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1. 发明授权

US07121139B2 Thermal mass flow rate sensor having fixed bypass ratio 有权
公开(公告)号：US07121139B2
公开(公告)日：2006-10-17
申请号：US10987718
申请日：2004-11-12
申请人： Ali Shajii , Paul Meneghini , Daniel Alexander Smith
发明人： Ali Shajii , Paul Meneghini , Daniel Alexander Smith
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F5/00
摘要： A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.

2. 发明申请

US20060207503A1 Vaporizer and method of vaporizing a liquid for thin film delivery 审中-公开
标题翻译：蒸发器和蒸发用于薄膜输送的液体的方法
公开(公告)号：US20060207503A1
公开(公告)日：2006-09-21
申请号：US11083586
申请日：2005-03-18
申请人： Paul Meneghini , Ali Shajii , Daniel Smith , William Clark
发明人： Paul Meneghini , Ali Shajii , Daniel Smith , William Clark
IPC分类号： C23C16/00
CPC分类号： C23C16/4485
摘要： A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve is opened. The means for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.
摘要翻译：一种蒸发器，包括用于液体的入口和用于气体的出口，气体阀控制气体流向蒸发器的出口，以及用于加热在液体入口和气体阀之间流动的液体的装置。蒸发器还包括用于增加在液体入口和气体阀之间流动的液体的传热速率并且用于引起液体中的压降的装置，使得液体的压力下降到液体的蒸汽过渡压力以下到达气阀。在等温条件下发生压降，仅当阀门打开时液体才能根据需要蒸发。用于增加传热速率和引起压降的方法可以是多孔介质的塞子。

3. 发明授权

US07107834B2 Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects 有权
公开(公告)号：US07107834B2
公开(公告)日：2006-09-19
申请号：US10988026
申请日：2004-11-12
申请人： Paul Meneghini , Ali Shajii
发明人： Paul Meneghini , Ali Shajii
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6847
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.

4. 发明申请

US20060101908A1 Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects 有权
标题翻译：包括旁路通道的热质量流量传感器和具有相似入口效应的传感器通道
公开(公告)号：US20060101908A1
公开(公告)日：2006-05-18
申请号：US10988026
申请日：2004-11-12
申请人： Paul Meneghini , Ali Shajii
发明人： Paul Meneghini , Ali Shajii
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6847
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.
摘要翻译：用于质量流量传感器中用于测量流体流速的感测装置包括用于容纳流体流的主管道和用于在第一位置从主管道分流一部分流体流的传感器通道，并且返回流体的一部分在第二位置处流到导管。可以以管的形式提供的至少一个旁通通道被定位在第一和第二位置之间的主管道中，并且旁路通道具有不可忽略的进入效应，其基本上等于入口效应传感器通道，使得设备的旁路比保持恒定。本公开的质量流量传感器精确地测量任何类型的气体，但仅需要在一个参考气体中进行校准。

5. 发明授权

US08790464B2 Control for and method of pulsed gas delivery 有权
标题翻译：脉冲气体输送的控制和方法
公开(公告)号：US08790464B2
公开(公告)日：2014-07-29
申请号：US12689961
申请日：2010-01-19
申请人： Paul Meneghini
发明人： Paul Meneghini
IPC分类号： C23C16/455 , C23C16/52 , F16K31/00 , F17D3/00
CPC分类号： C23C16/45544 , C23C16/45557 , C23C16/52 , G01F11/28 , Y10T137/0402 , Y10T137/86389
摘要： A mole delivery system and method provide pulses of known molar quantities as a function of the time duration of each pulse, which in turn is derived as a function of the ideal gas law. In one embodiment of the system, the system comprises: a chamber of known volume and controlled and known temperature; a pressure sensor to measure the pressure in the chamber; an outlet valve to a process tool; an inlet valve to charge the chamber with the delivery gas; and a control system configured and arranged so as to control the operation of the outlet valve, control the amount of each gas pulse by controlling the timing of the valve to the process tool.
摘要翻译：摩尔递送系统和方法提供已知摩尔量的脉冲作为每个脉冲的持续时间的函数，其又作为理想气体定律的函数导出。在该系统的一个实施例中，系统包括：具有已知体积和受控且已知温度的腔室; 用于测量腔室中的压力的压力传感器; 出口阀到加工工具; 入口阀，用于对所述室与所述输送气体进行充气; 以及控制系统，其配置和布置成控制出口阀的操作，通过控制阀到处理工具的时间来控制每个气体脉冲的量。

6. 发明申请

US20110174219A1 CONTROL FOR AND METHOD OF PULSED GAS DELIVERY 有权
标题翻译：脉冲气体输送的控制和方法
公开(公告)号：US20110174219A1
公开(公告)日：2011-07-21
申请号：US12689961
申请日：2010-01-19
申请人： Paul Meneghini
发明人： Paul Meneghini
IPC分类号： C23C16/52 , C23C16/00 , F16K31/00 , F17D3/00
CPC分类号： C23C16/45544 , C23C16/45557 , C23C16/52 , G01F11/28 , Y10T137/0402 , Y10T137/86389
摘要： A mole delivery system and method provide pulses of known molar quantities as a function of the time duration of each pulse, which in turn is derived as a function of the ideal gas law. In one embodiment of the system, the system comprises: a chamber of known volume and controlled and known temperature; a pressure sensor to measure the pressure in the chamber; an outlet valve to a process tool; an inlet valve to charge the chamber with the delivery gas; and a control system configured and arranged so as to control the operation of the outlet valve, control the amount of each gas pulse by controlling the timing of the valve to the process tool.
摘要翻译：摩尔递送系统和方法提供已知摩尔量的脉冲作为每个脉冲的持续时间的函数，其又作为理想气体定律的函数导出。在该系统的一个实施例中，系统包括：具有已知体积和受控且已知温度的腔室; 用于测量腔室中的压力的压力传感器; 出口阀到加工工具; 入口阀，用于对所述室与所述输送气体进行充气; 以及控制系统，其配置和布置成控制出口阀的操作，通过控制阀到处理工具的时间来控制每个气体脉冲的量。

7. 发明申请

US20060101907A1 Thermal mass flow rate sensor having fixed bypass ratio 有权
标题翻译：具有固定旁路比的热质量流量传感器
公开(公告)号：US20060101907A1
公开(公告)日：2006-05-18
申请号：US10987718
申请日：2004-11-12
申请人： Ali Shajii , Paul Meneghini , Daniel Smith
发明人： Ali Shajii , Paul Meneghini , Daniel Smith
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F5/00
摘要： A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.
摘要翻译：流量传感器包括主导管，传感器管和旁通管，其将主管道的上游部分连接到主管道的下游部分，使得通过主管道的流经传感器管和旁通管分开，以及用于加热传感器管的至少一个加热器元件。多孔介质的第一限流器位于主管道的上游部分和传感器管之间，并且多孔介质的第二限流器位于主管道的上游部分和旁路管之间。流量限制器为流量传感器提供固定旁路比，使得传感器可以独立于所测量气体的类型进行操作。

8. 发明授权

US07000463B1 Reynolds number correction function for mass flow rate sensor 有权
标题翻译：质量流量传感器的雷诺数校正功能
公开(公告)号：US07000463B1
公开(公告)日：2006-02-21
申请号：US10987719
申请日：2004-11-12
申请人： Ali Shajii , Paul Meneghini
发明人： Ali Shajii , Paul Meneghini
IPC分类号： G01F1/68
CPC分类号： G01F15/046 , G01F1/6847 , G01F1/6965 , G01F5/00
摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.
摘要翻译：基于所有旁路误差是雷诺数的函数的事实，质量流量传感器使用雷诺数校正功能来补偿所有气体的传感器的旁路比的误差。传感器包括传感器管和旁路管分流，其中传感器的旁路比等于通过传感器的总流量除以仅通过传感器管的流量。加热元件加热传感器管的上游部分和下游部分，并且电路连接到加热器元件，用于基于加热器元件之间的电阻差产生电压。基于参考气体的已知流速校准电压，并且通过传感器的流量基于校准电压乘以多气体校正功能和雷诺数校正功能。

9. 发明申请

US20060060139A1 Precursor gas delivery with carrier gas mixing 审中-公开
标题翻译：前体气体输送与载气混合
公开(公告)号：US20060060139A1
公开(公告)日：2006-03-23
申请号：US11223366
申请日：2005-09-09
申请人： Paul Meneghini , Daniel Smith , Ali Shajii
发明人： Paul Meneghini , Daniel Smith , Ali Shajii
IPC分类号： C23C16/00
CPC分类号： G05D11/133 , C23C16/4481 , C23C16/45512 , C23C16/52
摘要： A system and method are described that control the amount of precursor that is delivered to a process chamber by precisely measuring the mole fraction of the gas mixture being delivered. A gas delivery system includes a delivery chamber, a precursor inlet valve, a carrier inlet valve, an outlet valve, and a controller. The controller controls the opening and closing of the precursor inlet valve, the carrier inlet valve, and the outlet valve, so as to introduce a desired amount of a precursor gas and a carrier gas into the delivery chamber, to generate a gas mixture having a desired mole fraction of the precursor gas, and to deliver to the process chamber the gas mixture having the desired mole fraction of the precursor gas.
摘要翻译：描述了一种系统和方法，其通过精确测量正在输送的气体混合物的摩尔分数来控制被输送到处理室的前体的量。气体输送系统包括输送室，前体入口阀，载体入口阀，出口阀和控制器。控制器控制前体入口阀，载体入口阀和出口阀的打开和关闭，以便将期望量的前体气体和载气引入到输送室中，以产生具有前体气体的所需摩尔分数，并将具有所需前体气体摩尔分数的气体混合物输送到处理室。

10. 发明授权

US06918295B1 Thermal mass flow rate sensor providing increased rate of heat transfer to gas 有权
标题翻译：热质量流量传感器提供增加的气体传热速率
公开(公告)号：US06918295B1
公开(公告)日：2005-07-19
申请号：US10816412
申请日：2004-04-01
申请人： Ali Shajii , Paul Meneghini , Leonard Myatt
发明人： Ali Shajii , Paul Meneghini , Leonard Myatt
IPC分类号： G01F1/68 , G01F1/684 , G01F5/00
CPC分类号： G01F1/6847 , G01F5/00
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a capillary tube for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. The capillary tube is disposed about a centerline, and includes an inner wall defined by an inside radius measured from the centerline. The inside radius varies periodically, preferably sinusoidally, along the centerline for at least a portion of the capillary tube, thereby forming a turbulated surface on the inner wall. The turbulated inner wall increases wall surface area, and fluid mixing. The resulting increased heat transfer rate decreases the error in sensor output from nonlinear behavior.
摘要翻译：用于质量流量传感器中用于测量流体流速的感测装置包括用于容纳流体流的主管道和用于在第一位置从主管道分流一部分流体流的毛细管，并且返回流体的一部分在第二位置处流到导管。毛细管围绕中心线布置，并且包括由从中心线测量的内部半径限定的内壁。内半径沿着毛细管的至少一部分的中心线周期性改变，优选正弦变化，从而在内壁上形成一个浑浊的表面。混浊的内壁增加了墙面积和流体混合。所产生的增加的传热速率降低了非线性行为的传感器输出误差。

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