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1. 发明授权

US07864006B2 MEMS plate switch and method of manufacture 有权
标题翻译： MEMS板式开关及其制造方法
公开(公告)号：US07864006B2
公开(公告)日：2011-01-04
申请号：US12068586
申请日：2008-02-08
申请人： John S. Foster , Paulo Silveira da Motta , Alok Paranjpye , Kimon Rybnicek
发明人： John S. Foster , Paulo Silveira da Motta , Alok Paranjpye , Kimon Rybnicek
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/18
摘要： Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
摘要翻译：用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并使用气密密封来连接两个衬底。可变形板可以具有柔性分流杆，其具有联接到可变形板的一端，而另一端联接到第二基板上的接触件。在启动开关时，可变形板将分流杆推动抵靠形成在第二基板中的第二触点，由此闭合开关。气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。

2. 发明申请

WO2009099669A2 MEMS PLATE SWITCH AND METHOD OF MANUFACTURE 审中-公开
标题翻译： MEMS板开关和制造方法
公开(公告)号：WO2009099669A2
公开(公告)日：2009-08-13
申请号：PCT/US2009000807
申请日：2009-02-09
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , PARANJPYE ALOK , RYBNICEK KIMON , MOTTA PAULO SILVEIRA DA
发明人： FOSTER JOHN S , PARANJPYE ALOK , RYBNICEK KIMON , MOTTA PAULO SILVEIRA DA
IPC分类号： H01H1/10
CPC分类号： H01H59/0009 , H01H1/18
摘要： Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
摘要翻译：用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并且使用气密密封来耦合这两个衬底。可变形板可以具有柔性分流棒，该柔性分流棒的一端联接到可变形板，并且另一端联接到第二基板上的触点。在激活开关时，可变形板推动分流棒抵靠形成在第二基板中的第二触点，从而闭合开关。气密密封可以是金/铟合金，通过加热镀金层上的铟层而形成。对静电MEMS开关的电接入可以通过在第二衬底的厚度上形成通孔来进行。

3. 发明申请

US20090085574A1 Method for locating phase to ground faults in DC distribution systems 有权
标题翻译：直流配电系统相位对地故障定位方法
公开(公告)号：US20090085574A1
公开(公告)日：2009-04-02
申请号：US12286240
申请日：2008-09-29
申请人： Yan Pan , Paulo Silveira , Michael Steurer , Thomas Baldwin , Paulo Ribeiro
发明人： Yan Pan , Paulo Silveira , Michael Steurer , Thomas Baldwin , Paulo Ribeiro
IPC分类号： G01R31/08
CPC分类号： G01R31/025 , G01R31/086 , G01R31/088 , H02H7/268
摘要： A method for locating phase to ground faults in DC distribution systems. The method includes utilizing wavelet analysis using Multi-Resolution Analysis (MRA) as a signal processing tool for recognition of characteristic features in the voltage signal. The voltage signal contains characteristic information in the high frequency range above the switching frequencies of the PE converters which allows for localization of the fault.
摘要翻译：一种在直流配电系统中定位相对地故障的方法。该方法包括使用多分辨率分析（MRA）的小波分析作为信号处理工具，用于识别电压信号中的特征。电压信号包含高于PE转换器开关频率的高频范围内的特性信息，允许故障定位。

4. 发明申请

US20070086781A1 BIDIRECTIONAL WAVELENGTH CROSS CONNECT ARCHITECTURES USING WAVELENGTH ROUTING ELEMENTS 有权
标题翻译：使用波长路由元素的双向波长交叉连接架构
公开(公告)号：US20070086781A1
公开(公告)日：2007-04-19
申请号：US11565133
申请日：2006-11-30
申请人： Edward Bortolini , Dirk Barthel , Robert Weverka , Samuel Weaver , Paulo Silveira
发明人： Edward Bortolini , Dirk Barthel , Robert Weverka , Samuel Weaver , Paulo Silveira
IPC分类号： H04J14/00
CPC分类号： G02B6/29383 , G02B6/29307 , G02B6/2931 , G02B6/29311 , G02B6/29313 , G02B6/29382 , G02B6/3512 , G02B6/356 , H04J14/0204 , H04J14/0206 , H04J14/021 , H04J14/0212 , H04J14/0213 , H04J14/0216 , H04J14/0217 , H04J14/0297 , H04Q11/0005 , H04Q2011/0016 , H04Q2011/0024 , H04Q2011/0035 , H04Q2011/0052 , H04Q2011/0075
摘要： Bidirectional wavelength cross connects include a plurality of ports, each configured to receive an input optical signals, each input optical signal having a plurality of spectral bands. At least one of the plurality of ports is disposed to simultaneously transmit an output optical signal having at least one of the spectral bands. A plurality of wavelength routing elements are configured to selectively route input optical signal spectral bands to output optical signals.
摘要翻译：双向波长交叉连接包括多个端口，每个端口被配置为接收输入光信号，每个输入光信号具有多个光谱带。多个端口中的至少一个设置成同时发送具有至少一个频谱带的输出光信号。多个波长路由元件被配置为选择性地路由输入光信号频谱带以输出光信号。

5. 发明申请

US20060098097A1 Iris image capture devices and associated systems 有权
标题翻译：虹膜图像捕获设备和相关系统
公开(公告)号：US20060098097A1
公开(公告)日：2006-05-11
申请号：US11225753
申请日：2005-09-13
申请人： Hans Wach , Ramkumar Narayanswamy , Paulo Silveira
发明人： Hans Wach , Ramkumar Narayanswamy , Paulo Silveira
IPC分类号： H04N5/225
CPC分类号： G02B27/0025 , G06K9/00604
摘要： An iris image capture device includes an optical arrangement that utilizes Wavefront Coding phase modifications to produce an optical image of a user iris and a detector for detecting the optical iris image and for converting the optical iris image into an electronic data signal. The iris image capture device also includes an image processor configured for processing the electronic data signal from the detector to reverse the Wavefront Coding phase modifications and to produce an electronic iris image of the user iris.
摘要翻译：虹膜图像捕获装置包括利用波前编码相位修改产生用户虹膜的光学图像的光学装置和用于检测光学虹膜图像并将光学虹膜图像转换成电子数据信号的检测器。虹膜图像捕获装置还包括图像处理器，其配置用于处理来自检测器的电子数据信号以反转波前编码相位修改并产生用户虹膜的电子虹膜图像。

6. 发明授权

US07785913B2 System and method for forming moveable features on a composite substrate 有权
标题翻译：用于在复合基底上形成可移动特征的系统和方法
公开(公告)号：US07785913B2
公开(公告)日：2010-08-31
申请号：US11359558
申请日：2006-02-23
申请人： John S. Foster , Paul J. Rubel , Kimon Rybnicek , Paulo Silveira da Motta
发明人： John S. Foster , Paul J. Rubel , Kimon Rybnicek , Paulo Silveira da Motta
IPC分类号： H01L21/00
CPC分类号： B81C1/00936 , B81C2201/0132
摘要： A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.
摘要翻译：描述了一种用于形成悬挂在衬底上的可移动特征的方法，其中首先使用通过一个或多个释放孔施加的液体蚀刻剂形成可移动特征之下的空腔。在形成空腔之后，使用干蚀刻工艺形成可移动特征的轮廓。由于可移动特征在使用干蚀刻工艺形成时可以自由移动，所以不使用本文所述的系统和方法产生静电问题。

7. 发明授权

US08067942B2 Method for locating phase to ground faults in DC distribution systems 有权
标题翻译：直流配电系统相位对地故障定位方法
公开(公告)号：US08067942B2
公开(公告)日：2011-11-29
申请号：US12286240
申请日：2008-09-29
申请人： Yan Pan , Paulo Silveira , Michael Steurer , Thomas Baldwin , Paulo Ribeiro
发明人： Yan Pan , Paulo Silveira , Michael Steurer , Thomas Baldwin , Paulo Ribeiro
IPC分类号： G01R31/14 , G01R31/08 , H02H9/08
CPC分类号： G01R31/025 , G01R31/086 , G01R31/088 , H02H7/268
摘要： A method for locating phase to ground faults in DC distribution systems. The method includes utilizing wavelet analysis using Multi-Resolution Analysis (MRA) as a signal processing tool for recognition of characteristic features in the voltage signal. The voltage signal contains characteristic information in the high frequency range above the switching frequencies of the PE converters which allows for localization of the fault.
摘要翻译：一种在直流配电系统中定位相对地故障的方法。该方法包括使用多分辨率分析（MRA）的小波分析作为信号处理工具，用于识别电压信号中的特征。电压信号包含高于PE转换器开关频率的高频范围内的特性信息，允许故障定位。

8. 发明申请

US20080277258A1 MEMS plate switch and method of manufacture 有权
标题翻译： MEMS板式开关及其制造方法
公开(公告)号：US20080277258A1
公开(公告)日：2008-11-13
申请号：US12068586
申请日：2008-02-08
申请人： John S. Foster , Alok Paranjpye , Kimon Rybnicek , Paulo Silveira da Motta
发明人： John S. Foster , Alok Paranjpye , Kimon Rybnicek , Paulo Silveira da Motta
IPC分类号： H01H1/10
CPC分类号： H01H59/0009 , H01H1/18
摘要： Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
摘要翻译：用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并使用气密密封来连接两个衬底。可变形板可以具有柔性分流杆，其具有联接到可变形板的一端，而另一端联接到第二基板上的接触件。在启动开关时，可变形板将分流杆推动抵靠形成在第二基板中的第二触点，由此闭合开关。气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。

9. 发明申请

WO2009099669A3 MEMS PLATE SWITCH AND METHOD OF MANUFACTURE 审中-公开
公开(公告)号：WO2009099669A3
公开(公告)日：2009-08-13
申请号：PCT/US2009/000807
申请日：2009-02-09
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER, John, S. , PARANJPYE, Alok , RYBNICEK, Kimon , MOTTA, Paulo, Silveira Da
发明人： FOSTER, John, S. , PARANJPYE, Alok , RYBNICEK, Kimon , MOTTA, Paulo, Silveira Da
IPC分类号： H01H1/00
摘要： Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

10. 发明申请

WO2008008314A1 SYSTEM AND METHOD FOR FORMING THROUGH WAFER VIAS USING REVERSE PULSE PLATING 审中-公开
标题翻译：通过使用反向脉冲镀层形成水晶六角形的系统和方法
公开(公告)号：WO2008008314A1
公开(公告)日：2008-01-17
申请号：PCT/US2007/015691
申请日：2007-07-10
申请人： INNOVATIVE MICRO TECHNOLOGY , RYBNICEK, Kimon , CARLSON, Gregory, A. , DA MOTTA, Paulo, Silveira , ZHAO, Jian
发明人： RYBNICEK, Kimon , CARLSON, Gregory, A. , DA MOTTA, Paulo, Silveira , ZHAO, Jian
IPC分类号： H01L21/44
CPC分类号： H01L21/76898 , B81B2203/0353 , B81C1/00087 , B81C2201/0181
摘要： A method for forming through wafer vias in a substrate uses a Cr/Au seed layer to plate the bottom of a blind trench formed in the front side of a substrate. Thereafter, a reverse plating process uses a forward current to plate the bottom and sides of the blind hole, and a reverse current to de-plate material in or near the top. Using the reverse pulse plating technique, the plating proceeds generally from the bottom of the blind hole to the top. To form the through wafer vias, the back side of the substrate is ground or etched away to remove material up to and including the dead-end wall of the blind hole.
摘要翻译：用于在衬底中形成晶片通孔的方法使用Cr / Au种子层来平坦化形成在衬底前侧的盲沟的底部。此后，反向电镀工艺使用正向电流来平板盲孔的底部和侧面，以及在顶部中或附近的去镀材料的反向电流。使用反向脉冲电镀技术，电镀通常从盲孔的底部到顶部。为了形成直通晶片通孔，将衬底的背面研磨或蚀刻掉以去除直到并包括盲孔的死端壁的材料。

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