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    • 4. 发明授权
    • Dust particle exposure chamber
    • 粉尘曝光室
    • US5381701A
    • 1995-01-17
    • US037802
    • 1993-03-26
    • Robert P. FrankenthalDavid J. SiconolfiJames D. Sinclair
    • Robert P. FrankenthalDavid J. SiconolfiJames D. Sinclair
    • H01L21/66G01N1/28G01R31/26G01R31/28G01N17/00
    • G01R31/2849G01R31/2817
    • This invention is embodied in an apparatus for assessing the effects of controlled amounts of well-characterized ionic or other particles on the reliability of electronic components. The chamber includes a high efficiency filter that purifies the input air and a recirculating system which ensures substantially laminar, constant velocity air flow, controllable humidity, and steady state conditions throughout at least a portion of the chamber. Particles are introduced into the chamber from a particle generator through a series of output ports that ensure a uniform concentration of particles throughout at least a portion of the chamber. Substantially constant conditions are achieved by constantly introducing new particles into the chamber, withdrawing a continuous flow of particle-laden air from the chamber, removing essentially all the particles from the particle-laden air withdrawn from the chamber and introducing a continuous flow of filtered air into the chamber. Additionally provisions for monitoring particle concentrations and size distribution, for controlling the relative humidity in the chamber, and for carrying out electrical aging and testing can be incorporated.
    • 本发明体现在用于评估受控量的良好表征的离子或其它颗粒对电子部件的可靠性的影响的装置中。 该室包括净化输入空气的高效过滤器和确保在腔室的至少一部分上基本上层流,恒定速度气流,可控湿度和稳态条件的再循环系统。 颗粒通过一系列输出端口从颗粒发生器引入室中,确保颗粒在室的至少一部分上的均匀浓度。 通过不断地将新的颗粒引入室中来实现基本上恒定的条件,从室中取出连续的含颗粒的空气流,基本上将所有的颗粒从从室中排出的载有颗粒的空气中除去,并引入连续的过滤空气流 进入房间 另外还可以包括用于监测颗粒浓度和尺寸分布,用于控制室内的相对湿度以及进行电老化和测试的规定。