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1. 发明申请

US20060078637A1 Solid immersion lens lithography 有权
标题翻译：固体浸没透镜光刻
公开(公告)号：US20060078637A1
公开(公告)日：2006-04-13
申请号：US10961347
申请日：2004-10-08
申请人： Rama Goruganthu , Michael Bruce
发明人： Rama Goruganthu , Michael Bruce
IPC分类号： B29C47/96 , B29C47/92 , B29B13/00 , B29C35/12 , B28B17/00 , B29C35/08 , B29C47/00 , B29B15/00 , G03B27/42 , G03F1/00
CPC分类号： B82Y10/00 , G03F7/70325
摘要： Lithography using solid immersion lenses is disclosed. In one aspect, an apparatus is provided that includes a resist film that has a first side and a second and opposite side. One or more solid immersion lenses are positioned over the first side of the resist film. In another aspect, a method of manufacturing is provided that includes forming a resist film and exposing the resist film with radiation transmitted through one or more solid immersion lenses.
摘要翻译：公开了使用固体浸没透镜的平版印刷术。一方面，提供一种装置，其包括具有第一侧和第二相对侧的抗蚀剂膜。一个或多个固体浸没透镜位于抗蚀剂膜的第一侧上。在另一方面，提供了一种制造方法，其包括形成抗蚀剂膜并通过透射通过一个或多个固体浸没透镜的辐射曝光抗蚀剂膜。

2. 发明授权

US06833718B1 Photon beacon 有权
标题翻译：光子灯塔
公开(公告)号：US06833718B1
公开(公告)日：2004-12-21
申请号：US10324328
申请日：2002-12-20
申请人： David Bethke , Michael R. Bruce , Shawn M. McBride , Greg Dabney , Glen Gilfeather , Rama Goruganthu
发明人： David Bethke , Michael R. Bruce , Shawn M. McBride , Greg Dabney , Glen Gilfeather , Rama Goruganthu
IPC分类号： G01R31302
CPC分类号： G01R31/311
摘要： Various apparatus and methods for enhancing hot-electron luminescence in an integrated circuit are provided. In one aspect, an apparatus is provided that includes a first circuit device coupled to a first voltage source that is operable to bias the first circuit device to a first voltage, and a second circuit device that has a first input coupled to the first voltage source and a junction defining a first side and a second side. One of the first and second sides is coupled to a second voltage source that is independent of the first voltage source and capable of selectively biasing the one of the first and second sides at a second voltage higher than the first voltage. The second device is operable to emit a hot-electron induced photon upon entry into saturation.
摘要翻译：提供了用于增强集成电路中的热电子发光的各种装置和方法。一方面，提供了一种装置，其包括耦合到第一电压源的第一电路装置，其可操作以将第一电路装置偏置到第一电压，以及第二电路装置，其具有耦合到第一电压源以及限定第一侧和第二侧的接合部。第一和第二侧中的一个耦合到独立于第一电压源的第二电压源，并且能够以比第一电压高的第二电压选择性地偏置第一和第二侧中的一个。第二装置可操作以在进入饱和时发射热电子诱导光子。

3. 发明授权

US06828809B1 Photon detection enhancement of superconducting hot-electron photodetectors 失效
标题翻译：超导热电子探测器的光子检测增强
公开(公告)号：US06828809B1
公开(公告)日：2004-12-07
申请号：US10324324
申请日：2002-12-20
申请人： Michael R. Bruce , Robert Powell , Brennan Davis , Rama Goruganthu , Thomas Chu , Miguel Santana, Jr.
发明人： Michael R. Bruce , Robert Powell , Brennan Davis , Rama Goruganthu , Thomas Chu , Miguel Santana, Jr.
IPC分类号： G01R31302
CPC分类号： G01R31/308
摘要： Various methods of hot-electron imaging a workpiece are provided. In one aspect, a method of examining a workpiece is provided that includes directing a first photon at a photodetector at a first known time and stimulating a circuit device of the workpiece at a second known time to produce a condition in the circuit device conducive to photon emission. At least one photon emitted by the circuit device in response to the stimulation is detected. The first photon increases the quantum efficiency of the photodetector in detecting the at least one photon. The detection of the at least one photon relative to the first known time and the second known time is time correlated to temporally distinguish the first photon and the at least one photon and to temporally correlate the stimulation of the circuit device to the detection of the at least one photon.
摘要翻译：提供了对工件进行热电子成像的各种方法。在一个方面，提供了一种检查工件的方法，其包括在第一已知时间引导光电检测器处的第一光子并在第二已知时间刺激工件的电路装置，以产生有利于光子的电路器件中的状态排放。检测由电路装置响应于刺激而发射的至少一个光子。在检测至少一个光子时，第一光子增加了光电检测器的量子效率。相对于第一已知时间和第二已知时间的至少一个光子的检测是时间相关的，以便在时间上区分第一光子和至少一个光子，并且将电路装置的刺激与at 至少一个光子。

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