会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • LOW CTE BORO-ALUMINOSILICATE GLASS FOR GLASS CARRIER WAFERS
    • 用于玻璃载体晶片的低CTE硼铝硅酸盐玻璃
    • WO2017132837A1
    • 2017-08-10
    • PCT/CN2016/073212
    • 2016-02-02
    • SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.
    • QIAN, PengxiangHOU, YunfeiXUE, JunmingLIEBALD, RainerKUROKI, Hiroshi
    • C03C4/02
    • C03C27/00C03C3/091C03C4/00
    • The invention concerns a low CTE boro-aluminosilicate glass having a low brittleness, in particular for the use in wafer-level-packaging (WLP) applications, with a composition in Mol-%of SiO 2 : 60-85, Al 2 O 3 : 1-17, B 2 O 3 : 8-20, Na 2 O: 0-5, K 2 O: 0-5, MgO: 0-10, CaO: 0-10, SrO: 0-10, BaO: 0-10, wherein the average number of non-bridging oxygen per polyhedron (NBO) is equal or larger than -0.2 and a ratio B 2 O 3 /Al 2 O 3 is equal or larger than 0.5, wherein the NBO is defined as NBO = 2 x O mol / (Si mol +Al mol +B mol ) –4. The invention also concerns a glass carrier wafer made from the low CTE boro-aluminosilicate glass and a use thereof as glass carrier wafer for the processing of a silicon substrate. The invention further concerns a method for providing a low CTE boro-aluminosilicate glass.
    • 本发明涉及具有低脆性的低CTE硼铝硅酸盐玻璃,特别是用于晶片级封装(WLP)应用中的组合物,其组成为SiO 2摩尔% > 2:60-85,Al 2 O 3:1-17,B 2 O 3: 8-20,Na 2 O:0-5,K 2 O:0-5,MgO:0-10,CaO:0-10,SrO :0-10,BaO:0-10,其中每个多面体的非桥连氧的平均数(NBO)等于或大于-0.2并且比率B 2≤0.3, / sub> 2 3 等于或大于0.5,其中NBO定义为NBO = 2×0mol%/( Si摩尔+ Al摩尔+ B摩尔)-4。 本发明还涉及由低CTE硼铝硅酸盐玻璃制成的玻璃载体晶片及其用作用于处理硅衬底的玻璃载体晶片的用途。 本发明还涉及提供低CTE硼铝硅酸盐玻璃的方法。