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1. 发明申请

US20100303393A1 Microfabricated Fluid Dynamic Bearing 有权
标题翻译：微型流体动力轴承
公开(公告)号：US20100303393A1
公开(公告)日：2010-12-02
申请号：US12473243
申请日：2009-05-27
申请人： Roger L. Hipwell, JR. , Alan L. Grantz , Dadi Setiadi , Yang Li
发明人： Roger L. Hipwell, JR. , Alan L. Grantz , Dadi Setiadi , Yang Li
IPC分类号： F16C32/06 , B44C1/22
CPC分类号： G11B19/2036 , F16C17/105 , F16C33/107 , F16C2370/12
摘要： A fluid dynamic bearing formed by a microelectromechanical systems (MEMS) wafer-level batch-fabrication process is provided. The process results in a high performance and high reliability fluid dynamic bearing having features including higher bearing lifetime at high RPM, improved bearing stiffness, durability and thrust/restoring forces capabilities. The present invention is especially useful with small form factor disc drive memory devices having constraints in motor height, such as a 2.5 inch disc drive, requiring high performance including high rotational speed and large areal density. A sacrificial layer is utilized in the process to simultaneously form symmetrical facing surfaces of relatively rotatable components. The facing surfaces define, therebetween, a desired feature, such as a journal bearing, a thrust bearing, a fluid channel, a fluid reservoir, a capillary seal, pressure generating grooves, and other profile geometries. Such geometry control allows for design freedom in obtaining a desired bearing performance and stiffness.
摘要翻译：提供了由微机电系统（MEMS）晶圆级批量制造工艺形成的流体动力轴承。该过程产生了高性能和高可靠性的流体动力轴承，其特征包括在高转速下具有较高的轴承寿命，改进的轴承刚度，耐用性和推力/恢复力能力。本发明对于具有马达高度限制的小尺寸盘驱动器存储器件是特别有用的，例如2.5英寸盘驱动器，需要包括高旋转速度和大面密度的高性能。在该过程中利用牺牲层以同时形成相对可旋转部件的对称面对表面。相对的表面在它们之间限定期望的特征，例如轴颈轴承，推力轴承，流体通道，流体储存器，毛细管密封件，压力产生槽和其它轮廓几何形状。这种几何控制允许在获得期望的轴承性能和刚度方面的设计自由度。

2. 发明授权

US06989493B2 Electrical feedthrough assembly for a sealed housing 失效
标题翻译：用于密封外壳的电气馈通组件
公开(公告)号：US06989493B2
公开(公告)日：2006-01-24
申请号：US10792601
申请日：2004-03-03
申请人： Roger L. Hipwell, Jr. , Neal F. Gunderson , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Neal F. Gunderson , Zine-Eddine Boutaghou
IPC分类号： H01B17/26 , H05K1/16
CPC分类号： G11B33/12 , H01L23/10 , H01L23/345 , H01L2924/0002 , H01L2924/3011 , H05K1/0212 , H05K1/053 , H05K3/28 , H05K3/423 , H05K3/445 , H05K2201/09563 , H05K2201/0999 , H05K2203/1147 , H01L2924/00
摘要： An electrical feedthrough assembly for establishing an electrical connection path through an aperture in a side wall of a housing, and a method of fabrication thereof. The feedthrough assembly comprises a plate and at least one electrical contact which extends through the plate. Preferably, a heating member is further provided to extend along a circumference of the plate. The plate is sized to span and surround the aperture so that, upon generation of heat by the heating member, at least one ring of sealing material adjacent the heating member flows to establish a seal between the plate and the housing wall surrounding the aperture. The heat is preferably generated by applying current to the heating member. The feedthrough assembly is preferably fabricated using a microfabrication process. A batch fabrication operation is preferably employed so that a population of the plates are formed from a single panel and subsequently separated therefrom.
摘要翻译：一种用于建立通过壳体的侧壁中的孔的电连接路径的电馈通组件及其制造方法。馈通组件包括板和延伸穿过板的至少一个电触头。优选地，加热构件还设置成沿着板的圆周延伸。该板的尺寸设置成跨过并围绕孔，使得在加热构件产生热量时，与加热构件相邻的至少一个密封材料环流动，以在板和围绕孔的壳体壁之间建立密封。优选通过向加热部件施加电流来产生热量。馈通组件优选地使用微细加工工艺制造。优选采用批量制造操作，使得板的群体由单个板形成并随后与其分离。

3. 发明授权

US06733681B1 Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
标题翻译：用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片
公开(公告)号：US06733681B1
公开(公告)日：2004-05-11
申请号：US09707698
申请日：2000-11-07
申请人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
发明人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
IPC分类号： B81C100
CPC分类号： B81C1/00357 , B81C2201/019 , Y10T29/49025
摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.
摘要翻译：用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

4. 发明申请

US20080174906A1 Interconnect architecture for disc drive array 有权
标题翻译：磁盘驱动器阵列的互连架构
公开(公告)号：US20080174906A1
公开(公告)日：2008-07-24
申请号：US11656659
申请日：2007-01-23
申请人： Alan B. Johnston , Roger L. Hipwell , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderon , Wayne A. Bonin , Jeffery Kenneth Berkowitz , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan
发明人： Alan B. Johnston , Roger L. Hipwell , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderon , Wayne A. Bonin , Jeffery Kenneth Berkowitz , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan
IPC分类号： G11B33/14
CPC分类号： G11B25/043 , G11B19/2009 , G11B33/126
摘要： In general, the invention is directed to techniques for integrated interconnects with a set of disc drives. The interconnects allow for a set of disc drives to be positioned in an array; for example, as set of disc drives may be stacked to communicate with a device through a single interface of the device. The interconnects may be formed as vias within the housing of the disc drives. Vias may produced using MEMS techniques, e.g., electroplating, as part of the manufacturing processes of the disc drive itself.
摘要翻译：通常，本发明涉及与一组盘驱动器的集成互连的技术。互连允许将一组盘驱动器定位在阵列中; 例如，作为一组盘驱动器可以被堆叠以通过设备的单个接口与设备通信。互连可以形成为盘驱动器的壳体内的通孔。作为盘驱动器本身的制造过程的一部分，可以使用MEMS技术（例如电镀）产生通气孔。

5. 发明授权

US07000459B2 Strain sensor patterned on MEMS flex arms 失效
标题翻译：应变传感器图案化在MEMS柔性臂上
公开(公告)号：US07000459B2
公开(公告)日：2006-02-21
申请号：US10463775
申请日：2003-06-17
申请人： Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
发明人： Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
IPC分类号： G01B5/28
CPC分类号： G11B5/5552 , G01L1/2206
摘要： A micromechanical assembly couples to a positioning member and to a body having an aerodynamic surface subject to aerodynamic forces. The micromechanical assembly comprises a substrate including a flexible beam joining a first substrate portion that is attachable to the positioning member to a second substrate portion that is attachable to the body. The substrate includes a substrate surface extending at least over the flexible beam. A lithographic pattern is formed on the substrate surface. The lithographic pattern includes at least a first impedance element that senses flexing of the flexible beam. Contact pads are coupled to the lithographic pattern for coupling to a flex measurement circuit.
摘要翻译：微机械组件连接到定位构件和耦合到具有经受空气动力的空气动力学表面的主体。微机械组件包括基板，该基板包括将可附接到定位构件的第一基板部分连接到可附接到主体的第二基板部分的柔性梁。衬底包括至少在柔性梁上延伸的衬底表面。在基板表面上形成平版印刷图案。光刻图案至少包括感应柔性光束弯曲的第一阻抗元件。接触焊盘耦合到光刻图案以耦合到柔性测量电路。

6. 发明授权

US06643099B1 Transducer formed on a sacrificial metal substrate 失效
标题翻译：传感器形成在牺牲金属基板上
公开(公告)号：US06643099B1
公开(公告)日：2003-11-04
申请号：US09728778
申请日：2000-12-01
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
IPC分类号： G11B560
CPC分类号： G11B5/6005 , G11B5/102 , G11B5/105 , G11B5/11 , G11B5/3103 , G11B5/3146 , G11B5/48 , H05K3/205 , H05K3/4007 , H05K2201/0367
摘要： A transducer assembly in which an electric current is passed through plating solution in recesses of a metal substrate to plate electrical contact bumps having bump fronts in the recesses and exposed bump backs. The transducer is partially formed on the substrate, sealing the exposed bump backs. One or more vacuum processes are performed to complete formation of the transducer. At least a portion of the metal substrate is etched away to expose the bump fronts of the electrical contact bumps.
摘要翻译：一种换能器组件，其中电流通过电镀溶液在金属基底的凹槽中，以在具有凸起前部的凹部和暴露的凸起背面中电镀接触凸块。传感器部分地形成在基板上，密封暴露的凸起背。执行一个或多个真空处理以完成换能器的形成。金属基板的至少一部分被蚀刻掉以露出电接触凸块的凸块前端。

7. 发明授权

US06614628B2 Moving coil micro actuator with reduced rotor mass 失效
公开(公告)号：US06614628B2
公开(公告)日：2003-09-02
申请号：US10051366
申请日：2002-01-18
申请人： Peter Crane , Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou
发明人： Peter Crane , Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou
IPC分类号： G11B556
CPC分类号： G11B5/596 , G11B5/5552 , H02K3/26 , H02K41/03
摘要： A disc drive has a disc rotatable about an axis, a slider carrying a transducing head for transducing data with a disc, and a dual stage actuation assembly supporting the slider to position the transducing head adjacent a selected radial track of the disc. The dual stage actuation assembly includes a movable actuator arm and a suspension assembly supported by the actuator arm. The suspension assembly includes a gimbal. The dual stage actuation assembly further includes a microactuator. The microactuator includes a stator having a top surface and a bottom surface wherein the gimbal is connected to the top surface of the stator. A rotor is operatively connected to the stator and the rotor supports the slider. A magnetic keeper structure is supported by the stator such that the rotor moves with respect to the magnetic keeper structure.

8. 发明授权

US06387778B1 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag 有权
标题翻译：用于使用反应离子蚀刻滞后的微机电系统装置的可破坏的系绳
公开(公告)号：US06387778B1
公开(公告)日：2002-05-14
申请号：US09649536
申请日：2000-08-28
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： H01L21301
CPC分类号： B81C1/00873 , B81C2201/0132
摘要： Utilizing reactive ion etching (RIE) lag, tethers are fabricated that reliably hold devices in place during processing and storage, yet are easily broken to remove the parts from the wafer as desired, without requiring excessive force that could damage the devices. The tethers are fabricated by slightly narrowing the periphery etch feature at several places. By adjusting the ratio of the main periphery width to the necked width at the tethers, the final thickness of the tether can be controlled to a small fraction of the wafer thickness, so that tethers defined by readily achievable feature sizes will reliably hold the parts in place until removal is desired. Since the tethers are now only a fraction of the wafer thickness, they will reliably break to release the part at a force level that will not damage the part.
摘要翻译：利用反应离子蚀刻（RIE）滞后，制造了在加工和存储期间可靠地将装置保持在适当位置的系链，但是容易断裂以根据需要从晶片中除去部件，而不需要可能损坏装置的过大的力。系绳是通过在几个地方略微缩小周边蚀刻特征来制造的。通过调节主臂周边宽度与系绳颈缩宽度的比例，可以将系绳的最终厚度控制在晶片厚度的一小部分，从而可以容易地达到的特征尺寸所限定的系绳将可靠地保持在地方，直到需要去除。由于系绳现在只是晶片厚度的一部分，它们将可靠地断裂，以不会损坏零件的力水平释放零件。

9. 发明授权

US08345517B2 Method and apparatus for aligning a laser diode on a slider 有权
标题翻译：用于使激光二极管对准滑块的方法和装置
公开(公告)号：US08345517B2
公开(公告)日：2013-01-01
申请号：US13097693
申请日：2011-04-29
申请人： Jon P. Hurley , Roger L. Hipwell, Jr.
发明人： Jon P. Hurley , Roger L. Hipwell, Jr.
IPC分类号： G11B11/00
CPC分类号： H01S5/02252 , G11B5/105 , G11B5/3173 , G11B2005/0021 , H01S5/005 , Y10T29/49021
摘要： An apparatus includes a structure including a waveguide and a pocket adjacent to an input facet of the waveguide. A laser has an output facet and is positioned in the pocket. A stop is included one at least one of the laser and a wall of the pocket. The stop is positioned at an interface between the laser and the wall of the pocket such that the output facet of the laser and the input facet of the waveguide are separated by a gap.
摘要翻译：一种装置包括一个结构，该结构包括与波导的输入小面相邻的波导和凹穴。激光器具有输出小面并且位于口袋中。一个停车位包括一个至少一个激光和一个口袋的墙壁。该止动件位于激光器和袋的壁之间的界面处，使得激光器的输出小面和波导的输入小面被间隙分开。

10. 发明申请

US20080174907A1 MEMS disc drive 失效
标题翻译： MEMS磁盘驱动器
公开(公告)号：US20080174907A1
公开(公告)日：2008-07-24
申请号：US11656692
申请日：2007-01-23
申请人： Alan B. Johnston , Roger L. Hipwell , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderson , Wayne A. Bonin , Jeffery Kenneth Berkowitz
发明人： Alan B. Johnston , Roger L. Hipwell , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderson , Wayne A. Bonin , Jeffery Kenneth Berkowitz
IPC分类号： G11B33/14 , G11B5/127
CPC分类号： G11B25/043 , B82Y10/00 , G11B9/1436 , G11B19/2009 , G11B33/126 , G11B33/144
摘要： A micro-electromechanical systems (MEMS) disc drive includes high-precision and integrated components to allow for increased functionality, robustness and reduced size as compared to currently produced disc drives. Integrating multiple subcomponents of the disc drive using batch processing provides low manufacturing costs. Furthermore, using MEMS techniques, new features can be added to disc drives. For example, an environmental control component, an accelerometer and/or a thermometer may be integrated into the housing of the disc drive.
摘要翻译：微机电系统（MEMS）磁盘驱动器包括高精度和集成的组件，以便与当前生产的磁盘驱动器相比能够增加功能，鲁棒性和减小的尺寸。使用批处理集成磁盘驱动器的多个子组件提供了低制造成本。此外，使用MEMS技术，可以将新功能添加到磁盘驱动器。例如，可以将环境控制部件，加速度计和/或温度计集成到盘驱动器的壳体中。

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