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1. 发明授权

US09387428B2 Systems and methods for treating flammable effluent gases from manufacturing processes 有权
标题翻译：用于处理来自制造过程的易燃废气的系统和方法
公开(公告)号：US09387428B2
公开(公告)日：2016-07-12
申请号：US12365886
申请日：2009-02-04
申请人： Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Phil Chandler
发明人： Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Phil Chandler
IPC分类号： B01D53/00 , B01D53/40
CPC分类号： B01D53/005 , B01D53/40 , B01D2257/108 , B01D2258/0216
摘要： A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.
摘要翻译：提供了一种处理易燃废气的系统。该系统包括用于将可燃性流出气体运送到减排单元的排气管道，耦合到减排单元以确定减排单元的操作参数的控制系统;联接到排气管道的旁通阀，该旁通阀是响应于监测系统，以及当旁通阀以旁通模式操作时与从减排单元转移的废气混合的第二气体源，以提供具有低于废气的可燃性的混合气体。提供了本发明的方法以及许多其它方面。

2. 发明申请

US20090214991A1 APPARATUS AND METHODS FOR SUPPLYING FUEL EMPLOYED BY ABATEMENT SYSTEMS TO EFFECTIVELY ABATE EFFLUENTS 审中-公开
标题翻译：用于提供废物处理系统的燃料提供有效消耗的装置和方法
公开(公告)号：US20090214991A1
公开(公告)日：2009-08-27
申请号：US12372734
申请日：2009-02-17
申请人： Daniel O. Clark , Allen G. Fox , Robbert M. Vermeulen , Shaun W. Crawford
发明人： Daniel O. Clark , Allen G. Fox , Robbert M. Vermeulen , Shaun W. Crawford
IPC分类号： F23N1/00 , F23D14/82
CPC分类号： F23G7/065 , F23G2209/142 , Y10T137/877
摘要： An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
摘要翻译：一种用于将燃料引入制造污水消除工具的电子装置中的减排装置，包括：歧管; 燃料源，其适于通过燃料管道向所述歧管供应燃料; 以及适于从所述歧管接收燃料的多个喷嘴; 其中所述歧管适于以大于火焰速度的燃料速度向所述喷嘴供应燃料。

3. 发明申请

US20090098492A1 METHODS AND APPARATUS FOR STARTING AND OPERATING A THERMAL ABATEMENT SYSTEM 失效
标题翻译：用于启动和操作热收缩系统的方法和装置
公开(公告)号：US20090098492A1
公开(公告)日：2009-04-16
申请号：US12257888
申请日：2008-10-24
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
IPC分类号： F23N5/08 , F23N5/26 , F23G7/06
CPC分类号： F23G5/50 , B01D2258/0216 , F23G7/065 , F23K5/005 , F23N5/08 , F23N5/242 , F23N2027/02 , F23N2027/04 , F23N2029/02 , F23N2031/08 , F23N2031/18
摘要： A flame sensor apparatus for use with a flame heated thermal abatement reactor is provided, including a flame sensor adapted to sense a flame within the thermal abatement reactor; and a shutter adapted to selectively block the transmission of radiation from the flame to the flame sensor.
摘要翻译：提供了一种与火焰加热的热消除反应器一起使用的火焰传感器装置，其包括适于感测热消除反应器内的火焰的火焰传感器; 以及适于选择性地阻挡从火焰到火焰传感器的辐射传输的快门。

4. 发明申请

US20090018688A1 METHODS AND SYSTEMS FOR DESIGNING AND VALIDATING OPERATION OF ABATEMENT SYSTEMS 审中-公开
标题翻译：用于设计和确认退休系统操作的方法和系统
公开(公告)号：US20090018688A1
公开(公告)日：2009-01-15
申请号：US12139472
申请日：2008-06-14
申请人： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Belynda Flippo , Mehran Moalem , Charles Murray
发明人： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Belynda Flippo , Mehran Moalem , Charles Murray
IPC分类号： G06F19/00
CPC分类号： B01D53/346 , B01D2258/0216
摘要： A method of developing an integrated abatement system is provided, including the steps: a) determining whether an integrated abatement system meets a destruction removal efficiency standard wherein the determination includes the steps: i) operating an electronic device manufacturing process tool using a best known method, whereby effluent containing a target species is produced; ii) abating the target species to form abated effluent, using an abatement system which is coupled to the process tool; and iii) calculating a destruction removal efficiency for the target species; and b) modifying the abatement system by altering at least one of a design parameter and an operating parameter of the abatement system to improve the destruction removal efficiency. Numerous other aspects are provided.
摘要翻译：提供了一种开发集成减排系统的方法，包括步骤：a）确定综合减排系统是否满足销毁去除效率标准，其中确定包括以下步骤：i）使用最佳已知方法操作电子设备制造工艺工具由此产生含有目标物种的流出物; ii）使用与处理工具相连的减排系统来减轻目标物种以形成减排的流出物; 和iii）计算目标物种的破坏去除效率; 以及b）通过改变所述减排系统的设计参数和操作参数中的至少一个来改进所述减排系统，以提高所述破坏去除效率。提供了许多其他方面。

5. 发明授权

US07736600B2 Apparatus for manufacturing a process abatement reactor 失效
标题翻译：用于制造工艺消除反应器的装置
公开(公告)号：US07736600B2
公开(公告)日：2010-06-15
申请号：US11555056
申请日：2006-10-31
申请人： Daniel O. Clark , Sebastien Raoux , Robbert M. Vermeulen , Shaun W. Crawford
发明人： Daniel O. Clark , Sebastien Raoux , Robbert M. Vermeulen , Shaun W. Crawford
IPC分类号： B01D50/00
CPC分类号： B01D53/38 , B01D53/68 , B01D53/74 , B01D53/79 , B01D53/8659 , B01D53/8662 , B01D2251/104 , B01D2251/106 , B01D2251/2062 , B01D2258/0216 , C23C16/4412 , F23C7/02 , F23D2900/00016 , F23G7/065 , F23M5/00
摘要： A thermal reactor for use during the abatement of a semiconductor manufacturing process is provided, including a thermal reaction unit having: an interior porous wall that defines a central chamber, the interior porous wall formed from a plurality of stacked porous sections; at least one gas inlet in fluid communication with the central chamber and adapted to introduce gaseous waste stream to the central chamber; a thermal mechanism positioned within the central chamber and adapted to decompose the gaseous waste stream within the central chamber, thereby forming reaction products; and a fluid delivery system adapted to provide a fluid to the central chamber through the interior porous wall at a sufficient force to reduce deposition of reaction products on an inner surface of the interior porous wall of the central chamber; wherein at least one of the porous sections has one or more of: a property that varies within the porous section; and a property that differs from a property of at least one other porous section of the interior porous wall.
摘要翻译：提供了一种在减少半导体制造过程中使用的热反应器，包括热反应单元，其具有限定中心室的内部多孔壁，所述内部多孔壁由多个堆叠的多孔部分形成; 至少一个气体入口与中心室流体连通并且适于将气体废物流引入中心室; 位于中心室内的热机构，其适于分解中心室内的气态废物流，从而形成反应产物; 以及流体输送系统，其适于通过内部多孔壁以足够的力向中心室提供流体，以减少反应产物在中心室的内部多孔壁的内表面上的沉积; 其中所述多孔部分中的至少一个具有以下一种或多种：在所述多孔部分内变化的性质; 以及与内部多孔壁的至少另一个多孔部分的性质不同的性质。

6. 发明申请

US20090252664A1 METHODS AND APPARATUS FOR HEATING REAGENTS AND EFFLUENTS IN ABATEMENT SYSTEMS 审中-公开
标题翻译：在加热系统中加热试剂和废水的方法和装置
公开(公告)号：US20090252664A1
公开(公告)日：2009-10-08
申请号：US12372729
申请日：2009-02-17
申请人： Robbert M. Vermeulen , Daniel O. Clark
发明人： Robbert M. Vermeulen , Daniel O. Clark
IPC分类号： B01D53/75 , B01J19/00 , A62D3/40
CPC分类号： H01L21/67103
摘要： In some aspects, an apparatus for abating effluent from an electronic device manufacturing process tool is provided, including: a reaction chamber adapted to receive an effluent; and a reagent heating apparatus in fluid connection with the reaction chamber; wherein the reagent heating apparatus is adapted to heat a reagent and to introduce the heated reagent into a heated reagent reaction zone of the reaction chamber; and wherein the reaction chamber is further adapted to mix the effluent and the heated reagent in the heated reagent reaction zone. Other apparatus and methods are disclosed.
摘要翻译：在一些方面，提供了一种用于减轻来自电子设备制造工艺工具的流出物的设备，包括：适于接收流出物的反应室; 以及与所述反应室流体连接的试剂加热装置; 其中所述试剂加热装置适于加热试剂并将加热的试剂引入反应室的加热试剂反应区; 并且其中所述反应室还适于将所述流出物和所述加热的试剂混合在所述加热的试剂反应区中。公开了其他装置和方法。

7. 发明申请

US20080310975A1 METHODS AND APPARATUS FOR A COGENERATION ABATEMENT SYSTEM FOR ELECTRONIC DEVICE MANUFACTURING 审中-公开
标题翻译：用于电子设备制造的加密系统的方法和装置
公开(公告)号：US20080310975A1
公开(公告)日：2008-12-18
申请号：US12126925
申请日：2008-05-25
申请人： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , James L. Smith
发明人： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , James L. Smith
IPC分类号： F04B17/00
CPC分类号： G05B9/02 , Y02P80/15
摘要： The present invention provides systems, methods, and apparatus for abating effluent from an electronic device manufacturing system using cogeneration. The invention includes a pump adapted to couple to a processing chamber and adapted to draw effluent from the processing chamber; a reaction chamber coupled to the pump and adapted to receive the effluent from the pump; and a turbine coupled to the reaction chamber and adapted to be driven by combustion gases from the reaction chamber. The turbine is adapted to generate power which is applied to operate the pump. Numerous additional aspects are disclosed.
摘要翻译：本发明提供了用于减少来自使用热电联产的电子装置制造系统的流出物的系统，方法和装置。本发明包括适于联接到处理室并适于从处理室抽出流出物的泵; 反应室，其耦合到所述泵并适于从所述泵接收流出物; 以及联接到反应室并适于由来自反应室的燃烧气体驱动的涡轮机。涡轮机适于产生用于操作泵的动力。公开了许多附加方面。

8. 发明授权

US08668868B2 Methods and apparatus for smart abatement using an improved fuel circuit 失效
标题翻译：使用改进的燃料电路进行智能减排的方法和装置
公开(公告)号：US08668868B2
公开(公告)日：2014-03-11
申请号：US12258395
申请日：2008-10-25
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
IPC分类号： G01N21/00 , B01D47/00 , B01D47/06 , B01D53/02
CPC分类号： B01D53/346 , B01D53/38 , B01D53/77 , B01D2251/102 , B01D2251/11 , B01D2258/0216 , C23C16/4412
摘要： A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether the abated effluent contains one or more chemical species of interest; and changing one or more operating parameters of the thermal abatement tool based upon the determination. Numerous other embodiments are provided.
摘要翻译：提供了一种从电子设备制造过程中消除流出物的方法，包括减轻热消除工具中的流出物以形成减少的流出物; 确定减排的污水是否含有一种或多种感兴趣的化学物质; 以及基于所述确定改变所述热消除工具的一个或多个操作参数。提供了许多其他实施例。

9. 发明申请

US20090238972A1 METHODS AND APPARATUS FOR USING REDUCED PURITY SILANE TO DEPOSIT SILICON 审中-公开
标题翻译：使用降低纯度的硅烷沉积硅的方法和装置
公开(公告)号：US20090238972A1
公开(公告)日：2009-09-24
申请号：US12410063
申请日：2009-03-24
申请人： Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Yong Kee Chae , Charles Gay , John M. White , Robert Z. Bachrach , Jay J. Jung
发明人： Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Yong Kee Chae , Charles Gay , John M. White , Robert Z. Bachrach , Jay J. Jung
IPC分类号： C23C16/42
CPC分类号： C23C16/24 , C23C16/4402 , C23C16/4412 , C23C16/45593
摘要： In one aspect, a method of forming a silicon layer on a substrate is provided, including the steps providing a substrate; and introducing hydrogen and silane into a chamber containing the substrate such that a layer of silicon is deposited on the substrate; wherein the silane is less than about 99.999% pure. Numerous other aspects are provided.
摘要翻译：一方面，提供了在基板上形成硅层的方法，包括提供基板的步骤; 并将氢和硅烷引入到含有所述衬底的室中，使得硅层沉积在所述衬底上; 其中所述硅烷的纯度小于约99.999％。提供了许多其他方面。

10. 发明授权

US4912142A Antistatic phase-segregated polyurethanes 失效
标题翻译：抗静电相分离聚氨酯
公开(公告)号：US4912142A
公开(公告)日：1990-03-27
申请号：US272147
申请日：1988-11-16
申请人： Robbert M. Vermeulen , Donald M. Maschmeyer
发明人： Robbert M. Vermeulen , Donald M. Maschmeyer
IPC分类号： C08K5/55
CPC分类号： C08K5/55 , Y10S524/91 , Y10S524/912
摘要： This invention is an antistatic thermoplastic, phase-segregated polyurethane containing, as an antistatic additive an effective amount of a monovalent metal tetraphenylboron salt, in the substantial absence of a fatty acid salt, a C.sub.6 -C.sub.30 carboxylic acid ester or phosphate ester compound.Suprisingly, it has been found that, with this particular type of polyurethane, tetraphenylboron salts are very effective antistatic additives even in the absence of enhancer compounds as were previously employed. Accordingly, the antistatic polyurethane is useful for applications such as electronics components and packaging, and other applications where static dissipative ability is needed or desirable.
摘要翻译：本发明是一种抗静电热塑性相分离聚氨酯，其在基本不存在脂肪酸盐，C6-C30羧酸酯或磷酸酯化合物的情况下，含有有效量的一价金属四苯基硼酸盐作为抗静电添加剂。令人惊讶的是，已经发现，对于这种特定类型的聚氨酯，四苯基硼酸盐即使在不存在增强剂化合物的情况下也是非常有效的抗静电添加剂。因此，抗静电聚氨酯可用于诸如电子部件和包装之类的应用，以及需要静电耗散能力的其它应用。

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