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    • 3. 发明授权
    • Low-capacity vertical diode
    • 低容量立式二极管
    • US06924546B2
    • 2005-08-02
    • US10489153
    • 2002-09-10
    • Emmanuel CollardPatrick Poveda
    • Emmanuel CollardPatrick Poveda
    • H01L29/861H01L29/868H01L31/105
    • H01L29/868H01L29/8613
    • The invention concerns a low-capacity vertical diode designed to be mounted by a front surface made in a semiconductor substrate (1), comprising a first zone projecting relative to the surface of the substrate including at least a semiconductor layer (3) doped with a type of conductivity opposite to that of the substrate, the upper surface of the semiconductor layer bearing a first solder bump (23). The diode comprises a second zone including on the substrate a thick strip conductor (16) bearing at least second solder bumps (24), said first and second solder bumps defining a plane parallel to the substrate plane.
    • 本发明涉及一种设计成由半导体衬底(1)制成的前表面安装的低容量垂直二极管,包括相对于衬底的表面突出的第一区域,该第一区域包括至少掺杂有半导体衬底的半导体层(3) 类型的导电性与衬底的导电性相反,半导体层的上表面具有第一焊料凸点(23)。 所述二极管包括第二区域,所述第二区域在所述衬底上具有承载至少第二焊料凸块(24)的厚条状导体(16),所述第一和第二焊料凸块限定平行于所述衬底平面的平面。
    • 10. 发明授权
    • Forming of close thin trenches
    • 形成紧密的薄沟槽
    • US06972240B2
    • 2005-12-06
    • US10717286
    • 2003-11-19
    • Patrick Poveda
    • Patrick Poveda
    • H01L21/308H01L21/334H01L21/762H01L21/76
    • H01L29/66181H01L21/3086H01L21/3088H01L21/76229
    • A method for forming narrow trenches in a silicon substrate, comprising the steps of: etching the substrate to form first trenches separated by first silicon ribs; performing a thermal oxidation of the substrate to form a silicon oxide layer around the substrate, to obtain second trenches and second silicon ribs; filling the second trenches with fingers of an etchable material; etching the oxide down to the upper surface of the second ribs while keeping oxide portions between said material fingers and the second ribs; etching away the second silicon ribs and said material fingers; etching the oxide to expose the substrate at the bottom of the oxide portions, while keeping oxide fingers; and etching the substrate between the oxide fingers to form narrow trenches in the substrate.
    • 一种用于在硅衬底中形成窄沟槽的方法,包括以下步骤:蚀刻衬底以形成由第一硅肋分隔开的第一沟槽; 进行基板的热氧化以在基板周围形成氧化硅层,以获得第二沟槽和第二硅肋; 用可蚀刻材料的手指填充第二沟槽; 将氧化物蚀刻到第二肋的上表面,同时保持所述材料指和第二肋之间的氧化物部分; 蚀刻掉第二硅肋和所述材料指; 蚀刻氧化物以在氧化物部分的底部露出衬底,同时保持氧化物指; 并蚀刻氧化物指状物之间的衬底以在衬底中形成窄沟槽。