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1. 发明申请

WO1997039364A1 PROCESS FOR MANUFACTURE OF A GMR BRIDGE SENSOR AND A GMR BRIDGE SENSOR 审中-公开
标题翻译：用于生产GMR桥和传感器GMR桥式传感器
公开(公告)号：WO1997039364A1
公开(公告)日：1997-10-23
申请号：PCT/DE1997000110
申请日：1997-01-23
申请人： ROBERT BOSCH GMBH , NEUMANN, Christian , MARX, Klaus , JOST, Franz , FREITAG, Martin , SENGHAAS, Dietmar
发明人： ROBERT BOSCH GMBH
IPC分类号： G01R33/09
CPC分类号： G01R33/09 , H01L43/12 , Y10T29/49034
摘要： The invention concerns a process for producing a GMR bridge sensor and the bridge sensor itself which connects magnetoresistive resistors (1 - 4) into a bridge to detect a magnetic field. The resistors are made of a material which shows Giant Magnetoresistive Ratio Effect (GMR Effect). The magnetoresistive sensitivity of the individual resistors is caused by tempering. Tempering the resistors is done by selectively directing a current into the bridge connections (5 - 8) which is sufficient to achieve the temperature required for tempering. By switching the bridge connections, the resistors are given, pair-wise or individually, the necessary property for the GMR effect. The material used for the resistors is from the class of discontinuous laminated materials, especially NiFe/Ag, in which the GMR effect is induced by tempering one time at a specific temperature.
摘要翻译：本发明描述了用于制造GMR传感器桥和桥传感器本身，其中磁阻用于检测磁场的电阻器（1 - 4）的方法，以桥接的形式被连接在一起。电阻器由具有GMR效应（巨磁阻比效果）的材料制成。各个电阻的磁阻灵敏度由退火引起的。电阻器的退火通过选择性地供给电流，其足以用于实现必要的退火温度，在桥连接（5-8）进行。根据桥的连接端子上，使得电阻器是单独必要的GMR财产或成对提供。作为电阻器的材料是一种材料，特别是类不连续的多层的材料，特别是由NiFe /银，被使用，其中，所述GMR特性通过一次在一定温度下进行退火而引起的。

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