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    • 2. 发明授权
    • Feedback controller
    • 反馈控制器
    • US5625551A
    • 1997-04-29
    • US363956
    • 1994-12-27
    • Reiji MitaraiHiroaki TakeishiIsao Iwai
    • Reiji MitaraiHiroaki TakeishiIsao Iwai
    • G05B11/36G05B13/04
    • G05B13/042
    • A high-performance feedback controller having both a target value followability and a disturbance suppression characteristic is provided, and its characteristic arrangement is as follows. In a feedback controller, which receives a target value r and a controlled variable y and supplies a manipulated variable u as a calculation output to a control object which has at least one input u as a manipulated variable and at least one output y as a controlled variable, a compensator G.sub.c (s), whose internal calculation arrangement is given by G.sub.c (s)=.alpha./{G.sub.n (0)-G.sub.n (s)} using a nominal model G.sub.n (s) as an approximate characteristic of the control object and an arbitrary positive parameter .alpha., performs a compensation of a comparison deviation (e=r-y) between the target value r and the controlled variable y.
    • 提供具有目标值跟随性和干扰抑制特性两者的高性能反馈控制器,其特征在于如下。 在反馈控制器中,其接收目标值r和受控变量y,并将操纵变量u作为计算输出提供给具有至少一个输入u作为操纵变量的控制对象,并且至少一个输出y作为受控变量 变量,补偿器Gc(s),其内部计算布置由Gc(s)=α/ {Gn(0)-Gn(s)}给出,使用标称模型Gn(s)作为控制对象的近似特性 和任意的正参数α,执行目标值r和受控变量y之间的比较偏差(e = ry)的补偿。
    • 4. 发明授权
    • Synchronization control apparatus and method
    • 同步控制装置及方法
    • US5917294A
    • 1999-06-29
    • US705302
    • 1996-08-29
    • Reiji Mitarai
    • Reiji Mitarai
    • H01L21/027G03F7/20G03F9/00G05D3/00H01L21/30
    • G03F7/707G03F7/70358G03F7/70716G03F9/70
    • A master-slave synchronization control system is constructed having two drive systems for driving respective ones of two controlled objects capable of being operated individually, wherein the drive system having the slower response is adopted as the master and the drive system having the higher response is adopted as the slave. The drive system of the master, which has the elements of a velocity control system that operates to follow up an entered velocity command value, outputs velocity information and position information of its controlled object. The drive system of the slave has a velocity control system in which the velocity information is adopted as the velocity command value, and a position compensating loop in which the position information is adopted as a position command value. The position compensating loop adds the position compensation value to the velocity command value as a correction signal. Both drive systems are driven at a velocity conforming to the input velocity command value, with the positions of these drive systems being changed in synchronized fashion.
    • 主从同步控制系统被构造成具有两个用于驱动能够单独操作的两个受控对象中的相应的驱动系统的驱动系统,其中采用具有较慢响应的驱动系统作为主机,采用具有较高响应的驱动系统 作为奴隶。 具有用于跟踪输入的速度命令值的速度控制系统的元件的主机的驱动系统输出其受控对象的速度信息和位置信息。 从动装置的驱动系统具有以速度信息作为速度指令值的速度控制系统,位置信息采用位置指令值的位置补偿回路。 位置补偿循环将作为校正信号的位置补偿值与速度指令值相加。 两个驱动系统以符合输入速度指令值的速度被驱动,这些驱动系统的位置以同步的方式改变。
    • 6. 发明授权
    • Energy quantity control method
    • 能量控制方法
    • US5878068A
    • 1999-03-02
    • US796677
    • 1997-02-06
    • Reiji MitaraiYouzou Fukagawa
    • Reiji MitaraiYouzou Fukagawa
    • B23K26/42G03F7/20H01L21/027H01S3/104H01S3/134H01S3/225B23K26/00
    • G03F7/70058B23K26/702H01S3/134H01S3/225
    • An energy quantity control method usable with a pulse energy producing source for successively emitting energy pulses of an energy quantity variable with time, wherein a control parameter for the pulse energy producing source is adjustable to control an energy quantity of an energy pulse, the method including determining, on the basis of a difference between a desired value for integrated energy quantity of energy pulses and an actually measured value for the integrated energy quantity, a desired value for a subsequent energy quantity to be provided subsequently by a subsequent energy pulse, and adjusting the control parameter on the basis of a difference between the desired value for the subsequent energy quantity to be provided subsequently by the subsequent energy pulse and an actually measured energy quantity provided by a last-emitted energy pulse.
    • 一种可用于脉冲能量产生源的能量量控制方法,用于连续地发射随时间变化的能量量的能量脉冲,其中脉冲能量产生源的控制参数是可调节的,以控制能量脉冲的能量,所述方法包括 基于能量脉冲的积分能量的期望值和积分能量的实际测量值之间的差,确定随后的能量脉冲随后提供的后续能量的期望值,并且调整 基于由随后的能量脉冲随后提供的后续能量的期望值与由最后发射的能量脉冲提供的实际测量的能量之间的差的控制参数。
    • 9. 发明授权
    • Control apparatus for travelling wave driven motor
    • 行波驱动电机控制装置
    • US5459369A
    • 1995-10-17
    • US93852
    • 1993-07-20
    • Reiji MitaraiHiroaki Takeishi
    • Reiji MitaraiHiroaki Takeishi
    • H01L41/04H02N2/14H02N2/00
    • H02N2/14
    • In a travelling wave driven motor and its driving apparatus, the absolute value of a speed is controlled using a vibration amplitude value as a main manipulation variable. A plurality of frequencies are selectively generated as sub manipulation variables, and are used as the driving frequencies of the motor. In a precision positioning operation (precision operation mode), an electric signal, which has a first selected frequency separated by a predetermined value from a resonance point of a stator of the motor, and has a predetermined amplitude value, is supplied to a piezoelectric element. In a high-speed feed operation (coarse operation mode), an electric signal, which has a second selected frequency near the resonance point of the stator, and has a predetermined amplitude value, is supplied to the piezoelectric element.
    • 在行波驱动电动机及其驱动装置中,使用振动振幅值作为主要操作变量来控制速度的绝对值。 选择性地生成多个频率作为副操纵变量,并将其用作电动机的驱动频率。 在精密定位操作(精密操作模式)中,将具有与电机的定子的共振点分开的预定值的第一选定频率并具有预定振幅值的电信号提供给压电元件 。 在高速进给操作(粗略操作模式)中,向压电元件提供具有接近定子的共振点附近并具有预定振幅值的第二选定频率的电信号。