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    • 3. 发明申请
    • EXPOSURE APPARATUS AND METHOD USING ACTIVE TILING
    • 曝光装置和使用活性倾斜的方法
    • WO0248797A3
    • 2002-11-14
    • PCT/GB0105438
    • 2001-12-11
    • QINETIQ LTDMILLER RICHARD JONATHANSMITH MARK ANTHONY GLEESON
    • MILLER RICHARD JONATHANSMITH MARK ANTHONY GLEESON
    • G03F7/207G03F7/20
    • G03F7/2057
    • A photosensitive area (11), such as a photolithographic sheet, in an image plane is notionally subdivided in both dimensions to form contiguous (tiled) sub-areas. Variable illumination means (1, 4) provides a selected pixellated light pattern, which is directed (8, 9, 10) to fill a selected one of the sub-areas so that pixels of said pattern are at least 15 microns across at the sub-area, and control means are responsive to an input signal representative of an image conjointly to control the production and direction of the pixellated patters so that an entire image is produced over all of the said sub-areas. As shown, the variable illumination means comprises a light source (2) with digital micro-mirror array deflector (4), and the sub-area is selected by lens array (8) with a shutter (10) and polariser array (11). The latter may be replaced by a two axis steering mirror and lens array. An analogue micro-mirror array, optionally with a kaleidoscope, may be used in the illumination means, with (a) collimating optics and lens array; or (b) a focussing macro-lens, for sub-area selection.
    • 图像平面中的光刻区域(11)如光刻纸在两个维度上都被细分,形成连续(平铺)子区域。 可变照明装置(1,4)提供选择的像素化光图案,其被引导(8,9,10)以填充所选择的一个子区域,使得所述图案的像素在子像素处至少15微米 并且控制装置响应于代表图像的输入信号,以共同控制像素化图案的产生和方向,使得在所有所述子区域上产生整个图像。 如图所示,可变照明装置包括具有数字微镜阵列偏转器(4)的光源(2),并且子区域由具有快门(10)和偏振器阵列(11)的透镜阵列(8)选择, 。 后者可以由双轴转向镜和透镜阵列代替。 可以在照明装置中使用任选具有万花筒的模拟微镜阵列,其中(a)准直光学和透镜阵列; 或(b)聚焦微距透镜,用于子区域选择。