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1. 发明申请

WO2012007526A3 DEVICE, SYSTEM AND METHOD FOR USE IN MACHINES FOR ELECTROCHEMICAL PATTERN REPLICATION 审中-公开
公开(公告)号：WO2012007526A3
公开(公告)日：2012-01-19
申请号：PCT/EP2011/061996
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SVENSSON, Stefan , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , WIWEN-NILSSON, Peter , LINDGREN, Lennart , CAVAZZA, Gilbert , RAYNAUD, Nicolas
发明人： MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SVENSSON, Stefan , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , WIWEN-NILSSON, Peter , LINDGREN, Lennart , CAVAZZA, Gilbert , RAYNAUD, Nicolas
IPC分类号： C25D1/00 , C25D7/12 , C25D17/06 , C25D21/12
摘要： A device and method for electrochemical pattern replication, ECPR, is provided. The device comprises;a base;a bottom chuck on a X-Y-Theta stage;and a Z-stage with an attached top chuck, said chucks being configured to hold a master electrode or a substrate;a displacement monitor system for measuring displacement of the master electrode relative the substrate, wherein said displacement monitor system comprises a position sensor (22, 28) and a reference frame (21, 29 ), wherein the position sensor measures a distance to the reference frame. The method comprises the steps of measuring x-,y-,and theta values of the master electrode, when the master electrode and the substrate are separated and when the master electrode and the substrate are adjacent calculating a delta value, which is the difference in measured x-,y-,and theta values; comparing the delta value to a reference value;and adjusting the position of the master electrode in relation to the substrate to minimize the delta value. A device for providing electricity to the substrate is also provided. The device comprises a contact module for mounting on the chuck on all sides of the substrate so that electrical contact is possible along the whole perimeter of a substrate.

2. 发明申请

WO2012007527A2 METHODS AND SYSTEMS FOR DETECTING, SETTING, MONITORING, DETERMINING, STORING AND COMPENSATING THE SPATIAL SITUATION OF A MOBILE UNIT 审中-公开
标题翻译：用于检测，设定，监视，确定，存储和补偿移动单元的空间状况的方法和系统
公开(公告)号：WO2012007527A2
公开(公告)日：2012-01-19
申请号：PCT/EP2011/061997
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , CAVAZZA, Gilbert , SVENSSON, Stefan , UTTERBÄCK, Tomas , RAYNAUD, Nicolas , MÖLLER, Patrik , DETRY, Aurélien , CUNNINGHAM, Eric
发明人： CAVAZZA, Gilbert , SVENSSON, Stefan , UTTERBÄCK, Tomas , RAYNAUD, Nicolas , MÖLLER, Patrik , DETRY, Aurélien , CUNNINGHAM, Eric
CPC分类号： G05B19/19 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/70816
摘要： A method and system for setting the spatial situation of a mobile unit is provided. The mobile unit is moving with respect to a movement surface by means of at least one air pad (5, 6) and/or a motorized support structure, and the system (1A, 1B) comprises means (8, 9, 10) for setting an air feeding parameter of at least one such air pad (5, 6) or at least on position parameter for a motorized support structure, when the mobile unit (2) holds a position for which a spatial situation error is detected with respect to a predefined reference spatial situation.
摘要翻译：提供了用于设置移动单元的空间状况的方法和系统。所述移动单元借助于至少一个气垫（5,6）和/或机动支撑结构相对于移动表面移动，并且所述系统（1A，1B）包括用于所述移动单元的装置（8,9,10）当所述移动单元（2）保持相对于所述移动单元（2）检测到空间状况误差的位置时，为所述机动化支撑结构设定至少一个所述气垫（5,6）的空气馈送参数或至少一个位置参数预定义的参考空间情况。

3. 发明申请

WO2012007526A2 DEVICE, SYSTEM AND METHOD FOR USE IN MACHINES FOR ELECTROCHEMICAL PATTERN REPLICATION 审中-公开
标题翻译：用于电化学模式复制的设备，系统和方法
公开(公告)号：WO2012007526A2
公开(公告)日：2012-01-19
申请号：PCT/EP2011061996
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , MOELLER PATRIK , FREDENBERG MIKAEL , UTTERBAECK TOMAS , SVENSSON STEFAN , SANTOS ANTONIO , CHAUVET JEAN-MICHEL , ROSEN DANIEL , WIWEN-NILSSON PETER , LINDGREN LENNART , CAVAZZA GILBERT , RAYNAUD NICOLAS
发明人： MOELLER PATRIK , FREDENBERG MIKAEL , UTTERBAECK TOMAS , SVENSSON STEFAN , SANTOS ANTONIO , CHAUVET JEAN-MICHEL , ROSEN DANIEL , WIWEN-NILSSON PETER , LINDGREN LENNART , CAVAZZA GILBERT , RAYNAUD NICOLAS
IPC分类号： C25D1/00
CPC分类号： C25D1/00 , C25D5/02 , C25D7/123 , C25D17/001 , C25D17/005 , C25D17/008 , C25D17/06 , C25D17/12 , C25D21/12
摘要： A device for electrochemical pattern replication, ECPR, is provided. The device comprises; a base; a bottom chuck on a X-Y-Theta stage, said bottom chuck being configured to hold a master electrode or a substrate; and a Z-stage with an attached top chuck, said top chuck being configured to hold a master electrode when the bottom chuck is configured to hold a substrate or a substrate when the bottom chuck is configured to hold a master electrode; a displacement monitor system for measuring displacement of the master electrode relative the substrate, wherein said displacement monitor system comprises a position sensor and a reference frame, wherein the position sensor measures a distance to the reference frame. A method for electrochemical pattern replication method, ECPR, is also provided. The method comprises the steps of utilizing a master electrode and a substrate, said method comprising the steps of measuring x-, y-, and theta values of the master electrode, when the master electrode and the substrate are separated in a top position; measuring x-, y-, and theta values of the master electrode, when the master electrode and the substrate are adjacent in a bottom position; calculating a delta value, which is the difference in measured x-, y-, and theta values; comparing the delta value to a reference value; and adjusting the position of the master electrode in relation to the substrate to minimize the delta value. A device for providing electricity to a substrate arranged on a chuck during electrochemical pattern replication, ECPR, is also provided. The device comprises a contact module for mounting on the chuck on all sides of the substrate so that electrical contact is possible along the whole perimeter of a substrate.
摘要翻译：提供了一种用于电化学图案复制的装置，ECPR。该装置包括：一个基地所述底卡盘被配置为保持主电极或基板; 以及具有附接的顶部卡盘的Z形平台，当所述底部卡盘构造成保持主电极时，所述顶部卡盘被构造成当所述底部卡盘配置成保持基板或基板时保持主电极; 用于测量所述主电极相对于所述基板的位移的位移监测器系统，其中所述位移监测器系统包括位置传感器和参考框架，其中所述位置传感器测量到所述参考系的距离。还提供了电化学模式复制方法ECPR。该方法包括以下步骤：利用主电极和衬底，所述方法包括以下步骤：当主电极和衬底在顶部位置分离时，测量主电极的x-，y-和θ值; 当主电极和衬底在底部位置相邻时，测量主电极的x-，y-和θ值; 计算增量值，它是测量的x，y和θ值的差值; 将增量值与参考值进行比较; 并且调节主电极相对于衬底的位置以最小化Δ值。还提供了一种用于在电化学图案复制（ECPR）期间向布置在卡盘上的基板提供电力的装置。该装置包括用于在基板的所有侧面上安装在卡盘上的接触模块，使得沿着基板的整个周边的电接触是可能的。

4. 发明申请

WO2012007527A3 METHODS AND SYSTEMS FOR DETECTING, SETTING, MONITORING, DETERMINING, STORING AND COMPENSATING THE SPATIAL SITUATION OF A MOBILE UNIT 审中-公开
标题翻译：检测，设置，监测，确定，存储和补充移动单元的空间状况的方法和系统
公开(公告)号：WO2012007527A3
公开(公告)日：2012-05-18
申请号：PCT/EP2011061997
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , CAVAZZA GILBERT , SVENSSON STEFAN , UTTERBAECK TOMAS , RAYNAUD NICOLAS , MOELLER PATRIK , DETRY AURELIEN , CUNNINGHAM ERIC
发明人： CAVAZZA GILBERT , SVENSSON STEFAN , UTTERBAECK TOMAS , RAYNAUD NICOLAS , MOELLER PATRIK , DETRY AURELIEN , CUNNINGHAM ERIC
IPC分类号： G05B19/19 , G03F7/00
CPC分类号： G05B19/19 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/70816
摘要： A method and system for setting the spatial situation of a mobile unit is provided. The mobile unit is moving with respect to a movement surface by means of at least one air pad (5, 6) and/or a motorized support structure, and the system (1A, 1B) comprises means (8, 9, 10) for setting an air feeding parameter of at least one such air pad (5, 6) or at least on position parameter for a motorized support structure, when the mobile unit (2) holds a position for which a spatial situation error is detected with respect to a predefined reference spatial situation.
摘要翻译：提供了一种用于设置移动单元的空间情况的方法和系统。移动单元借助于至少一个气垫（5,6）和/或电动支撑结构相对于移动表面移动，并且系统（1A，1B）包括用于当所述移动单元（2）保持相对于所述机动支撑结构检测到空间情况错误的位置时，设置至少一个这样的气垫（5,6）或至少在电动支撑结构的位置参数上的空气供给参数预定义的参考空间情况。

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