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1. 发明授权

US06319842B1 Method of cleansing vias in semiconductor wafer having metal conductive layer 有权
标题翻译：在具有金属导电层的半导体晶片中清洁通孔的方法
公开(公告)号：US06319842B1
公开(公告)日：2001-11-20
申请号：US09753432
申请日：2001-01-02
申请人： Mukul Khosla , Lap Tam , Ronald A. Powell , Ronald D. Allen , Robert T. Rozbicki , Erich Klawuhn , E. Derryck Settles
发明人： Mukul Khosla , Lap Tam , Ronald A. Powell , Ronald D. Allen , Robert T. Rozbicki , Erich Klawuhn , E. Derryck Settles
IPC分类号： H01L21302
CPC分类号： H01L21/02063 , H01L21/31116 , H01L21/76814 , Y10S438/906
摘要： Non-volatile and oxide residues that form during semiconductor processing are removed from the semiconductor structure in a two-stage process. An inert gas and a reducing gas are introduced to the reactor. In the first stage, the non-volatile contaminants are sputtered from the semiconductor structure by creating a plasma to ionize the inert gas. The power applied to the plasma is preferably high enough to give the ions of the inert gas a high degree of directionality as they approach the structure. The first stage is continued until the non-volatile contaminants have been sufficiently removed from the structure. In the second stage, the power is reduced and the reducing gas (e.g., hydrogen) reacts with the oxides (e.g., copper oxide) to form elemental metal and water vapor. During the second stage there is no appreciable sputtering, and therefore the damage to the structure is limited as compared with processes that use sputtering and reduction simultaneously.
摘要翻译：在半导体处理中形成的非挥发性和氧化物残余物在两阶段工艺中从半导体结构中去除。将惰性气体和还原气体引入反应器。在第一阶段，通过产生等离子体以使惰性气体离子化，从半导体结构溅射非挥发性污染物。施加到等离子体的功率优选地足够高以使惰性气体的离子在接近结构时具有高度的方向性。第一阶段继续进行，直至非挥发性污染物从结构中充分除去。在第二阶段中，功率降低，并且还原气体（例如氢气）与氧化物（例如氧化铜）反应以形成元素金属和水蒸气。在第二阶段期间，没有明显的溅射，因此与使用溅射和还原的方法相比，对结构的损害是有限的。

2. 发明授权

US08015587B2 System for monitoring direct broadcast wireless signals 有权
标题翻译：用于监控直播广播无线信号的系统
公开(公告)号：US08015587B2
公开(公告)日：2011-09-06
申请号：US12077169
申请日：2008-03-17
申请人： Jason Jensen , Ronald D. Allen
发明人： Jason Jensen , Ronald D. Allen
IPC分类号： H04N7/173
CPC分类号： H04L41/0681 , H04L41/22 , H04L43/045 , H04L43/06 , H04L43/0817
摘要： A system and method for monitoring direct broadcast satellite signals. In a most general embodiment, the invention (10) includes a mechanism (20) for receiving direct broadcast wireless signals encoded in accordance with a DSS transport protocol. The received signals are analyzed with respect to various parameters and an output is provided in response thereto. In a specific embodiment, the wireless signals are transmitted via satellite and plural integrated receiver decoders (20) are used, one with an associated channel, to receive the wireless signals and provide audio, video, program guide and conditional access signals in response thereto. These signals are analyzed by software (100) running on a computer (56) which outputs alarm data on the detection of anomalies in the received signals.
摘要翻译：用于监控直播广播卫星信号的系统和方法。在最普遍的实施例中，本发明（10）包括用于接收根据DSS传输协议编码的直接广播无线信号的机构（20）。对各种参数分析接收到的信号，并响应于此提供输出。在具体实施例中，通过卫星传送无线信号，并且使用多个集成接收机解码器（20），一个具有相关联的信道，以接收无线信号并响应于此提供音频，视频，节目指南和条件访问信号。这些信号通过在计算机（56）上运行的软件（100）进行分析，计算机（56）输出关于接收信号中的异常检测的警报数据。

3. 发明授权

US07380265B2 System for monitoring direct broadcast wireless signals 有权
标题翻译：用于监控直播广播无线信号的系统
公开(公告)号：US07380265B2
公开(公告)日：2008-05-27
申请号：US10400726
申请日：2003-03-26
申请人： Jason Jensen , Ronald D. Allen
发明人： Jason Jensen , Ronald D. Allen
IPC分类号： H04N7/173
CPC分类号： H04L41/0681 , H04L41/22 , H04L43/045 , H04L43/06 , H04L43/0817
摘要： A system and method for monitoring direct broadcast satellite signals. In a most general embodiment, the invention (10) includes a mechanism (20) for receiving direct broadcast wireless signals encoded in accordance with a DSS transport protocol. The received signals are analyzed with respect to various parameters and an output is provided in response thereto. In a specific embodiment, the wireless signals are transmitted via satellite and plural integrated receiver decoders (20) are used, one with an associated channel, to receive the wireless signals and provide audio, video, program guide and conditional access signals in response thereto. These signals are analyzed by software (100) running on a computer (56) which outputs alarm data on the detection of anomalies in the received signals.
摘要翻译：用于监控直播广播卫星信号的系统和方法。在最普遍的实施例中，本发明（10）包括用于接收根据DSS传输协议编码的直接广播无线信号的机构（20）。对各种参数分析接收到的信号，并响应于此提供输出。在具体实施例中，通过卫星传送无线信号，并且使用多个集成接收机解码器（20），一个具有相关联的信道，以接收无线信号并响应于此提供音频，视频，节目指南和条件访问信号。这些信号通过在计算机（56）上运行的软件（100）进行分析，计算机（56）输出关于接收信号中的异常检测的警报数据。

4. 发明申请

US20080172700A1 System for monitoring direct broadcast wireless signals 有权
公开(公告)号：US20080172700A1
公开(公告)日：2008-07-17
申请号：US12077169
申请日：2008-03-17
申请人： Jason Jensen , Ronald D. Allen
发明人： Jason Jensen , Ronald D. Allen
IPC分类号： H04N7/20
CPC分类号： H04L41/0681 , H04L41/22 , H04L43/045 , H04L43/06 , H04L43/0817
摘要： A system and method for monitoring direct broadcast satellite signals. In a most general embodiment, the invention (10) includes a mechanism (20) for receiving direct broadcast wireless signals encoded in accordance with a DSS transport protocol. The received signals are analyzed with respect to various parameters and an output is provided in response thereto. In a specific embodiment, the wireless signals are transmitted via satellite and plural integrated receiver decoders (20) are used, one with an associated channel, to receive the wireless signals and provide audio, video, program guide and conditional access signals in response thereto. These signals are analyzed by software (100) running on a computer (56) which outputs alarm data on the detection of anomalies in the received signals.

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