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1. 发明申请

US20030054588A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 有权
公开(公告)号：US20030054588A1
公开(公告)日：2003-03-20
申请号：US10005308
申请日：2001-12-03
申请人： REFLECTIVITY, INC., a California corporation
发明人： Satyadev R. Patel , Andrew G. Huibers , Steven S. Chiang
IPC分类号： H01L021/44
CPC分类号： B81C1/00214 , B81B7/0077 , B81B2201/042 , B81C1/00333 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , H01L24/97 , H01L2224/48091 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/09701 , H01L2924/10253 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/15787 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00014 , H01L2224/85 , H01L2924/00
摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

2. 发明申请

US20040012838A1 Spatial light modulators with light blocking and absorbing areas 有权
标题翻译：具有遮光和吸收区域的空间光调制器
公开(公告)号：US20040012838A1
公开(公告)日：2004-01-22
申请号：US10305631
申请日：2002-11-26
申请人： REFLECTIVITY, INC., a California corporation
发明人： Andrew G. Huibers
IPC分类号： G02B026/00
CPC分类号： B82Y30/00
摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.
摘要翻译：公开了投影系统，空间光调制器和用于形成MEMS器件的方法。空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。在本发明的一个实施例中，其中一个衬底是透光衬底，并且在透光衬底上设置优选为光吸收层的遮光层，以选择性地阻挡光通过衬底。光阻挡层可以形成为图案，例如用于阻挡光进入相邻微镜之间的间隙的栅格或条带。

3. 发明申请

US20020105729A1 Projection display with full color saturation and variable luminosity 有权
标题翻译：具有全色饱和度和可变亮度的投影显示
公开(公告)号：US20020105729A1
公开(公告)日：2002-08-08
申请号：US10044451
申请日：2002-01-11
申请人： REFLECTIVITY, INC., a California corporation
发明人： Peter W. Richards , Andrew G. Huibers , Gregory R. Muir
IPC分类号： G02B027/14
CPC分类号： H04N9/3114 , G02B26/008
摘要： A color wheel is disclosed that has at least one segment that occupies, for a given radius, a percentage of the circumference of the wheel at that radius, which percentage varies continuously or in multiple steps from a radially inward point to a radially outer point on the wheel. In one embodiment, the color wheel has a plurality of filter segments adjacent each other around the circumference of the wheel, wherein at least one of the transitions from one filter segment to the next is curved or stepped. A color wheel also is disclosed that has a plurality of filter segments adjacent each other around the circumference of the wheel, wherein at least one of the segments is a higher brightness segment than the others and has sides facing adjacent filter segments that do not lie on the radius of the wheel. A projection system is also disclosed that has a light source, a unique color wheel, a spatial light modulator, and projection optics.
摘要翻译：公开了一种色轮，其具有至少一个段，对于给定的半径占据在该半径处的轮的圆周的百分比，该百分比从径向内部点到径向外部点连续地或以多个步长车轮。在一个实施例中，色轮具有围绕轮的圆周彼此相邻的多个过滤器段，其中从一个过滤器段到下一个的过渡段中的至少一个是弯曲的或阶梯的。还公开了一种色轮，其具有围绕车轮圆周彼此相邻的多个过滤器段，其中至少一个段是比其它段更高的亮度段，并且具有面向相邻过滤段的侧面，其不位于轮的半径。还公开了一种具有光源，独特色轮，空间光调制器和投影光学器件的投影系统。

4. 发明申请

US20040100677A1 Spatial light modulators with light blocking/absorbing areas 有权
标题翻译：具有遮光/吸收区域的空间光调制器
公开(公告)号：US20040100677A1
公开(公告)日：2004-05-27
申请号：US10305536
申请日：2002-11-26
申请人： REFLECTIVITY, INC., a California corporation
发明人： Andrew G. Huibers , Satyadev R. Patel
IPC分类号： G02B026/00
CPC分类号： G02B26/0833 , B81B7/0077 , B81B2201/042 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01041 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00
摘要： A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
摘要翻译：公开了投影系统，空间光调制器和用于形成诸如投影显示器的微镜阵列的方法。空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。在本发明的一个实施例中，一个基板是透光基板，并且在透光基板上设置光吸收层，以选择性地阻挡光通过基板。光吸收层可以形成图案，例如围绕微镜阵列的框架。

5. 发明申请

US20040069747A1 Apparatus and method for detecting an endpoint in a vapor phase etch 有权
标题翻译：用于检测气相蚀刻中的端点的装置和方法
公开(公告)号：US20040069747A1
公开(公告)日：2004-04-15
申请号：US10269149
申请日：2002-10-11
申请人： REFLECTIVITY, INC., a California corporation
发明人： Satyadev R. Patel , Gregory P. Schaadt , Douglas B. MacDonald , Niles K. MacDonald , Hongqin Shi
IPC分类号： G01L021/30 , G01R031/00
CPC分类号： H01J37/32963 , B81C1/00476 , B81C1/00587 , B81C99/0065 , B81C2201/0132 , B81C2201/0138 , H01J37/32449 , H01J37/32935
摘要： Processes for the removal of a layer or region from a workpiece material by contact with a process gas in the manufacture of a microstructure are enhanced by the ability to accurately determine the endpoint of the removal step. A vapor phase etchant is used to remove a material that has been deposited on a substrate, with or without other deposited structure thereon. By creating an impedance at the exit of an etching chamber (or downstream thereof), as the vapor phase etchant passes from the etching chamber, a gaseous product of the etching reaction is monitored, and the endpoint of the removal process can be determined. The vapor phase etching process can be flow through, a combination of flow through and pulse, or recirculated back to the etching chamber
摘要翻译：通过与制造微结构中的工艺气体接触从工件材料去除层或区域的工艺通过精确地确定去除步骤的终点的能力增强。气相蚀刻剂用于去除已经沉积在基底上的材料，其上具有或不具有其它沉积结构。通过在蚀刻室（或其下游）的出口处产生阻抗，当气相蚀刻剂从蚀刻室通过时，监测蚀刻反应的气态产物，并且可以确定去除过程的终点。气相蚀刻工艺可以流过，流过和脉冲的组合，或再循环回蚀刻室

6. 发明申请

US20030137501A1 Spatial light modulator with charge-pump pixel cell 有权
标题翻译：带电荷泵像素单元的空间光调制器
公开(公告)号：US20030137501A1
公开(公告)日：2003-07-24
申请号：US10340162
申请日：2003-01-10
申请人： REFLECTIVITY, INC., a California corporation
发明人： Peter W. Richards
IPC分类号： G09G005/00
CPC分类号： G09G3/34 , G02F1/136277 , G09G3/2018 , G09G3/346 , G09G3/3648 , G09G2300/08 , G09G2310/0235 , G09G2310/0251 , G11C11/401 , G11C11/404
摘要： A voltage storage cell circuit includes an access transistor and a storage capacitor, wherein the source of said access transistor is connected to a bitline, the gate of said access transistor is connected to a wordline, and wherein the drain of said access transistor is connected to a first plate of said storage capacitor forming a storage node, and wherein the second plate of said storage capacitor is connected to a pump signal. This arrangement allows for a novel pixel circuit design with area requirements comparable to that of a 1T1C DRAM-like pixel cell, but with the advantage of an output voltage swing of the full range allowed by the breakdown voltage of the pass transistor. A spatial light modulator such as a micromirror array can comprise such a voltage storage cell.
摘要翻译：电压存储单元电路包括存取晶体管和存储电容器，其中所述存取晶体管的源极连接到位线，所述存取晶体管的栅极连接到字线，并且其中所述存取晶体管的漏极连接到所述存储电容器的第一板形成存储节点，并且其中所述存储电容器的第二板连接到泵浦信号。这种布置允许具有与1T1C类DRAM像素单元的面积要求相当的面积要求的新型像素电路设计，但是具有通过晶体管的击穿电压允许的全范围的输出电压摆幅的优点。诸如微镜阵列的空间光调制器可以包括这种电压存储单元。

7. 发明申请

US20030073302A1 Methods for formation of air gap interconnects 审中-公开
标题翻译：形成气隙互连的方法
公开(公告)号：US20030073302A1
公开(公告)日：2003-04-17
申请号：US10270465
申请日：2002-10-11
申请人： REFLECTIVITY, INC., a California corporation
发明人： Andrew G. Huibers
IPC分类号： H01L021/4763
CPC分类号： B81C1/00801 , B81C1/00095 , B81C1/00476 , B81C99/0065 , B81C2201/0138 , B81C2201/117 , H01L21/7682
摘要： Processes are disclosed for forming integrated circuit devices where multilayered structures are formed having between layers a removable silicon material. The layers adjacent the removable silicon can be either conducting or insulating or both. After forming one or more layers with the removable silicon therebetween, the silicon is removed so as to provide for an air-gap dielectric. In one embodiment, adjacent layers are copper. Between the copper and removable silicon can be a barrier layer, such as a transition metal-silicon-nitride layer. In a preferred embodiment, the removable silicon is removed with a gas phase interhalogen or noble gas halide.
摘要翻译：公开了用于形成集成电路器件的工艺，其中多层结构在层之间形成可移除的硅材料。与可去除的硅相邻的层可以是导电的或绝缘的，也可以是两者。在其间具有可去除的硅形成一个或多个层之后，去除硅以提供气隙电介质。在一个实施例中，相邻层是铜。在铜和可移除的硅之间可以是阻挡层，例如过渡金属 - 氮化硅层。在优选的实施方案中，用气相卤间或惰性气体卤化物除去可除去的硅。

8. 发明申请

US20030134449A1 Method for adjusting a micro-mechanical device 有权
标题翻译：微机械装置调整方法
公开(公告)号：US20030134449A1
公开(公告)日：2003-07-17
申请号：US10338561
申请日：2003-01-07
申请人： REFLECTIVITY, INC., a California Corporation
发明人： Andrew G. Huibers
IPC分类号： H01L021/00
CPC分类号： B81C3/002
摘要： A method for making a MEMS device comprises forming a plurality of micromechanical elements on a first substrate; forming circuitry and electrodes on a second substrate, the first and second substrates extending in a plane in X and Y directions; aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; singulating the assembly into assembly portions; and altering the gap for each assembly portion. Another embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; actuating and testing the micromechanical elements of the assembly; and altering the gap for each assembly. A further embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; wherein the micromechanical elements are actuated while bonding of the substrates.
摘要翻译：制造MEMS器件的方法包括在第一衬底上形成多个微机械元件; 在第二基板上形成电路和电极，所述第一和第二基板在X和Y方向上的平面中延伸; 使第一和第二基板沿X方向和Y方向对齐，并且沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 将组件分成组装部分; 并改变每个组装部分的间隙。另一实施例涉及使第一和第二基板沿X方向和Y方向对准，并使基板沿Z方向彼此相对移动，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 启动和测试组件的微机械元件; 并改变每个装配的间隙。另一实施例涉及在第一和第二基板之间沿X方向和Y方向对准并沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 其中所述微机械元件在所述基板的接合的同时被致动。

9. 发明申请

US20020109821A1 Projection display with multiply filtered light 有权
标题翻译：使用多重滤光的投影显示
公开(公告)号：US20020109821A1
公开(公告)日：2002-08-15
申请号：US10052012
申请日：2002-01-16
申请人： REFLECTIVITY, INC., a California Corporation
发明人： Andrew G. Huibers , Peter W. Richards
IPC分类号： G03B021/14
CPC分类号： H04N9/3114 , G02B26/008 , G02B26/023
摘要： A projection system is disclosed that has a light source of multiple wavelengths, a spatial light modulator and projection optics for projecting an image to be viewed by a viewer or to be displayed on a target. Also provided are one or more color sequencing devices which filter the light multiple times. Whether a single or plural color sequencing elements are provided, a single light beam passes at least twice through a sequence of light filters. In one embodiment, two color wheels provide the ability to filter the light multiple times. By changing the physical position or phase of one series of filters relative to another, the brightness and color saturation of the image projected through the projection optics can be changed. The changes in brightness and color saturation can be performed manually by mechanically changing the phase (or position) of the color sequencing device(s) relative to the light beam. Such changes can be performed step-wise of gradually through a continuum of brightness vs. color saturation points.
摘要翻译：公开了具有多个波长的光源的投影系统，空间光调制器和用于投影由观看者观看或要显示在目标上的图像的投影光学器件。还提供了一种或多种多次过滤光的颜色排序装置。是否提供单个或多个颜色排序元件，单个光束通过一系列滤光器至少通过两次。在一个实施例中，两个色轮提供多次过滤光的能力。通过改变一系列滤光镜相对于另一系列的物理位置或相位，可以改变通过投影光学器件投影的图像的亮度和色彩饱和度。亮度和色彩饱和度的变化可以通过机械地改变颜色排序装置相对于光束的相位（或位置）来手动执行。这样的变化可以逐步地通过连续的亮度与色彩饱和度点逐步地执行。

10. 发明申请

US20040233505A1 Multiple hinge MEMS device 有权
标题翻译：多重铰链MEMS器件
公开(公告)号：US20040233505A1
公开(公告)日：2004-11-25
申请号：US10346506
申请日：2003-01-15
申请人： REFLECTIVITY, INC., a California corporation
发明人： Andrew G. Huibers , Satyadev R. Patel
IPC分类号： G02B026/00
CPC分类号： G02B26/0841
摘要： A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.
摘要翻译：公开了一种MEMS器件，包括：衬底; 可移动微机械元件，其相对于所述基板移动; 用于允许微机械元件移动的连接器和铰链，其中连接器由不同于铰链的材料制成。在本发明的另一个实施例中，连接器的导电率大于铰链。在本发明的另一实施例中，铰链提供至少90％的恢复力到MEMS装置，并且连接器提供10％或更小的恢复力。在本发明的另一实施例中，连接器和铰链具有不同的弹簧常数。在本发明的另一个实施例中，连接器在微机械元件的最大偏转处经受比铰链更低的应变。

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