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1. 发明授权

US08622577B2 Lighting device with air circulation means 有权
标题翻译：具有空气循环装置的照明装置
公开(公告)号：US08622577B2
公开(公告)日：2014-01-07
申请号：US13202468
申请日：2010-09-09
申请人： Peter Adrianus Albert Kemps , Robertus Leonardus Tousain , Daniël Anton Benoy , Theodoor Cornelis Treurniet , Bastiaan Uitbeijerse , Jacob Cornelis Paul Den Dulk
发明人： Peter Adrianus Albert Kemps , Robertus Leonardus Tousain , Daniël Anton Benoy , Theodoor Cornelis Treurniet , Bastiaan Uitbeijerse , Jacob Cornelis Paul Den Dulk
IPC分类号： F21S4/00 , F21V21/00 , F21V29/00 , B60Q1/06
CPC分类号： F21V29/77 , F21V29/673 , F21V29/677 , F21V29/75 , F21V29/76 , F21Y2105/10 , F21Y2115/10
摘要： A lighting device comprises at least a light source (13, 33), a light emitting surface, an air inlet aperture (8, 9, 28), an air outlet aperture (8, 9, 28) and a cooling unit (4, 24) for moving air from the air inlet aperture (8, 9, 28) through the cooling unit (4, 24) to the air outlet. The air inlet aperture (8, 9, 28) and the air outlet aperture (8, 9, 28) are both located on the same side of the lighting device as at least part of the light emitting surface.
摘要翻译：照明装置至少包括光源（13,33），发光表面，空气入口孔（8,9,28），出气孔（8,9,28）和冷却单元（4， 24），用于将空气从空气入口孔（8,9,28）移动通过冷却单元（4,24）到空气出口。进气口（8,9,28）和出气口（8,9,28）都位于照明装置的至少一部分发光表面的同一侧。

2. 发明申请

US20100033098A1 METHOD AND DEVICE FOR DRIVING A GAS DISCHARGE LAMP 失效
标题翻译：用于驱动气体放电灯的方法和装置
公开(公告)号：US20100033098A1
公开(公告)日：2010-02-11
申请号：US12524381
申请日：2008-01-23
申请人： Dolf Henricus Jozef Van Casteren , Robertus Leonardus Tousain
发明人： Dolf Henricus Jozef Van Casteren , Robertus Leonardus Tousain
IPC分类号： H05B41/36
CPC分类号： H05B41/2925 , H05B41/2928
摘要： A driver (1) for driving a gas discharge lamp (2) comprises: -a current source (3) generating lamp current, having a setpoint input (4) for receiving a setpoint signal; -a controller (10) generating a current setpoint signal (SM); -a controllable noise signal source (20) generating a pseudo random noise signal (SPRNS); -an adder (22) adding the current setpoint signal (SM) from the controller and the pseudo random noise signal (SPRNS) from the noise signal source, and providing the result to the setpoint input of the current source; -measuring means (40) measuring a characteristic lamp response of the lamp in response to the pseudo random noise signal (SPRNS), and providing to the controller a sense signal; -a memory (30) associated with the controller, having stored therein at least one reference signal. The controller compares the measured lamp response with said predetermined reference signal in the memory, and may switch off the lamp.
摘要翻译：用于驱动气体放电灯（2）的驱动器（1）包括： - 产生灯电流的电流源（3），具有用于接收设定点信号的设定点输入（4）; - 产生电流设定点信号（SM）的控制器（10）; - 产生伪随机噪声信号（SPRNS）的可控噪声信号源（20）; - 加法器（22）将来自控制器的电流设定点信号（SM）和来自噪声信号源的伪随机噪声信号（SPRNS）相加，并将结果提供给电流源的设定值输入; - 测量装置（40），响应于伪随机噪声信号（SPRNS）测量灯的特征灯响应，并向控制器提供感测信号; - 与控制器相关联的存储器（30），其中存储有至少一个参考信号。控制器将测量的灯响应与存储器中的所述预定参考信号进行比较，并且可以关闭灯。

3. 发明授权

US10299331B2 LED retrofit driver circuit and method of operating the same 有权
公开(公告)号：US10299331B2
公开(公告)日：2019-05-21
申请号：US14117047
申请日：2012-05-14
申请人： Robertus Leonardus Tousain , Redouane Eddeane , Dennis Johannes Antonius Claessens , Philip Louis Zulma Vael , Jack Jiang
发明人： Robertus Leonardus Tousain , Redouane Eddeane , Dennis Johannes Antonius Claessens , Philip Louis Zulma Vael , Jack Jiang
IPC分类号： H05B33/08 , F21K9/23 , H05B39/04
摘要： A LED retrofit driver circuit (3) is provided, comprising at least an input (6) for receiving an operating voltage from a power supply (2), an output (8) for connection to one or more LED units (5), a power converter (7) connected with said input (6) and said output (8) and configured to provide a lamp current (50) at said output (8) during operation in at least a first and a second operating state. To provide a versatile circuit (3), allowing operation with a variety of power supplies and under various load conditions, in said first operating state, the power converter (7) is adapted to switch between a high current generating mode (40), in which the power converter (7) is configured to draw current pulses from said power supply (2) to provide a first average input current (33a), and an OFF mode (42) in which no current is drawn from said power supply (2). In said second operating state, said power converter (7) is adapted at least to operate in a low current generating mode (41), in which the power converter (7) is configured to draw a current from said power supply (2) to provide a second average input current (33b) which is lower than said first average input current (33a).

4. 发明授权

US09122173B2 Positioning system, lithographic apparatus and device manufacturing method 有权
标题翻译：定位系统，光刻设备及器件制造方法
公开(公告)号：US09122173B2
公开(公告)日：2015-09-01
申请号：US13398890
申请日：2012-02-17
申请人： Hans Butler , Martinus Agnes Willem Cuijpers , Christiaan Alexander Hoogendam , Robertus Johannes Marinus De Jongh , Michael Jozef Mathijs Renkens , Marc Wilhelmus Maria Van Der Wijst , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Ronald Petrus Hendricus Faassen , Adrianus Hendrik Koevoets
发明人： Hans Butler , Martinus Agnes Willem Cuijpers , Christiaan Alexander Hoogendam , Robertus Johannes Marinus De Jongh , Michael Jozef Mathijs Renkens , Marc Wilhelmus Maria Van Der Wijst , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Ronald Petrus Hendricus Faassen , Adrianus Hendrik Koevoets
IPC分类号： G03B27/58 , G03B27/42 , G03F7/20
CPC分类号： G03F7/709 , G03F7/70758 , G03F7/70766
摘要： A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.
摘要翻译：一种定位系统，用于将平台定位在光刻设备的基架内，所述定位系统包括第一和第二致动器以及控制器。第一执行器在桌子上施加致动力。第一致动器连接到构造和布置成吸收第一致动器的反作用力的平衡块。控制器和第二致动器构造和布置成施加补偿力和/或扭矩以补偿由第一致动器施加在平衡块上的致动力引起的扭矩。

5. 发明授权

US08355115B2 Positioning system, method, and lithographic apparatus 有权
标题翻译：定位系统，方法和光刻设备
公开(公告)号：US08355115B2
公开(公告)日：2013-01-15
申请号：US12576079
申请日：2009-10-08
申请人： Robertus Leonardus Tousain , Martijn Robert Hamers , Jeroen Arnoldus Leonardus Johannes Raaymakers
发明人： Robertus Leonardus Tousain , Martijn Robert Hamers , Jeroen Arnoldus Leonardus Johannes Raaymakers
IPC分类号： G03B27/58
CPC分类号： G03B27/58 , G03F7/70725
摘要： A lithographic apparatus includes a positioner configured to position a first part of the apparatus relative to a second part of the apparatus, the positioner including a motor having a motor position dependent motor constant defining a relation between a motor input and a motor output, and a control system to drive the motor, the control system including a set-point generator to provide a reference signal based on a desired position of the first part relative to the second part, and a controller to provide a drive signal to the motor based on the reference signal, wherein the controller includes a compensator which is configured to at least partially compensate the drive signal for the motor position dependent motor constant. The invention further relates to a positioner, a method to optimize the positioning system, and a method to derive a motor position dependent motor constant.
摘要翻译：光刻设备包括定位器，其被配置为相对于设备的第二部分定位设备的第一部分，定位器包括具有定义电动机输入和电动机输出之间的关系的电动机位置相关电动机常数的电动机，以及控制系统，用于驱动电动机，所述控制系统包括设定点发生器，以基于所述第一部分相对于所述第二部分的期望位置提供参考信号;以及控制器，用于基于所述第一部分向所述电动机提供驱动信号参考信号，其中所述控制器包括补偿器，所述补偿器被配置为至少部分地补偿所述电动机位置相关电动机常数的驱动信号。本发明还涉及一种定位器，一种优化定位系统的方法，以及一种导出与电动机位置有关的电动机常数的方法。

6. 发明申请

US20100149516A1 Lithographic Apparatus and A Method to Compensate for the Effect of Disturbances on the Projection System of a Lithographic Apparatus 有权
标题翻译：平版印刷设备和补偿干涉影响光刻设备投影系统的方法
公开(公告)号：US20100149516A1
公开(公告)日：2010-06-17
申请号：US12616312
申请日：2009-11-11
申请人： Erik Roelof LOOPSTRA , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
发明人： Erik Roelof LOOPSTRA , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
IPC分类号： G03B27/58
CPC分类号： G03F7/709 , G03F7/70525 , G03F7/70758 , G03F7/70766
摘要： Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object.
摘要翻译：本发明的实施例提供了一种光刻设备，其包括配置成调节辐射束的照明系统，构造成支撑图案形成装置的图案形成装置支撑件，所述图案形成装置能够在其横截面中赋予辐射束图案以形成图案化的辐射束，被构造成保持衬底的衬底台，配置成将图案化的辐射束投影到衬底的目标部分上的投影系统，用于支撑投影系统的主动空气支架，主动空气支架包括至少一个致动器和前馈装置，所述前馈装置被配置为基于可移动物体的设定点信号提供到所述至少一个致动器的前馈信号，其中所述前馈信号被设计成由于可移动物体的移动而减小对投影系统的干扰效应。

7. 发明申请

US20120293077A1 ENERGY MANAGEMENT CONTROL FOR SOLAR-POWERED LIGHTING DEVICES 审中-公开
标题翻译：太阳能照明设备的能源管理控制
公开(公告)号：US20120293077A1
公开(公告)日：2012-11-22
申请号：US13574805
申请日：2011-01-31
申请人： Robertus Leonardus Tousain , Jan-Ivo Blankestijn , Bertrand Johan Edward Hontele
发明人： Robertus Leonardus Tousain , Jan-Ivo Blankestijn , Bertrand Johan Edward Hontele
IPC分类号： H05B37/00
CPC分类号： H05B37/00 , H02J3/383 , H02J7/00 , H05B37/0227 , H05B37/0281 , Y02A30/12 , Y02B20/42 , Y02E10/563
摘要： This invention relates to a method of controlling the light output of a solar-powered lighting device. The lighting device comprises a light source, a battery connected to the light source, a solar-power generator including a charger connected to the battery, and a control unit for performing the light output control. The method comprises:—charging the battery while solar-power is generated;—acquiring local day-light data;—repeatedly:—acquiring, at predetermined time intervals, local weather fore-cast data covering a predetermined time period, and determining a lighting output profile for the predetermined time period; and—driving the lighting device according to the lighting output profile, wherein said determining a lighting output profile comprises:—predicting a lighting demand for the predetermined time period on basis of first environment light data, which first environment light data comprises the local day-light data;—predicting a battery capacity for the predetermined time period on basis of a present energy storage level and second environment light data, which second environment light data comprises the weather forecast data and the local day-light data; and—determining the lighting output profile on basis of the lighting demand and the battery capacity under consideration of keeping the energy storage level above a predetermined minimum level during the predetermined time period.
摘要翻译：本发明涉及一种控制太阳能照明装置的光输出的方法。照明装置包括光源，连接到光源的电池，包括连接到电池的充电器的太阳能发电机和用于执行光输出控制的控制单元。该方法包括：在生成太阳能的同时对电池充电; - 获取本地日光数据; - 重复地： - 以预定的时间间隔获取覆盖预定时间段的本地天气预报数据，以及确定照明输出曲线预定时间段; 并且根据所述照明输出配置来驱动所述照明装置，其中所述确定照明输出配置文件包括： - 基于第一环境光数据预测所述预定时间段内的照明需求，所述第一环境光数据包括所述本地日 - 光数据; - 基于当前能量存储水平和第二环境光数据预测电池容量达预定时间段，该第二环境光数据包括天气预报数据和当地日光数据; 并且在所述预定时间段期间，考虑将所述能量存储水平保持在预定最小水平以下的方式，基于所述照明需求和所述电池容量确定所述照明输出曲线。

8. 发明授权

US08300208B2 Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus 有权
标题翻译：平版印刷设备和补偿光刻设备投影系统上的干扰影响的方法
公开(公告)号：US08300208B2
公开(公告)日：2012-10-30
申请号：US12616312
申请日：2009-11-11
申请人： Erik Roelof Loopstra , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
发明人： Erik Roelof Loopstra , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
IPC分类号： G03B27/42 , G03B27/58 , G03B27/62
CPC分类号： G03F7/709 , G03F7/70525 , G03F7/70758 , G03F7/70766
摘要： Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object.
摘要翻译：本发明的实施例提供了一种光刻设备，其包括配置成调节辐射束的照明系统，构造成支撑图案形成装置的图案形成装置支撑件，所述图案形成装置能够在其横截面中赋予辐射束图案以形成图案化的辐射束，被构造成保持衬底的衬底台，配置成将图案化的辐射束投影到衬底的目标部分上的投影系统，用于支撑投影系统的主动空气支架，主动空气支架包括至少一个致动器和前馈装置，所述前馈装置被配置为基于可移动物体的设定点信号提供到所述至少一个致动器的前馈信号，其中所述前馈信号被设计成由于可移动物体的移动而减小对投影系统的干扰效应。

9. 发明申请

US20120186271A1 NOISE REDUCTION FOR AN ACOUSTIC COOLING SYSTEM 审中-公开
标题翻译：噪音降低系统的噪声
公开(公告)号：US20120186271A1
公开(公告)日：2012-07-26
申请号：US13497256
申请日：2010-09-20
申请人： Robertus Leonardus Tousain , Ronaldus Maria Aarts , Adriaan Johan Van Leest , Daniel Anton Benoy
发明人： Robertus Leonardus Tousain , Ronaldus Maria Aarts , Adriaan Johan Van Leest , Daniel Anton Benoy
IPC分类号： F25B21/00
CPC分类号： F04F7/00 , G10K11/178
摘要： The present invention relates to an acoustic cooling system (1) arranged for cooling by generating sound waves, said system (1) comprising a transducer (2) and a control unit (6) configured to generate a drive signal (S1) for exciting said transducer (2), wherein said drive signal is a multi-harmonic drive signal comprising at least one higher harmonic (A2-A5) selected to reduce the presence of at least one corresponding higher harmonic (B2-B5) comprised in the sound waves. The system is advantageous in that noise-reduction can be achieved without the need of incorporating a second transducer, thereby enabling a compact acoustic cooling system at a low cost.
摘要翻译：本发明涉及一种用于通过产生声波进行冷却的声学冷却系统（1），所述系统（1）包括换能器（2）和控制单元（6），该控制单元（6）被配置为产生驱动信号（S1）换能器（2），其中所述驱动信号是包括被选择以减少包含在声波中的至少一个对应的高次谐波（B2-B5）的存在的至少一个高次谐波（A2-A5）的多谐波驱动信号。该系统的优点在于可以实现降噪，而不需要并入第二换能器，从而以低成本实现紧凑的声学冷却系统。

10. 发明授权

US07551970B2 Positioning apparatus gravity compensation device and method for compensating gravitational forces 失效
标题翻译：定位装置重力补偿装置和补偿重力的方法
公开(公告)号：US07551970B2
公开(公告)日：2009-06-23
申请号：US10567220
申请日：2004-07-29
申请人： Bernard Jacob Andries Stommen , Robertus Leonardus Tousain
发明人： Bernard Jacob Andries Stommen , Robertus Leonardus Tousain
IPC分类号： G05B19/18 , G05D23/275
CPC分类号： G05B19/404 , G05B2219/40255 , G05B2219/41114
摘要： The present invention relates to a positioning apparatus. The positioning apparatus comprises at least one position sensor, at least one position controller and at least one position actuator, wherein the or each position sensor measures the position of a position-controlled device, wherein the or each position controller uses measurement signals provided by the or each position sensor as input signals, and wherein output signals generated by the or each position controller are used by the or each position actuator to control the position of said position-controlled device. The positioning apparatus further comprising a gravity compensation device compensating gravitational forces acting on said position-controlled device, wherein the gravity compensation device includes at least one gravity compensation controller and at least one gravity compensation actuator, wherein the or each gravity compensation controller uses the output signals generated by the or each position controller as input signals, thereby generating output signals used by the or each gravity compensation actuator to compensate gravitational forces acting on said position-controlled device.
摘要翻译：定位装置技术领域本发明涉及一种定位装置。定位装置包括至少一个位置传感器，至少一个位置控制器和至少一个位置致动器，其中该位置传感器或每个位置传感器测量位置控制装置的位置，其中该位置控制器或每个位置控制器使用由或每个位置传感器作为输入信号，并且其中由所述位置控制器或每个位置控制器产生的输出信号由所述位置致动器或每个位置致动器使用以控制所述位置控制装置的位置。所述定位装置还包括重力补偿装置，其补偿作用在所述位置控制装置上的重力，其中所述重力补偿装置包括至少一个重力补偿控制器和至少一个重力补偿致动器，其中所述或每个重力补偿控制器使用所述输出由该位置控制器或每个位置控制器产生的信号作为输入信号，从而产生由该重力补偿致动器或每个重力补偿致动器使用的输出信号，以补偿作用在所述位置控制装置上的重力。

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