , HWANG IN HO
发明人： KIM JONG WOON , LEE JAE SEUNG , CHA DONG IL , KIM SUN HYUK , HWANG IN HO
IPC分类号： C23C14/24
CPC分类号： C23C14/243
摘要： Provided are an evaporator for fabricating an organic light emitting device, and a vacuum deposition apparatus including the evaporator. The evaporator includes a pot storing organic matter, a pot cover covering an opening of the pot, and evaporation outlets spaced apart from each other to evaporate the organic matter. The evaporator further includes a shield plate disposed over the pot cover and preventing heat radiation, and a heating member preventing the clogging of the evaporation outlets between the pot cover and the shield plate. The evaporation outlets, evaporating organic matter, are different from each other in length to improve the uniformity of a deposited thin film and prevent the loss of the organic matter. The shield plate, preventing heat radiation to a substrate, protects the substrate or a thin film on the substrate from thermal damage.
摘要翻译：提供了一种用于制造有机发光器件的蒸发器和包括蒸发器的真空沉积设备。蒸发器包括储存有机物的罐，覆盖锅的开口的锅盖和彼此间隔开的蒸发出口以蒸发有机物质。蒸发器还包括设置在锅盖上并防止热辐射的屏蔽板，以及防止罐盖和屏蔽板之间的蒸发出口堵塞的加热构件。蒸发出口，蒸发有机物质的长度彼此不同，以提高沉积薄膜的均匀性并防止有机物质的损失。屏蔽板防止对衬底的热辐射，保护衬底或衬底上的薄膜免受热损伤。

5. 发明授权

US09797038B2 Organic material deposition apparatus, and organic material deposition method using same 有权
公开(公告)号：US09797038B2
公开(公告)日：2017-10-24
申请号：US14420349
申请日：2013-03-26
申请人： SUNIC SYSTEM, LTD.
发明人： Chang Sik Choi , Young Im , Young Jong Lee , Seong Ho Kim , Sun Hyuk Kim , Jung Gyun Lee , In Ho Hwang
IPC分类号： C23C14/12 , C23C14/24 , C23C14/50 , H01L51/56 , C23C14/56 , H01L51/00
CPC分类号： C23C14/12 , C23C14/24 , C23C14/50 , C23C14/56 , H01L51/0002 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An apparatus for depositing an organic material includes: a main chamber; a first substrate loading section in which a first substrate is loaded in the first radial direction and seated; a second substrate loading section in which a second substrate is loaded in the second radial direction and seated; a scanner including a linear organic material deposition source, a source moving means to which the organic material deposition source is coupled to linearly move the organic material deposition source so that the organic material particles are injected onto the surface of the first substrate or the second substrate, and a rotating means for rotating the source moving means; and a scanner moving means for moving the scanner back and forth so that the scanner is positioned in the first deposition region or the second deposition region.

6. 发明申请

US20150203957A1 ORGANIC MATERIAL DEPOSITION APPARATUS, AND ORGANIC MATERIAL DEPOSITION METHOD USING SAME 有权
标题翻译：有机材料沉积装置及其有机材料沉积方法
公开(公告)号：US20150203957A1
公开(公告)日：2015-07-23
申请号：US14420349
申请日：2013-03-26
申请人： SUNIC SYSTEM, LTD.
发明人： Chang Sik Choi , Young Im , Young Jong Lee , Seong Ho Kim , Sun Hyuk Kim , Jung Gyun Lee , In Ho Hwang
IPC分类号： C23C14/12 , C23C14/50 , C23C14/24 , H01L51/56 , H01L51/00
CPC分类号： C23C14/12 , C23C14/24 , C23C14/50 , C23C14/56 , H01L51/0002 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An apparatus for depositing an organic material includes: a main chamber; a first substrate loading section in which a first substrate is loaded in the first radial direction and seated; a second substrate loading section in which a second substrate is loaded in the second radial direction and seated; a scanner including a linear organic material deposition source, a source moving means to which the organic material deposition source is coupled to linearly move the organic material deposition source so that the organic material particles are injected onto the surface of the first substrate or the second substrate, and a rotating means for rotating the source moving means; and a scanner moving means for moving the scanner back and forth so that the scanner is positioned in the first deposition region or the second deposition region.
摘要翻译：一种用于沉积有机材料的设备包括：主室; 第一基板装载部，其中第一基板沿第一径向方向被装载并就座; 第二基板装载部，其中第二基板沿第二径向方向被装载并就座; 扫描器，其包括线性有机材料沉积源，源移动装置，有机材料沉积源与所述源移动装置连接以线性移动有机材料沉积源，使得有机材料颗粒注入到第一基板或第二基板的表面上以及用于旋转所述源移动装置的旋转装置; 以及扫描器移动装置，用于前后移动扫描仪，使得扫描仪位于第一沉积区域或第二沉积区域中。

7. 发明公开

US20240258143A1 SUBSTRATE SUPPORT APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE USING THE SAME 审中-公开
公开(公告)号：US20240258143A1
公开(公告)日：2024-08-01
申请号：US18422520
申请日：2024-01-25
申请人： LG Display Co., Ltd. , SUNIC SYSTEM. LTD.
发明人： Dongwook KIM , Jewook KIM , Indeock HONG , Chansuk PARK , JaeKwang RYU
IPC分类号： H01L21/673 , H01L21/68 , H10K59/12 , H10K71/16
CPC分类号： H01L21/6734 , H01L21/68 , H10K71/166 , H10K59/1201
摘要： A substrate support apparatus reduces sagging of a substrate. The substrate support apparatus includes a plurality of position adjusters arranged in parallel and spaced apart with respect to a first direction; and a plurality of supports connected to the plurality of position adjusters and configured to support a substrate, wherein the plurality of supports are spaced apart from each other under the substrate and are configured to support the substrate, and wherein the plurality of supports are configured to be raised by the plurality of position adjusters.

8. 发明授权

US12039933B2 OLEDoS pixel compensation circuit for removing substrate effect, and method for controlling same 有权
公开(公告)号：US12039933B2
公开(公告)日：2024-07-16
申请号：US18263047
申请日：2022-01-11
申请人： SUNIC SYSTEM. LTD. , ARTETECHNOLOGY
发明人： Hye Dong Kim , Jong Jin Kim , Seong Ik Jeong
IPC分类号： G09G3/3233 , G09G3/3266 , G09G3/3291
CPC分类号： G09G3/3233 , G09G3/3266 , G09G3/3291 , G09G2310/08 , G09G2320/0233
摘要： The present invention relates to an OLED pixel compensation circuit for removing a substrate effect. The pixel compensation circuit according to the present invention uses six transistors and two storage batteries to fix both a source voltage and a body voltage of a driving transistor that drives an OLED, thereby having the effects of eliminating errors due to a substrate effect and presenting more accurate pixel compensation results.

9. 发明申请

US20170159167A1 Thin Film Deposition Apparatus Having Plurality of Crucibles 审中-公开
公开(公告)号：US20170159167A1
公开(公告)日：2017-06-08
申请号：US15324110
申请日：2014-07-10
申请人： SUNIC SYSTEM LTD.
发明人： Young Man Oh , Jae Soo Choi , Soon Chul Lee , Su Bin Kim , Myoung Soo Kim , Young Jong Lee , Ki Min Song , Young Shin Park , Tae Won Seo , Young Jin Bae , Jeong Taek Kim , Jung Gyun Lee
IPC分类号： C23C14/24 , C23C14/54
CPC分类号： C23C14/243 , C23C14/12 , C23C14/26 , C23C14/542 , C23C16/45563
摘要： The present invention relates to a thin film deposition apparatus, which includes: a deposition chamber supporting a substrate therein; a plurality of crucibles keeping a deposition material to be deposited on the substrate; a distribution conduit having a plurality of coupling holes axially arranged to communicate with the crucibles, and spraying the deposition material evaporated from the crucibles through a plurality of nozzles formed through a top thereof; distribution conduit heaters independently installed and facing an outer side of the distribution conduit to heat the distribution conduit; crucible heaters heating the crucibles to evaporate the deposition material; and a top plate having an exit port corresponding to the nozzles and disposed over the distribution conduit. Accordingly, it is possible to reduce the height of the chamber by decreasing the height of the crucibles and to perform symmetric or asymmetric deposition by independently performing left/right deposition on a substrate.

10. 发明专利

TWI408242B 蒸發器以及具有該蒸發器的真空沉積裝置有权
简体标题：蒸发器以及具有该蒸发器的真空沉积设备
公开(公告)号：TWI408242B
公开(公告)日：2013-09-11
申请号：TW098114038
申请日：2009-04-28
申请人：銑益系統股份有限公司 , SUNIC SYSTEM. LTD.
发明人：金鐘云 , KIM, JONG-WOON , 李宰承 , LEE, JAE-SEUNG , 車東壹 , CHA, DONG-IL , 金宣赫 , KIM, SUN-HYUK , 黃仁鎬 , HWANG, IN-HO
IPC分类号： C23C14/24
CPC分类号： C23C14/243

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