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1. 发明申请

US20130298987A1 METHOD FOR MANUFACTURING A MULTILAYER OF A TRANSPARENT CONDUCTIVE OXIDE 审中-公开
标题翻译：用于制造透明导电氧化物的多层的方法
公开(公告)号：US20130298987A1
公开(公告)日：2013-11-14
申请号：US13979794
申请日：2012-01-13
申请人： Paolo Losio , Onur Caglar , Peter Rechtsteiner , Perrine Carroy , Holger Christ
发明人： Paolo Losio , Onur Caglar , Peter Rechtsteiner , Perrine Carroy , Holger Christ
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/022483 , H01L31/076 , H01L31/1884 , Y02E10/548
摘要： A multi-part transparent conductive zinc oxide layer for a photoelectric conversion device, and a method of producing same. The transparent conductive zinc oxide layer includes at least one basic layer sequence with a varying boron dopant concentration. The basic layer sequence includes a thinner transparent conductive zinc oxide higher-boron-doped layer and a thicker transparent conductive zinc oxide lower-boron-doped layer. The doping density through each individual conductive zinc oxide layer is substantially constant, which is achieved by intentionally doping the thicker transparent conductive zinc oxide lower-boron-doped layer. Optionally, an interlayer may be present between the at least one basic layer sequence and the substrate or an n-doped silicon layer upon which it is disposed. This advantageously permits efficient Edge Isolation by Laser EIL ablation of the transparent conductive zinc oxide layers while maintaining good electrical and optical properties in said layers.
摘要翻译：一种用于光电转换装置的多部分透明导电氧化锌层及其制造方法。透明导电氧化锌层包括具有不同硼掺杂剂浓度的至少一个碱性层序列。基本层序列包括较薄的透明导电氧化锌高硼掺杂层和较厚的透明导电氧化锌低硼掺杂层。通过每个单独的导电氧化锌层的掺杂密度基本上是恒定的，其通过有意掺杂较厚的透明导电氧化锌低硼掺杂层来实现。任选地，中间层可以存在于至少一个碱性层序列和衬底之间或其上配置的n掺杂硅层之间。这有利地允许通过激光EIL消除透明导电氧化锌层的有效边缘隔离，同时在所述层中保持良好的电学和光学性质。

2. 发明申请

WO2012028691A1 METHOD OF COATING A SUBSTRATE FOR MANUFACTURING A SOLAR CELL 审中-公开
标题翻译：涂覆用于制造太阳能电池的基板的方法
公开(公告)号：WO2012028691A1
公开(公告)日：2012-03-08
申请号：PCT/EP2011/065134
申请日：2011-09-01
申请人： OERLIKON SOLAR AG, TRÜBBACH , KLUTH, Oliver , CAGLAR, Onur , PAOLO, Losio , GOLDBACH-ASCHEMANN, Stephanie
发明人： KLUTH, Oliver , CAGLAR, Onur , PAOLO, Losio , GOLDBACH-ASCHEMANN, Stephanie
IPC分类号： C23C16/18 , C23C16/40 , C23C16/54 , C23C16/455 , H01L31/0224 , H01L31/0236
CPC分类号： H01L31/1884 , C23C16/407 , C23C16/45523 , C23C16/54 , H01L31/022425 , H01L31/022483 , H01L31/02366 , Y02E10/50
摘要： The invention relates to a method of coating a substrate (41) for manufacturing a solar cell (40) in a deposition environment, the method comprising the steps of: a) Depositing a first zinc oxide layer onto a substrate (41), b) Reducing a zinc precursor content in the deposition environment, c) Treating the first zinc oxide layer with a mixture of diborane and water to form a plurality of coating seeds on the surface of the first zinc oxide layer, and d) Depositing a second zinc oxide layer onto the first zinc oxide layer. The method according to the invention allows improving the material quality of silicon layers which may later be grown on such a substrate. Additionally, the light scattering and subsequent light trapping in a respective solar cell may be enhanced by a method according to the invention. The present invention further relates to a solar cell being manufactured according to the invention.
摘要翻译：本发明涉及在沉积环境中涂覆用于制造太阳能电池（40）的衬底（41）的方法，所述方法包括以下步骤：a）将第一氧化锌层沉积到衬底（41）上，b）在沉积环境中还原锌前驱物含量，c）用乙硼烷和水的混合物处理第一氧化锌层，以在第一氧化锌层的表面上形成多个涂覆种子，以及d）沉积第二氧化锌层到第一氧化锌层上。根据本发明的方法允许改善随后在这种基底上生长的硅层的材料质量。此外，可以通过根据本发明的方法来增强各个太阳能电池中的光散射和随后的光捕获。本发明还涉及根据本发明制造的太阳能电池。

3. 发明授权

US08778464B2 Method of removing contamination from a reactor 失效
标题翻译：去除反应堆污染的方法
公开(公告)号：US08778464B2
公开(公告)日：2014-07-15
申请号：US12917588
申请日：2010-11-02
申请人： Paolo Losio , Oliver Kluth , Jiri Kalas
发明人： Paolo Losio , Oliver Kluth , Jiri Kalas
IPC分类号： H05H1/24
CPC分类号： C23C14/564 , B08B7/0035 , C23C16/4405
摘要： The present invention provides a method for removing metal and/or metal oxide contamination from the interior of a vacuum coating reactor, the method comprising the steps of: a) performing an idle coating step by depositing a coating layer, wherein the coating layer comprises silicon; b) at least partly removing the deposited coating layer. The method according to the invention is particularly suitable for cleaning reactors in the context of solar cell manufacturing. The method is time saving and cost saving.
摘要翻译：本发明提供一种从真空涂覆反应器内部除去金属和/或金属氧化物污染物的方法，该方法包括以下步骤：a）通过沉积涂层进行怠速涂覆步骤，其中涂层包含硅 ; b）至少部分地去除沉积的涂层。根据本发明的方法特别适用于在太阳能电池制造的背景下的清洗反应器。该方法节省时间，节省成本。

4. 发明申请

US20110104399A1 METHOD OF REMOVING CONTAMINATION FROM A REACTOR 失效
标题翻译：从反应器中去除污染的方法
公开(公告)号：US20110104399A1
公开(公告)日：2011-05-05
申请号：US12917588
申请日：2010-11-02
申请人： Paolo Losio , Oliver Kluth , Jiri Kalas
发明人： Paolo Losio , Oliver Kluth , Jiri Kalas
IPC分类号： C23C16/50 , B08B9/00
CPC分类号： C23C14/564 , B08B7/0035 , C23C16/4405
摘要： The present invention provides a method for removing metal and/or metal oxide contamination from the interior of a vacuum coating reactor, the method comprising the steps of: a) performing an idle coating step by depositing a coating layer, wherein the coating layer comprises silicon; b) at least partly removing the deposited coating layer. The method according to the invention is particularly suitable for cleaning reactors in the context of solar cell manufacturing. The method is time saving and cost saving.
摘要翻译：本发明提供一种从真空涂覆反应器内部除去金属和/或金属氧化物污染物的方法，该方法包括以下步骤：a）通过沉积涂层进行怠速涂覆步骤，其中涂层包含硅 ; b）至少部分地去除沉积的涂层。根据本发明的方法特别适用于在太阳能电池制造的背景下的清洗反应器。该方法节省时间，节省成本。

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