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1. 发明授权

US06936144B2 High frequency plasma source 有权
标题翻译：高频等离子体源
公开(公告)号：US06936144B2
公开(公告)日：2005-08-30
申请号：US10204686
申请日：2001-02-21
申请人： Manfred Weiler , Roland Dahl
发明人： Manfred Weiler , Roland Dahl
IPC分类号： H01J37/32 , H01L21/205 , H01L21/3065 , H05H1/46 , C23C14/34 , B01J19/08 , C23C16/00 , C23F1/00
CPC分类号： H01J37/32091 , H01J37/32082 , H01J37/321 , H01J37/32183 , H05H1/46
摘要： A high frequency plasma source includes a support element, on which a magnetic field coil arrangement, a gas distribution system and a unit for extraction of a plasma beam are arranged. Additionally a high frequency matching network is arranged within the plasma source.
摘要翻译：高频等离子体源包括支撑元件，在该支撑元件上布置有磁场线圈装置，气体分配系统和用于提取等离子体束的单元。此外，在等离子体源内设置了高频匹配网络。

2. 发明申请

US20090133628A1 VACUUM DEVICE FOR CONTINUOUS PROCESSING OF SUBSTRATES 审中-公开
标题翻译：用于连续处理基板的真空装置
公开(公告)号：US20090133628A1
公开(公告)日：2009-05-28
申请号：US12255750
申请日：2008-10-22
申请人： Roland DAHL , Josef Haase , Moritz Heintze , Thomas Pernau , Hans Reichart , Harald Wanka , Jan-Dirk Kaehler , Reinhard Lenz , Dieter Zernickel , Robert Michael Hartung
发明人： Roland DAHL , Josef Haase , Moritz Heintze , Thomas Pernau , Hans Reichart , Harald Wanka , Jan-Dirk Kaehler , Reinhard Lenz , Dieter Zernickel , Robert Michael Hartung
IPC分类号： C23C16/54
CPC分类号： C23C16/458 , H01L21/67742
摘要： A continuous vacuum system for processing substrates has an inlet air lock, an outlet air lock, at least one process chamber, and a device for conveying the substrates through the continuous system. To create a continuous system having a compact design and high throughput for plasma-enhanced treatment of substrates at a reduced pressure, which ensures a simple, rapid and secure handling of the substrates with a high capacity of the substrate carrier, the conveying device has at least one plasma boat in which the substrates are arranged on a base plate in a three-dimensional stack in at least one plane at a predefined distance from one another with intermediate carriers in between. At least the intermediate carriers are made of graphite or another suitable electrically conductive material and can be acted upon electrically with an alternating voltage via an electric connection.
摘要翻译：用于处理衬底的连续真空系统具有入口气锁，出口气锁，至少一个处理室和用于通过连续系统输送衬底的装置。为了创建具有紧凑设计和高通量的连续系统，用于在减压下等离子体增强处理基板，这确保了基板载体具有高容量的基板的简单，快速和可靠的处理，输送装置具有至少一个等离子体船，其中基板在至少一个平面中以三维堆叠的基板布置在彼此以预定距离彼此间隔开的中间载体。至少中间载体由石墨或其它合适的导电材料制成，并且可以通过电连接与交流电压电连接。

3. 发明申请

US20050001490A1 High-frequency matching network 有权
标题翻译：高频匹配网络
公开(公告)号：US20050001490A1
公开(公告)日：2005-01-06
申请号：US10204743
申请日：2001-02-21
申请人： Manfred Weiler , Roland Dahl
发明人： Manfred Weiler , Roland Dahl
IPC分类号： H01J37/32 , H05H1/46 , H02M1/00
CPC分类号： H01J37/32091 , H01J37/32082 , H01J37/321 , H01J37/32183 , H05H1/46
摘要： The invention relates to a high-frequency matching network comprised of a primary switching circuit (1) provided with any type of capacitor (7) and with a variable capacitor (8), and of a high-frequency air-core coil (9). The high frequency matching network is also comprised of a secondary switching circuit (2) provided with any type of capacitor (5, 17), of a high-frequency air-core coil (6) and of at least one excitation electrode (3), whereby the switching circuits (1, 2) are interconnected via the inductive flux of the high-frequency air-core coils (6, 9), and the primary circuit (1) and secondary circuit (2) are additionally coupled in a capacitive manner.
摘要翻译：本发明涉及一种高频匹配网络，由具有任何类型的电容器（7）和可变电容器（8）的初级开关电路（1）和高频空心线圈（9）组成，。高频匹配网络还包括设置有高频空心线圈（6）和至少一个激励电极（3）的任何类型的电容器（5,17）的二次开关电路（2），由此开关电路（1,2）经由高频空心线圈（6,9）的感应通量相互连接，并且主电路（1）和次级电路（2）另外耦合在电容方式。

4. 发明授权

US07276816B2 High-frequency matching network 有权
标题翻译：高频匹配网络
公开(公告)号：US07276816B2
公开(公告)日：2007-10-02
申请号：US10204743
申请日：2001-02-21
申请人： Manfred Weiler , Roland Dahl
发明人： Manfred Weiler , Roland Dahl
IPC分类号： H01F27/42
CPC分类号： H01J37/32091 , H01J37/32082 , H01J37/321 , H01J37/32183 , H05H1/46
摘要： The invention relates to a high-frequency matching network comprised of a primary switching circuit (1) provided with any type of capacitor (7) and with a variable capacitor (8), and of a high-frequency air-core coil (9). The high frequency matching network is also comprised of a secondary switching circuit (2) provided with any type of capacitor (5, 17), of a high-frequency air-core coil (6) and of at least one excitation electrode (3), whereby the switching circuits (1, 2) are interconnected via the inductive flux of the high-frequency air-core coils (6, 9), and the primary circuit (1) and secondary circuit (2) are additionally coupled in a capacitive manner.
摘要翻译：本发明涉及一种高频匹配网络，由具有任何类型的电容器（7）和可变电容器（8）的初级开关电路（1）和高频空心线圈（9）组成，。高频匹配网络还包括设置有高频空心线圈（6）和至少一个激励电极（3）的任何类型的电容器（5,17）的二次开关电路（2），由此开关电路（1,2）经由高频空心线圈（6,9）的感应通量互连，并且主电路（1）和次级电路（2）另外耦合在电容方式。

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