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1. 发明授权

US06867602B2 Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning 有权
标题翻译：具有集成信号调理功能的相对湿度传感器的电容平衡方法和系统
公开(公告)号：US06867602B2
公开(公告)日：2005-03-15
申请号：US10322152
申请日：2002-12-18
申请人： Richard A. Davis , Richard A. Kirkpatrick, II , Steve R. Foote , Ron Foster
发明人： Richard A. Davis , Richard A. Kirkpatrick, II , Steve R. Foote , Ron Foster
IPC分类号： G01D5/24 , G01N27/22 , G01R27/26
CPC分类号： G01N27/225 , G01D5/24
摘要： Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1 and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1 and Cx2, and power provided from a voltage source.
摘要翻译：对基于半导体的传感器（例如湿度传感器）中的公共串联电容电路的电容进行平衡的方法和系统进行说明。相对湿度传感器可以通过串联电容电路提供测量，该串联电容电路包括分离公共顶板和与第一和第二电容器Cx1和Cx2相关联的第一和第二底板的湿度敏感电介质。为了正常工作，普通顶板应处于电容平衡状态。电容平衡可以通过在传感器的公共顶板内和/或沿传感器的共同顶板产生空隙来实现。用于产生空隙的系统可以包括精密切割仪器，用于测量公共串联电容电路Cx1和Cx2中的至少一个的电容的测量装置以及从电压源提供的功率。

2. 发明授权

US06724612B2 Relative humidity sensor with integrated signal conditioning 有权
标题翻译：具有集成信号调理功能的相对湿度传感器
公开(公告)号：US06724612B2
公开(公告)日：2004-04-20
申请号：US10192451
申请日：2002-07-09
申请人： Richard A. Davis , Steve R. Foote , Ron Foster , Richard A. Kirkpatrick, II
发明人： Richard A. Davis , Steve R. Foote , Ron Foster , Richard A. Kirkpatrick, II
IPC分类号： H01G438
CPC分类号： G01D5/24 , G01N27/225
摘要： Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive dielectric, a common top plate and first and second bottom plates associated with a first and second capacitor, respectively. Changes in humidity affect the humidity-sensitive dielectric thereby causing changes in the capacitive value of said series capacitive circuit. The system includes a common top plate; a common humidity-sensitive dielectric formed under said common top plate; a first series capacitor Cx1 including a first bottom plate formed under said common humidity-sensitive dielectric opposite said common top plate; a second series capacitor Cx2 including a second bottom plate formed under said common humidity-sensitive dielectric opposite said common top plate; wherein said first series capacitor Cx1 and said second series capacitor Cx2 commonly share said dielectric and commonly share said common top plate and are arranged in a series capacitor circuit configuration within a semiconductor system. A sampling voltage source can provide a fixed voltage through said series capacitive circuit.
摘要翻译：描述了提供具有集成信号调理的高可靠性相对湿度传感器的方法和系统，其分别提供包括与第一和第二电容器相关联的湿度敏感电介质，公共顶板以及第一和第二底板的串联电容电路。湿度的变化影响湿敏电介质，从而引起所述串联电容电路的电容值的变化。该系统包括一个共同的顶板; 形成在所述公共顶板下方的共同的湿度敏感电介质; 第一串联电容器Cx1，包括形成在与所述公共顶板相对的所述公共温度敏感电介质下方的第一底板; 第二串联电容器Cx2，包括形成在与所述公共顶板相对的所述公共温度敏感电介质下方的第二底板; 其中所述第一串联电容器Cx1和所述第二串联电容器Cx2共同共享所述电介质并共同共享所述公共顶板并且被布置在半导体系统内的串联电容器电路配置中。采样电压源可以通过所述串联电容电路提供固定电压。

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