专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO0161400A9 TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS 审中-公开
标题翻译：二维微镜阵列增强
公开(公告)号：WO0161400A9
公开(公告)日：2002-10-10
申请号：PCT/US0105309
申请日：2001-02-16
申请人： XROS INC NORTEL NETWORKS , SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
发明人： SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/085 , G02B26/0841
摘要： A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
摘要翻译：提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。这些电极与旋转轴大致平行或偏移45度，形成象限。扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。

2. 发明申请

WO2005099410A3 SINGLE-POLE, DOUBLE-THROW MEMS SWITCH 审中-公开
标题翻译：单通道，双通道MEMS开关
公开(公告)号：WO2005099410A3
公开(公告)日：2007-08-23
申请号：PCT/US2005012244
申请日：2005-04-12
申请人： SIVERTA INC , PASHBY GARY JOSEPH , SLATER TIMOTHY G , GOTTLIEB GLENN
发明人： PASHBY GARY JOSEPH , SLATER TIMOTHY G , GOTTLIEB GLENN
IPC分类号： H01H51/22 , H01H57/00
CPC分类号： H01H59/0009
摘要： MEMS switches of varying configurations provide individu-ally acutatable contacts. The MEMS switches are sealed by an improved anodic bonding technique.
摘要翻译：不同配置的MEMS开关可提供单独的可触及触点。 MEMS开关由改进的阳极接合技术密封。

3. 发明申请

WO2004013898A3 SEALED INTEGRAL MEMS SWITCH 审中-公开
标题翻译：密封整体MEMS开关
公开(公告)号：WO2004013898A3
公开(公告)日：2004-06-10
申请号：PCT/US0324255
申请日：2003-08-04
申请人： PASHBY GARY JOSEPH , SIVERTA INC , SLATER TIMOTHY G
发明人： PASHBY GARY JOSEPH , SLATER TIMOTHY G
IPC分类号： H01H59/00 , H01P1/10 , H01P1/12
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
摘要翻译： MEMS开关包括具有跷跷板（52），一对扭杆（66a，66b）和框架（64）的微加工整体层（122）。框架（64）支撑用于围绕由扭杆（66a，66b）建立的轴线（68）旋转的跷跷板（52）。在跷跷板（52）的端部处的短路棒（58a，58b）连接在承载在层（122）的一个表面上的衬底（174）上的开关触点（56a1,56a2,56b1,5Bb2）对上。基底（104）也与衬底（174）相对的层（122）的表面接合。衬底（174）承载用于向跷跷板（52）施力的电极（54a，54b），以推动其围绕轴线（68）旋转。支撑在悬臂（166）的自由端的电接触岛（152）确保层（122）上的接地板（162a，162b）和衬底（174）上的电导体之间良好的电导通。

4. 发明申请

WO0161400A3 TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS 审中-公开
标题翻译：二维微镜阵列增强
公开(公告)号：WO0161400A3
公开(公告)日：2003-07-10
申请号：PCT/US0105309
申请日：2001-02-16
申请人： XROS INC NORTEL NETWORKS , SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
发明人： SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
IPC分类号： G02B26/08 , G02B26/02
CPC分类号： G02B26/085 , G02B26/0841
摘要： A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.
摘要翻译：提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。扭转传感器（244）沿旋转轴提供以控制象限偏转电极的偏转。屏蔽传感器结构（240）包括硅层（241），绝缘层（242）和金属层（243）。该结构还包括在硅层（241）中的传感器注入电阻器（244）和施加在传感器注入电阻器（244）上方以稳定传感器输出并消除光敏感的屏蔽件（245）。

5. 发明申请

WO0154176A9 WAFER BONDING TECHNIQUES TO MINIMIZE BUILT-IN STRESS OF SILICON MICROSTRUCTURES AND MICRO-MIRRORS 审中-公开
标题翻译：最小化硅微结构和微镜的内置应力的波形焊接技术
公开(公告)号：WO0154176A9
公开(公告)日：2003-01-16
申请号：PCT/US0101758
申请日：2001-01-18
申请人： XROS INC NORTEL NETWORKS , SLATER TIMOTHY G
发明人： SLATER TIMOTHY G
IPC分类号： H01L21/20 , H01L21/762
CPC分类号： H01L21/2007 , H01L21/76251
摘要： A bonded wafer fabrication mechanism for a micro-mirror structure provides for oxidizing a device wafer instead of a handle wafer or splitting thermal oxidation processing between the device wafer and the handle wafer prior to etching. The flatness of mirrors in micro-mirror structures fabricated according to such a mechanism is substantially improved.
摘要翻译：用于微镜结构的接合晶片制造机构提供了在蚀刻之前，在器件晶片和处理晶片之间氧化器件晶片而不是处理晶片或分裂热氧化处理。根据这种机制制造的微镜结构中的反射镜的平面度显着提高。

6. 发明申请

WO2005099410A2 SINGLE-POLE, DOUBLE-THROW MEMS SWITCH 审中-公开
标题翻译：单通道，双通道MEMS开关
公开(公告)号：WO2005099410A2
公开(公告)日：2005-10-27
申请号：PCT/US2005/012244
申请日：2005-04-12
申请人： SIVERTA, INC. , PASHBY, Gary, Joseph , SLATER, Timothy, G. , GOTTLIEB, Glenn
发明人： PASHBY, Gary, Joseph , SLATER, Timothy, G. , GOTTLIEB, Glenn
CPC分类号： H01H59/0009
摘要： MEMS switches of varying configurations provide individu-ally acutatable contacts. The MEMS switches are sealed by an improved anodic bonding technique.
摘要翻译：不同配置的MEMS开关提供个性化的可触及触点。 MEMS开关由改进的阳极接合技术密封。

7. 发明申请

WO2004013898A2 SEALED INTEGRAL MEMS SWITCH 审中-公开
标题翻译：密封整体式MEMS开关
公开(公告)号：WO2004013898A2
公开(公告)日：2004-02-12
申请号：PCT/US2003/024255
申请日：2003-08-04
申请人： SIVERTA, INC. , PASHBY, Gary, Joseph , SLATER, Timothy, G.
发明人： PASHBY, Gary, Joseph , SLATER, Timothy, G.
IPC分类号： H01L
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
摘要翻译： MEMS开关包括具有跷跷板（52），一对扭杆（66a，66b）和框架（64）的微机械单片层（122）。框架（64）支撑跷跷板（52）以围绕由扭杆（66a，66b）建立的轴线（68）旋转。在跷跷板52的端部处的短路杆58a，58b连接跨接在承载在层122的一个表面上的基板174上的成对开关触点56a1,56a2,56b1,56b2。基底（104）也连接到与衬底（174）相对的层（122）的表面。衬底（174）携带用于向跷跷板（52）施加力的电极（54a，54b），迫使其围绕轴线（68）旋转。支撑在悬臂（166）的自由端处的电接触岛（152）确保了层（122）上的接地板（162a，162b）与衬底（174）上的电导体之间的良好导电。

8. 发明申请

WO2001061400A2 TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS 审中-公开
标题翻译：二维微镜阵列增强
公开(公告)号：WO2001061400A2
公开(公告)日：2001-08-23
申请号：PCT/US2001/005309
申请日：2001-02-16
申请人： XROS, INC., NORTEL NETWORKS , SLATER, Timothy, G. , NEUKERMANS, Armand, P. , BAJIKAR, Sateesh, S. , DOWNING, James, P. , SCHUMAN, Marc, R. , CALMES, Sam , ROMANSOVSKY, Alexander, B. , GREEN, John
发明人： SLATER, Timothy, G. , NEUKERMANS, Armand, P. , BAJIKAR, Sateesh, S. , DOWNING, James, P. , SCHUMAN, Marc, R. , CALMES, Sam , ROMANSOVSKY, Alexander, B. , GREEN, John
IPC分类号： G02B26/00
CPC分类号： G02B26/085 , G02B26/0841
摘要： A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
摘要翻译：提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。这些电极与旋转轴大致平行或偏移45度，形成象限。扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式