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1. 发明申请

WO2013006775A1 METHODS FOR AUTOMATICALLY DETERMINING CAPACITOR VALUES AND SYSTEMS THEREOF 审中-公开
标题翻译：用于自动确定电容值及其系统的方法
公开(公告)号：WO2013006775A1
公开(公告)日：2013-01-10
申请号：PCT/US2012/045711
申请日：2012-07-06
申请人： LAM RESEARCH CORPORATION , SATO, Arthur H.
发明人： SATO, Arthur H.
IPC分类号： H01L21/00
CPC分类号： H01J37/32183 , H01J37/321 , H01J2237/332 , H01J2237/334
摘要： A method for automatically performing power matching using a mechanical RF match during substrate processing is provided. The method includes providing a plurality of parameters for the substrate processing wherein the plurality of parameters including at least a predefined number of learning cycles. The method also includes setting the mechanical RF match to operate in a mechanical tuning mode. The method further includes providing a first set of instructions to the substrate processing to ignore a predefined number of cycles of Rapid Alternating Process RAP steps. The method yet also includes operating the mechanical RF match in the mechanical tuning mode for the predefined number of learning cycles. The method yet further includes determining a set of optimal capacitor values. The method moreover includes providing a second set of instructions to a power generator to operate in a frequency tuning mode.
摘要翻译：提供了一种在衬底处理期间使用机械RF匹配自动执行功率匹配的方法。该方法包括提供用于衬底处理的多个参数，其中多个参数包括至少预定数量的学习周期。该方法还包括将机械RF匹配设置为在机械调谐模式下操作。该方法还包括向基板处理提供第一组指令以忽略快速交替处理RAP步骤的预定数量的周期。该方法还包括在预定数量的学习周期中在机械调谐模式下操作机械RF匹配。该方法还包括确定一组最佳电容器值。该方法还包括向功率发生器提供第二组指令以在频率调谐模式下操作。

2. 发明申请

WO2009048517A3 APPARATUS FOR MEASURING DIELECTRIC PROPERTIES OF PARTS 审中-公开
标题翻译：用于测量部件介电特性的装置
公开(公告)号：WO2009048517A3
公开(公告)日：2009-06-18
申请号：PCT/US2008011319
申请日：2008-09-30
申请人： LAM RES CORP , KIM JAEHYUN , SATO ARTHUR H , COMENDANT KEITH , LIU QING , WU FEIYANG
发明人： KIM JAEHYUN , SATO ARTHUR H , COMENDANT KEITH , LIU QING , WU FEIYANG
IPC分类号： H01L21/66
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
摘要翻译：由导电材料形成的腔室连接到地电位。由导电材料形成的热电极以基本上水平的方向布置在腔室内，并与腔室物理分离。热电极包括限定为支撑待测量部分的顶表面。射频（RF）传输杆连接成从热电极的底部表面延伸穿过腔室底部中的开口并与腔室物理分离。 RF传输杆被定义为将来自电气部件外壳中的导体板的RF功率传输到热电极。由导电材料形成的上电极以基本上水平的方向布置在腔室内。上电极电连接到腔室并且被限定为可在竖直方向上移动。

3. 发明申请

WO2009048517A2 APPARATUS FOR MEASURING DIELECTRIC PROPERTIES OF PARTS 审中-公开
标题翻译：用于测量部件电介质性能的装置
公开(公告)号：WO2009048517A2
公开(公告)日：2009-04-16
申请号：PCT/US2008/011319
申请日：2008-09-30
申请人： LAM RESEARCH CORPORATION , KIM, Jaehyun , SATO, Arthur, H. , COMENDANT, Keith , LIU, Qing , WU, Feiyang
发明人： KIM, Jaehyun , SATO, Arthur, H. , COMENDANT, Keith , LIU, Qing , WU, Feiyang
IPC分类号： H01L21/66
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
摘要翻译：由导电材料形成的腔室连接到地电位。由导电材料形成的热电极以大致水平的方向设置在腔室内，并且与腔室物理分离。热电极包括限定为支撑要测量的部分的顶表面。射频（RF）传输杆被连接以从热电极的底表面延伸通过腔室的底部中的一个开口，并与腔室物理分离。 RF传输杆被定义为将RF功率从电气部件壳体中的导体板传递到热电极。由导电材料形成的上电极以大致水平的方向设置在腔室内。上电极电连接到腔室并被限定为可在垂直方向上移动。

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