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    • 3. 发明申请
    • THERMO-MECHANICAL CLEAVABLE STRUCTURE
    • 热机械可靠结构
    • US20060163685A1
    • 2006-07-27
    • US10905905
    • 2005-01-26
    • Fen ChenCathryn ChristiansenRichard KontraTom LeeAlvin StrongTimothy SullivanJoseph Therrien
    • Fen ChenCathryn ChristiansenRichard KontraTom LeeAlvin StrongTimothy SullivanJoseph Therrien
    • H01L29/00H01L21/00
    • H01L23/5256H01L2924/0002H01L2924/00
    • A thermo-mechanical cleavable structure is provided and may be used as a programmable fuse for integrated circuits. As applied to a programmable fuse, the thermo-mechanical cleavable structure includes an electrically conductive cleavable layer adjacent to a thermo-mechanical stressor. As electricity is passed through the cleavable layer, the cleavable layer and the thermo-mechanical stressor are heated and gas evolves from the thermo-mechanical stressor. The gas locally insulates the thermo-mechanical stressor, causing local melting adjacent to the bubbles in the thermo-mechanical stressor and the cleavable structure forming cleaving sites. The melting also interrupts the current flow through the cleavable structure so the cleavable structure cools and contracts. The thermo-mechanical stressor also contracts due to a phase change caused by the evolution of gas therefrom. As the thermo-mechanical cleavable structure cools, the cleaving sites expand causing gaps to be permanently formed therein.
    • 提供了一种热机械可切割结构,可用作集成电路的可编程保险丝。 如应用于可编程保险丝,热机械可切割结构包括与热机械应力源相邻的导电可切割层。 当电通过可切割层时,可切割层和热机械应力器被加热并且气体从热机械应力源逸出。 气体将热机械应力局部绝缘,导致邻近热机械应力的气泡局部熔化,形成裂开位置的可切割结构。 熔化还中断当前通过可切割结构的流动,因此可切割结构冷却和收缩。 热机械应力还由于由其产生的气体引起的相变而收缩。 当热机械可裂解结构冷却时,裂解位置膨胀,导致间隙永久形成。