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1. 发明专利

JP2015092503A パッケージ化された半導体デバイスを試験するよう構成された高温セラミックソケット审中-公开
公开(公告)号：JP2015092503A
公开(公告)日：2015-05-14
申请号：JP2015001448
申请日：2015-01-07
申请人： QUALITAU INC
发明人： JOSE YSAGUIRRE , JENS ULLMANN , ADALBERTO M RAMIREZ , ROBERT J SYLVIA
IPC分类号： H01R33/76 , H01R43/00
摘要：【課題】集積回路を試験する際に用いる試験ソケットアッセンブリにおいて、ソケットが原因となる短絡の可能性を有す。【解決手段】一体成形ソケット46が、実質的に絶縁性材料から形成され、複数の導電性バネを受け入れるよう構成された複数の孔32を内部に形成される。一体成形ソケットの各孔32は、導電性バネの内の別個のバネ36を収容する。試験ソケットは、集積回路50のリード48を受け入れるよう構成された複数のピン10を備え、試験ソケットのピン10は、各ピン10がバネ36に接触する状態で一体成形ソケットの複数の孔32の中に延び、一体成形ソケットは、複数のバネ36がPCB40上の接点パッド34および複数のピン10と電気的に相互接続するように複数の孔32に整列され、PCB40上に配置される。一体成形ソケットは、実質的に、高温絶縁材料(セラミックなど)から形成される。【選択図】図3

2. 发明申请

US20170131326A1 PULSED CURRENT SOURCE WITH INTERNAL IMPEDANCE MATCHING 审中-公开
公开(公告)号：US20170131326A1
公开(公告)日：2017-05-11
申请号：US14937297
申请日：2015-11-10
申请人： QualiTau, Inc.
发明人： Jens ULLMANN
IPC分类号： G01R1/30 , G01R31/28
CPC分类号： G01R1/30 , G01R31/2841 , G01R31/2858 , G01R31/31924
摘要： Pulsed current circuitry for electromigration testing of semiconductor integrated circuits and components. The circuit includes a multiplexer that outputs analog voltage pulses, and is capable of generating both bipolar and unipolar voltage pulses. At least one operational amplifier and resistor receive the voltage pulses from the multiplexer and convert the voltage pulses to current pulses. A charge booster circuit is provided for minimizing overshoots and undershoots during transitions between current levels in the test circuit.

3. 发明申请

US20160187377A1 SEMI-AUTOMATIC PROBER 审中-公开
标题翻译：半自动探测器
公开(公告)号：US20160187377A1
公开(公告)日：2016-06-30
申请号：US14976810
申请日：2015-12-21
申请人： QualiTau, Inc.
发明人： Edward MCCLOUD , Jacob HERSCHMANN
IPC分类号： G01R1/04 , G01R1/067
摘要： A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.
摘要翻译：一种用于半导体晶片可靠性测试的晶圆探测台系统。晶圆探测台能够与用于半导体晶片测试的可互换模块进行接口。晶圆探测台可以与不同的可互换模块一起使用，用于晶片测试。例如，诸如探针卡定位器和风冷轨道系统的模块可以安装或对接到探测台。晶片探测台还设置有前装载机构，该前装载机构具有至少部分地从探针台室转出以用于晶片装载的可旋转臂。

4. 发明授权

US11175309B2 Semi-automatic prober 有权
公开(公告)号：US11175309B2
公开(公告)日：2021-11-16
申请号：US14976810
申请日：2015-12-21
申请人： QualiTau, Inc.
发明人： Edward McCloud , Jacob Herschmann
IPC分类号： G01R1/44 , G01R1/04 , G01R31/28 , G01R1/073 , G01R1/067
摘要： A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.

5. 发明申请

US20030003791A1 High-temperature minimal (zero) insertion force socket 有权
标题翻译：高温最小（零）插入力插座
公开(公告)号：US20030003791A1
公开(公告)日：2003-01-02
申请号：US10160318
申请日：2002-05-29
申请人： QualiTau, Inc.
发明人： Peter Cuevas
IPC分类号： H01R004/50
CPC分类号： H01R13/193 , H01R2201/20
摘要： A minimal insertion force socket for use in testing DIP integrated circuits having a plurality of leads extending therefrom, the socket plate having a plurality of holes arranged in two parallel rows for receiving the leads from the integrated circuit, and a plurality of wires anchored on the socket plate and arranged in two parallel partially interdigitated sets with each wire cooperating with a hole for engaging a lead of the integrated circuit. The working distance from a lead contact point on each wire to an anchor point on the interdigitated portion of each wire is increased relative to the working distance of aligned wires in the two parallel sets.
摘要翻译：一种用于测试具有从其延伸的多个引线的DIP集成电路的最小插入力插座，所述插座板具有布置成两个并行的多个孔，用于从集成电路接收引线，以及多个电线，插座板并布置在两个平行的部分交错组合中，每个线与用于接合集成电路的引线的孔配合。从每根导线上的引线接触点到每根线的叉指部分上的锚定点的工作距离相对于两个平行组中对准的线的工作距离增加。

6. 发明申请

US20030003790A1 ZIF Socket and actuator for DIP 有权
标题翻译： ZIF插座和执行器用于DIP
公开(公告)号：US20030003790A1
公开(公告)日：2003-01-02
申请号：US10160303
申请日：2002-05-29
申请人： QualiTau, Inc.
发明人： Peter Cuevas
IPC分类号： H01R011/22
CPC分类号： H01R13/193 , H01R2201/20
摘要： A socket for use in testing packaged integrated circuits having leads depending therefrom includes a first member for receiving the integrated package and having a plurality of first holes for receiving leads extending from the package. A second member has a plurality of wires for engaging the leads, each wire being anchored at ends to the second member with an intermediate portion engaging a lead. Each intermediate portion is aligned with a first hole and capable of being flexed out of alignment with the first hole for insertion of an integrated circuit package into the socket. The first member includes a second plurality of holes aligned with the wires of the second member, and an actuator has a plurality of pins arranged to extend into the second plurality of holes for engaging the plurality of wires and flexing the intermediate portions of the wires out of alignment with the first plurality of holes.
摘要翻译：一种用于测试具有从其引出的引线的封装集成电路的插座，包括用于接收集成封装并具有多个用于接收从封装延伸的引线的第一孔的第一构件。第二构件具有用于接合引线的多根电线，每根导线在与端子接合的中间部分处固定在第二构件的端部处。每个中间部分与第一孔对准，并且能够与第一孔对准地弯曲，以将集成电路封装插入插座中。第一构件包括与第二构件的线对准的第二多个孔，并且致动器具有布置成延伸到第二多个孔中的多个销，用于接合多根电线并使电线的中间部分弯曲出来与第一多个孔对准。

7. 发明申请

US20210396785A1 SEMI-AUTOMATIC PROBER 有权
公开(公告)号：US20210396785A1
公开(公告)日：2021-12-23
申请号：US17464307
申请日：2021-09-01
申请人： QualiTau, Inc.
发明人： Edward MCCLOUD , Jacob HERSCHMANN
IPC分类号： G01R1/04 , G01R31/28 , G01R1/073 , G01R1/067
摘要： A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.

8. 发明授权

US10890602B2 Universal probing assembly with five degrees of freedom 有权
公开(公告)号：US10890602B2
公开(公告)日：2021-01-12
申请号：US15847754
申请日：2017-12-19
申请人： QualiTau, Inc.
发明人： Mirtcha Lupashku , Remy Orans
IPC分类号： G01R1/067 , G01R31/26 , G01R31/28 , G01R1/073
摘要： A universal multi-pin, adjustable probing assembly or manipulator for use in parametric and reliability testing of devices on a semiconductor wafer. The probing assembly can be mounted and adjusted on a metal platen using a magnetic field. The strength of the magnetic field can be adjusted by a switchable magnetic slab to which a block is connected via an arm. A probe head can be attached to a side face of the block, which includes a tilt control mechanism for tilting the probe head to ensure that probe tips land simultaneously on pads of dies. The probe head also includes four adjusting mechanisms for translation in the X, Y, and Z directions, as well as rotation about the Z axis.

9. 发明授权

US10690715B2 Signal distribution apparatus 有权
公开(公告)号：US10690715B2
公开(公告)日：2020-06-23
申请号：US15969088
申请日：2018-05-02
申请人： QualiTau, Inc.
发明人： James Borthwick
IPC分类号： G01R31/26 , G01R1/36 , G01R31/28 , H03K17/687 , H03K17/693 , H03K17/785
摘要： A signal distribution apparatus for distributing a stress signal to a plurality of devices under test (DUTs) is disclosed. The distribution apparatus includes a single input that receives the stress voltage signal to be distributed, a plurality of outputs that distribute the stress voltage signal to the plurality of DUTs, and a plurality of integrated current limiter and switch circuits. Each integrated current limiter and switch circuit connects a DUT of the plurality of DUTs to the single input through one of the plurality of outputs, and includes at least one combined switching and current limiting element.

10. 发明申请

US20180172731A1 UNIVERSAL PROBING ASSEMBLY WITH FIVE DEGREES OF FREEDOM 审中-公开
公开(公告)号：US20180172731A1
公开(公告)日：2018-06-21
申请号：US15847754
申请日：2017-12-19
申请人： QualiTau, Inc.
发明人： Mirtcha LUPASHKU , Remy ORANS
IPC分类号： G01R1/067 , G01R31/26
CPC分类号： G01R1/06705 , G01R1/07307 , G01R31/2601 , G01R31/2865 , G01R31/2887
摘要： A universal multi-pin, adjustable probing assembly or manipulator for use in parametric and reliability testing of devices on a semiconductor wafer. The probing assembly can be mounted and adjusted on a metal platen using a magnetic field. The strength of the magnetic field can be adjusted by a switchable magnetic slab to which a block is connected via an arm. A probe head can be attached to a side face of the block, which includes a tilt control mechanism for tilting the probe head to ensure that probe tips land simultaneously on pads of dies. The probe head also includes four adjusting mechanisms for translation in the X, Y, and Z directions, as well as rotation about the Z axis.

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