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1. 发明授权

US4968637A Method of manufacture TiW alignment mark and implant mask 失效
标题翻译：制造TiW对准标记和植入物掩模的方法
公开(公告)号：US4968637A
公开(公告)日：1990-11-06
申请号：US359465
申请日：1989-05-31
申请人： Robert L. Mozzi , Thomas E. Kazior
发明人： Robert L. Mozzi , Thomas E. Kazior
IPC分类号： H01L21/265 , H01L21/338 , H01L23/544 , H01L29/78
CPC分类号： H01L29/772 , H01L23/544 , H01L29/66871 , H01L29/7801 , H01L21/26513 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , Y10S148/105 , Y10S438/975
摘要： A method for defining simultaneously contact implants for source and drain regions and alignment markers for a gate electrode on a channel region includes the steps of providing a refractory metal layer of titanium tungsten over the substrate and patterning the refractory layer to form simultaneously an alignment marker and implant region mask over said substrate. Subsequent to an implant step, the refractory material in all regions of the substrate is removed, except for the portions defining the alignment markers, which are then used to align a masking pattern to provide component electrodes.
摘要翻译：用于同时定义用于源极和漏极区域的接触植入物和用于沟道区域上的栅电极的对准标记的方法包括以下步骤：在衬底上提供钛钨的难熔金属层并且图案化耐火层以同时形成对准标记和在所述衬底上的植入区掩模。在植入步骤之后，去除衬底的所有区域中的耐火材料，除了限定对准标记的部分之外，其然后用于对准掩模图案以提供部件电极。

2. 发明授权

US5140469A Illumination apparatus for semiconductor fabrication including conical optical means 失效
标题翻译：用于半导体制造的照明装置，包括圆锥形光学装置
公开(公告)号：US5140469A
公开(公告)日：1992-08-18
申请号：US816793
申请日：1992-01-03
申请人： Philip A. Lamarre , Robert L. Mozzi
发明人： Philip A. Lamarre , Robert L. Mozzi
IPC分类号： G03F7/20
CPC分类号： G03F7/70108 , G03F7/2002 , G03F7/7035
摘要： A method of patterning a photoresist layer to provide an aperture having retrograde sidewalls is described. Illumination may be through a conical prism arrangement or a conical reflecting mirror and cylindrical mirror arrangement. The method includes the step of directing energy towards a mask which selectively exposes portions of a photoresist layer disposed on the substrate. The energy is directed to the mask at an oblique angle with respect to the normal to the surface of the substrate. The underlying photoresist layer is obliquely sensitized by the obliquely directed illumination. The portions of the layer which are obliquely sensitized are removed leaving behind an aperture having retrograde sidewalls. The retrograde sidewalls are a preferred photoresist profile for easy and reliable lift-off of deposited material from the semiconductor substrate.
摘要翻译：描述了图案化光致抗蚀剂层以提供具有逆行侧壁的孔的方法。照明可以通过锥形棱镜布置或锥形反射镜和圆柱形镜布置。该方法包括将能量引导到选择性地暴露设置在基板上的光致抗蚀剂层的部分的掩模的步骤。能量相对于衬底的表面的法线以倾斜角度指向掩模。底层光致抗蚀剂层通过倾斜照明而倾斜敏化。去除倾斜敏化层的部分，留下具有逆行侧壁的孔。逆向侧壁是优选的光致抗蚀剂轮廓，用于从半导体衬底容易且可靠地剥离沉积材料。

3. 发明授权

US4920323A Miniature circulators for monolithic microwave integrated circuits 失效
标题翻译：用于单片微波集成电路的微型循环器
公开(公告)号：US4920323A
公开(公告)日：1990-04-24
申请号：US289895
申请日：1988-12-27
申请人： Ernst F. R. A. Schloemann , Ronald E. Blight , Robert L. Mozzi
发明人： Ernst F. R. A. Schloemann , Ronald E. Blight , Robert L. Mozzi
IPC分类号： H01P1/383
CPC分类号： H01P1/383
摘要： A miniature circulator which is compatible with integrated circuits is described. The circulator includes a substrate which supports three copolanar waveguide transmission lines which are connected at a common junction. The common junction provides a coupling structure between the coplanar waveguide transmission lines. A ferrite disc having a conductive layer disposed thereover is provided over the intersection of the three coplanar waveguide transmission lines. A magnet is then disposed over the ferrite disc to direct a D.C. magnetic field through the disc. An alternative coupling structure having interwoven, balanced lines disposed on the substrate is also described. An alternative arrangement for the ferrite disc having a hexangular shape, which carries a beam-lead node metalization is also described.
摘要翻译：描述了与集成电路兼容的微型循环器。循环器包括支撑在公共接头处连接的三个波导管传输线的基板。公共端在共面波导传输线之间提供耦合结构。在三个共面波导传输线的交叉点上设置有设置在其上的导电层的铁氧体磁盘。然后将磁体设置在铁氧体磁盘上以引导直流磁场穿过该磁盘。还描述了具有布置在基板上的交织的平衡线的替代耦合结构。还描述了具有六边形铁氧体磁盘的替代布置，该铁心盘带有光束引线节点金属化。

4. 发明授权

US4904965A Miniature circulator for monolithic microwave integrated circuits 失效
标题翻译：微型循环器用于单片微波集成电路
公开(公告)号：US4904965A
公开(公告)日：1990-02-27
申请号：US289879
申请日：1988-12-27
申请人： Ronald F. Blight , Robert L. Mozzi , Ernst F. R. A. Schloemann
发明人： Ronald F. Blight , Robert L. Mozzi , Ernst F. R. A. Schloemann
IPC分类号： H01P1/387
CPC分类号： H01P1/387
摘要： A miniature circulator which is microwave integrated circuit compatible and based on microstrip transmission techniques is described. The circulator includes a dielectric or semiconductor substrate having microstrip transmission lines formed thereon and a patterned metalization formed as the node metalization for the circulator. The substrate may carry other circuits such as power combiners, amplifiers, and switches. The substrate further includes monolithic capacitors over the substrate at the center of the circulator in a first embodiment or disposed along the periphery of the patterned metalization in the second embodiment. The capacitors are used to capacitively couple the patterned metalization or node metalization to the ground plane conductor. The value of capacitance is selected to provide value broadband performance. A ferrite disc, preferably hexagonal in shape, is disposed over the substrate and has disposed thereon a coupling structure, preferably an interwoven coupling structure comprised of two layers of metalization separated by an intermediate layer of insulating material. Preferred techniques for providing said coupling structure are described.
摘要翻译：描述了微波循环器，其是微波集成电路兼容并基于微带传输技术。环行器包括其上形成有微带传输线的电介质或半导体衬底，以及形成为循环器的节点金属化的图案化金属化。衬底可以承载诸如功率组合器，放大器和开关的其它电路。衬底还包括在第一实施例中在循环器的中心处的衬底上的单片电容器，或者沿着第二实施例中的图案化金属化的外围设置。电容器用于将图案化金属化或节点金属化电容耦合到接地平面导体。选择电容值以提供价值的宽带性能。优选为六边形的铁氧体磁盘设置在衬底之上，并且在其上设置有耦合结构，优选地由包括由绝缘材料的中间层隔开的两层金属化构成的交织耦合结构。描述了用于提供所述耦合结构的优选技术。

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