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    • 7. 发明申请
    • IMPROVED REGISTRATION METHOD IN PHOTOLITHOGRAPHY AND EQUIPMENT FOR CARRYING OUT THIS METHOD
    • 用于实施该方法的改进的注册方法和设备
    • WO1988000362A1
    • 1988-01-14
    • PCT/GB1987000444
    • 1987-06-24
    • SALTER, Stephen, HughSTEVENSON, John, Thomas, MacSweenGUNDLACH, Alan, Michael
    • G03F09/00
    • G03F7/70725G03F7/70041G03F9/7049G03F9/7076
    • A method of registering one image (6) of a reticle plate (5) formed by a projection lens (21) of an optical system on a coated substrate (1) with features created previously on the substrate by an earlier image projection, comprises forming a reference pattern (7) on the substrate and monitoring the changes in position, caused by relative movement of the reticle plate (5) past the substrate (1) in a scan (or x-) direction, of the reference pattern relative to the optical system prior to forming the said one image on the coated substrate. The method is characterised in that the reference pattern (7) is interrogated by optical means (8, 9, 10, 11) operating through the projection lens (21) as the reticle plate (5) approaches a position in which an image (6) thereof will be in register with said features created previously to permit creation of said image correctly on the coated substrate without stopping the movement in the scan direction.
    • 一种将由光学系统的投影透镜(21)形成的一个标线板(5)的一个图像(6)登记在涂覆的基板(1)上,其特征是先前通过较早的图像投影在基板上产生的特征,包括形成 衬底上的参考图案(7),并且监测基准图案相对于所述基板(5)经过基板(1)的扫描(或x-)方向的相对运动引起的位置变化 然后在涂覆的基底上形成所述一个图像之前的光学系统。 该方法的特征在于,当标线板(5)接近图像(6)的位置时,参考图案(7)由通过投影透镜(21)操作的光学装置(8,9,10,11)进行询问 )将与先前创建的所述特征对准,以允许在涂覆的基板上正确地创建所述图像,而不停止在扫描方向上的移动。