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1. 发明授权

US6091339A Position detector for a spin-drying machine used in integrated circuit fabrication 失效
标题翻译：用于集成电路制造中的旋转干燥机的位置检测器
公开(公告)号：US6091339A
公开(公告)日：2000-07-18
申请号：US328057
申请日：1999-06-08
申请人： Ming-Te Chuang , Yu-Shan Lin , Kun-Feng Lin , Qing-Yong Chen
发明人： Ming-Te Chuang , Yu-Shan Lin , Kun-Feng Lin , Qing-Yong Chen
IPC分类号： H01L21/00 , G08B21/00
CPC分类号： H01L21/67259 , H01L21/67253
摘要： A position detector is provided for use on a spin-drying machine employed in integrated circuit (IC) fabrication to detect whether the spin-drying machine has shifted in position during operation. If the spin-drying machine is positioned incorrectly, the position detector is capable of stopping the operation of robot arms used to grab and position wafers on the spin-drying machine so that the robot arms will not be damaged or crash into the wafers on the spin-drying machine due to the incorrect positioning of the spin-drying machine. The position detector is designed for use on a spin-drying machine having a spinning unit, a fixed platform surrounding the spinning unit, and at least one robot arm mounted on the fixed unit. The position detector comprises a pair of emitters mounted on the spinning unit and a pair of oppositely arranged receivers on the fixed platform. In the event that the spinning unit has shifted in position, one or both of the paired emitter/receiver units generates an OFF signal indicative of such a condition. In response, a control unit stops the operation of the robot arm, so that the robot arm will not be damaged or crash into the wafers on the spin-drying machine.
摘要翻译：提供了一种用于集成电路（IC）制造中使用的旋转干燥机上的位置检测器，以检测在操作过程中脱水机是否已经移位。如果旋转干燥机定位不正确，则位置检测器能够停止用于在旋转干燥机上抓取和定位晶片的机器人手臂的操作，使机器人手臂不会损坏或碰撞在晶片上旋转干燥机由于脱水机定位不正确。位置检测器设计用于具有纺纱单元，围绕纺纱单元的固定平台以及安装在固定单元上的至少一个机器人臂的旋转干燥机。位置检测器包括安装在旋转单元上的一对发射器和固定平台上的一对相对布置的接收器。在旋转单元已经移位的情况下，成对的发射器/接收器单元中的一个或两个产生指示这种状态的OFF信号。作为响应，控制单元停止机器人手臂的操作，使得机器人臂不会被损坏或碰撞在旋转干燥机上的晶片中。

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