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1. 发明授权

US07261430B1 Thermal and intrinsic stress compensated micromirror apparatus and method 有权
标题翻译：热和内应力补偿微镜装置和方法
公开(公告)号：US07261430B1
公开(公告)日：2007-08-28
申请号：US11360165
申请日：2006-02-22
申请人： Jeffrey F. DeNatale , Philip A. Stupar , Chialun Tsai , Robert L. Borwick, III
发明人： Jeffrey F. DeNatale , Philip A. Stupar , Chialun Tsai , Robert L. Borwick, III
IPC分类号： G02B7/182 , G02B5/132 , G02B26/00
CPC分类号： G02B7/181 , G02B26/0841
摘要： A micromirror apparatus includes a device layer having a recess, a multilayer thin-film dielectric reflector coupled to and structurally supported by the device layer on the opposite side of the device layer from said recess, and a stress compensator seated in the recess, with the stress compensator operable to resist device layer bending moments resulting from intrinsic and thermal mismatch stresses between the multilayer thin-film dielectric reflector and the device layer.
摘要翻译：微镜装置包括具有凹部的器件层，耦合到器件层并在结构上由器件层与所述凹部相反的结构上支撑的多层薄膜电介质反射器和位于凹部中的应力补偿器，应力补偿器可操作以抵抗由多层薄膜电介质反射器和器件层之间的固有和热失配应力引起的器件层弯曲力矩。

2. 发明授权

US06771081B2 Liquid-medium immersed MEMs devices 有权
公开(公告)号：US06771081B2
公开(公告)日：2004-08-03
申请号：US10227141
申请日：2002-08-22
申请人： Robert L. Borwick, III , Philip A. Stupar , Jeffrey F. DeNatale
发明人： Robert L. Borwick, III , Philip A. Stupar , Jeffrey F. DeNatale
IPC分类号： G01R2726
CPC分类号： H01G5/0132
摘要： Micro-electromechanical (MEM) devices having their fixed and movable members immersed in a liquid medium. Movement is effected by applying a stimulus which creates a force that causes the movable member to move with respect to the fixed member. The movable and fixed members are immersed in a liquid medium having desired characteristics. The liquid is preferably selected to have a viscosity which critically damps the motion of the movable member. The liquid may also be chosen to provide a dielectric constant greater than one, which, where applicable, increases the electrostatic force created for a given drive voltage, and the device's capacitance sensing range, over what they would be in air. The liquid medium might also be used to improve the device's thermal dissipation characteristics, or to provide improved isolation between structures.

3. 发明授权

US08826514B2 Microfabricated inductors with through-wafer vias 有权
标题翻译：带晶圆通孔的微型电感器
公开(公告)号：US08826514B2
公开(公告)日：2014-09-09
申请号：US13027150
申请日：2011-02-14
申请人： Alexandros Papavasiliou , Jeffrey F. DeNatale , Philip A. Stupar , Robert L. Borwick, III
发明人： Alexandros Papavasiliou , Jeffrey F. DeNatale , Philip A. Stupar , Robert L. Borwick, III
IPC分类号： H01F41/04 , H01F41/10 , H01F17/00
CPC分类号： H01F17/03 , H01F17/0013 , H01F2017/0086 , Y10T29/4902 , Y10T29/49073 , Y10T29/49165
摘要： Microfabricated inductors with through-wafer vias and including a first wafer and a second wafer, each wafer having a plurality of metal fillings therein, and a plurality of metal conductors connecting the plurality of metal fillings together to form a spiral. A method for producing an inductor including steps of forming a first plurality of vias in a first substrate, filling the first plurality of vias in the first substrate with a first plurality of metal fillings, forming a first plurality of metal conductors, connecting pairs of the first plurality of metal fillings together using the first plurality of metal conductors to form a spiral, performing the foregoing steps similarly on a second substrate formed with a second plurality of vias filled with a second plurality of metal fillings, and bonding the first substrate with the second substrate.
摘要翻译：具有贯通晶片通孔并且包括第一晶片和第二晶片的微型电感器，每个晶片在其中具有多个金属填充物，以及将多个金属填料连接在一起以形成螺旋的多个金属导体。一种用于制造电感器的方法，包括以下步骤：在第一衬底中形成第一多个通孔，用第一多个金属填充物填充第一衬底中的第一多个通孔，形成第一多个金属导体，第一多个金属填充物一起使用第一多个金属导体形成螺旋，类似地在形成有填充有第二多个金属填充物的第二多个通孔的第二基板上执行上述步骤，以及将第一基板与第二基板。

4. 发明申请

US20120286884A1 Micro-scale System to Provide Thermal Isolation and Electrical Communication Between Substrates 有权
标题翻译：微尺度系统提供基板之间的热隔离和电气通信
公开(公告)号：US20120286884A1
公开(公告)日：2012-11-15
申请号：US13105735
申请日：2011-05-11
申请人： Jeffrey F. DeNatale , Philip A. Stupar , Yu-Hua Lin , Robert L. Borwick , Alexandros P. Papavasiliou
发明人： Jeffrey F. DeNatale , Philip A. Stupar , Yu-Hua Lin , Robert L. Borwick , Alexandros P. Papavasiliou
IPC分类号： H01S1/02 , B05D5/00 , B05D3/10 , H05K1/14 , B32B3/12 , B32B15/08 , B32B3/10 , C23F1/00 , B32B3/30
CPC分类号： H01S1/06 , B05D3/10 , B05D5/00 , B32B3/10 , B32B3/12 , B32B3/30 , B32B15/08 , B81B3/0081 , B81B7/0006 , C23F1/00 , G04F5/14 , H01S1/02 , H05K1/14 , Y10T428/24149 , Y10T428/24331 , Y10T428/24521 , Y10T428/24545
摘要： A microscale apparatus includes a microscale rigidized Parylene strap having a reinforcement structure extending from a first side of the strap, a first silicon substrate suspended by the microscale rigidized Parylene strap, the microscale rigidized Parylene strap conformally coupled to the first substrate, and a second substrate conformally coupled to the microscale rigidized Parylene strap to suspend the first silicon substrate through the microscale rigidized Parylene strap.
摘要翻译：微型设备包括具有从带的第一侧延伸的增强结构的微尺寸刚性聚对二甲苯带，通过微尺寸刚性聚对二甲苯带悬挂的第一硅衬底，与第一衬底共形耦合的微尺寸刚性聚对二甲苯带和第二衬底保形地耦合到微尺寸刚性聚对二甲苯带，以悬浮第一硅衬底通过微尺寸刚性聚对二甲苯带。

5. 发明申请

US20110232782A1 SYSTEM FOR CHARGING A VAPOR CELL 有权
标题翻译：充气电池系统
公开(公告)号：US20110232782A1
公开(公告)日：2011-09-29
申请号：US12645207
申请日：2009-12-22
申请人： Robert L. Borwick, III , Alan L. Sailer , Jeffrey F. DaNatale , Philip A. Stupar , Chialun Tsai
发明人： Robert L. Borwick, III , Alan L. Sailer , Jeffrey F. DaNatale , Philip A. Stupar , Chialun Tsai
IPC分类号： F17D3/00 , B32B38/08
CPC分类号： G04F5/145 , Y10T137/8158
摘要： A system is disclosed for charging a compact vapor cell, including placing an alkali-filled capillary into a reservoir cell formed in a substrate, the reservoir cell in vapor communication with an interrogation cell in the substrate and bonding a transparent window to the substrate on a common face of the reservoir cell and the interrogation cell to form a compact vapor cell. Capillary action in the capillary delays migration of alkali in the alkali-filled capillary from the reservoir cell into the interrogation cell during the bonding.
摘要翻译：公开了一种用于对小型蒸汽池进行充电的系统，包括将填充碱的毛细管放置在形成在基底中的储存池中，储存池与衬底中的询问单元蒸汽连通，并将透明窗口与储层单元和询问单元的共同面以形成紧凑的蒸汽池。毛细管作用在毛细管中延长了粘结期间碱性填充毛细管中的碱从储层细胞迁移到询问单元中。

6. 发明申请

US20100207229A1 NON-PLANAR MICROCIRCUIT STRUCTURE AND METHOD OF FABRICATING SAME 有权
标题翻译：非平面微型结构及其制造方法
公开(公告)号：US20100207229A1
公开(公告)日：2010-08-19
申请号：US12372982
申请日：2009-02-18
申请人： Jeffrey F. DeNatale , Philip A. Stupar , Robert L. Borwick, III
发明人： Jeffrey F. DeNatale , Philip A. Stupar , Robert L. Borwick, III
IPC分类号： H01L29/00 , H05K1/03 , H01L21/00 , H01L21/4763
CPC分类号： H01L23/13 , H01L21/768 , H01L23/5387 , H01L24/63 , H01L27/14601 , H01L27/14625 , H01L27/14643 , H01L27/14683 , H01L27/14685 , H01L29/0657 , H01L2924/14
摘要： A foldable microcircuit is initially a planar semiconductor wafer on which circuitry has been formed. The wafer is segmented into a plurality of tiles, and a plurality of hinge mechanisms are coupled between adjacent pairs of tiles such that the segmented wafer can be folded into a desired non-planar configuration having a high fill-factor and small gaps between tiles. The hinge mechanisms can comprise an organic material deposited on the wafer such that it provides mechanical coupling between adjacent tiles, with metal interconnections between tiles formed directly over the organic hinges, or routed between adjacent tiles via compliant bridges. Alternatively, the interconnection traces between tiles can serve as part or all of a hinge mechanism. The foldable microcircuit can be, for example, a CMOS circuit, with the segmented tiles folded to form, for example, a semi-spherical structure arranged to provide a wide FOV photodetector array.
摘要翻译：可折叠微电路最初是其上形成有电路的平面半导体晶片。晶片被分割成多个瓦片，并且多个铰链机构联接在相邻的瓦片对之间，使得分割的晶片可以折叠成具有高填充因子和瓦片之间的小间隙的期望的非平面构造。铰链机构可以包括沉积在晶片上的有机材料，使得它提供相邻瓦片之间的机械耦合，并且在有机铰链之间直接形成的瓦片之间的金属互连，或者通过柔性桥接件在相邻瓦片之间布线。或者，瓦片之间的互连迹线可以用作铰链机构的一部分或全部。可折叠微电路可以是例如CMOS电路，其中分段瓦片被折叠以形成例如布置成提供宽FOV光电检测器阵列的半球形结构。

7. 发明申请

US20100095739A1 METHOD FOR ADJUSTING RESONANCE FREQUENCIES OF A VIBRATING MICROELECTROMECHANICAL DEVICE 有权
标题翻译：振动微电子设备谐振频率的调节方法
公开(公告)号：US20100095739A1
公开(公告)日：2010-04-22
申请号：US12255576
申请日：2008-10-21
申请人： Jeffrey F. DeNatale , Philip A. Stupar
发明人： Jeffrey F. DeNatale , Philip A. Stupar
IPC分类号： G01P21/00 , G01C19/56
CPC分类号： G01C19/56 , Y10T29/42
摘要： The present invention relates to a method for adjusting the resonant frequencies of a vibrating microelectromechanical (MEMS) device. In one embodiment, the present invention is a method for adjusting the resonant frequencies of a vibrating mass including the steps of patterning a surface of a device layer of the vibrating mass with a mask, etching the vibrating mass to define a structure of the vibrating mass, determining a first set of resonant frequencies of the vibrating mass, determining a mass removal amount of the vibrating mass and a mass removal location of the vibrating mass to obtain a second set of resonant frequencies of the vibrating mass, removing the mask at the mass removal location, and etching the vibrating mass to remove the mass removal amount of the vibrating mass at the mass removal location of the vibrating mass.
摘要翻译：本发明涉及一种用于调节振动微机电（MEMS）装置的谐振频率的方法。在一个实施例中，本发明是一种用于调节振动块的谐振频率的方法，包括以下步骤：用掩模对振动块的器件层的表面进行构图，蚀刻振动块以限定振动块的结构确定振动块的第一组谐振频率，确定振动块的质量去除量和振动块的质量去除位置，以获得振动块的第二组谐振频率，去除质量上的掩模去除位置，并且蚀刻振动块以去除振动块的质量去除位置处的振动块的质量去除量。

8. 发明授权

US07619485B2 Compact optical assembly for chip-scale atomic clock 有权
标题翻译：用于芯片级原子钟的紧凑型光学组件
公开(公告)号：US07619485B2
公开(公告)日：2009-11-17
申请号：US11669251
申请日：2007-01-31
申请人： Jeffrey Frank DeNatale , Robert Ladd Borwick, III , Philip A. Stupar , Chialun Tsai
发明人： Jeffrey Frank DeNatale , Robert Ladd Borwick, III , Philip A. Stupar , Chialun Tsai
IPC分类号： H03L7/26 , H01S1/06
CPC分类号： G02B27/0961 , G04F5/14 , Y10T29/49826
摘要： Provided is a chip-scale atomic clock having a folded optic configuration or physics package. In particular, the physics package includes a vapor cell for containing gaseous alkali atoms and a VCSEL for generating a laser light One or more heating elements are positioned to simultaneously heat both the vapor cell and VCSEL to the required operating temperature. A micro-lens element, positioned between the VCSEL and a reflector, is used to first expand the beam of light, and then to subsequently collimate the light after it is once reflected. Collimated, reflected light passes through the vapor cell wherein the alkali atoms are excited and a percentage of the reflected light is absorbed. A detector, located opposite the reflector and micro-lens array, detects light passing through the cell. An error signal is generated and the output voltage of a local voltage oscillator is successively stabilized.
摘要翻译：提供了具有折叠光学配置或物理封装的芯片级原子钟。特别地，物理包装包括用于容纳气态碱性原子的蒸汽池和用于产生激光的VCSEL。一个或多个加热元件被定位成同时将蒸汽单元和VCSEL两者加热到所需的工作温度。位于VCSEL和反射器之间的微透镜元件用于首先使光束膨胀，然后在稍后反射之后对光进行准直。准直的反射光通过蒸汽池，其中碱性原子被激发并且反射光的百分比被吸收。与反射镜和微透镜阵列相对的检测器检测通过电池的光。产生误差信号，本地电压振荡器的输出电压相继稳定。

9. 发明申请

US20090095077A1 DISC RESONATOR GYROSCOPE WITH IMPROVED FREQUENCY COINCIDENCE AND METHOD OF MANUFACTURE 有权
标题翻译：具有改进的频率合并的DISC共振器陀螺仪和制造方法
公开(公告)号：US20090095077A1
公开(公告)日：2009-04-16
申请号：US11871502
申请日：2007-10-12
申请人： Jeffrey F. DeNatale , Philip A. Stupar
发明人： Jeffrey F. DeNatale , Philip A. Stupar
IPC分类号： G01C19/56 , G01R3/00
CPC分类号： G01C19/5684 , Y10T29/49002 , Y10T29/49007
摘要： A disc resonator gyroscope (DRG) and method of manufacture. The DRG has a surrounding pattern of bond metal having a symmetry related to the symmetry of a resonator device wafer that enables more even dissipation of heat from a resonator device wafer of the DRG during an etching operation. The metal bond frame eliminates or substantially reduces the thermal asymmetry that the resonator device wafer normally experiences when a conventional, square bond frame is used, which in turn can cause geometric asymmetry in the widths of the beams that are etched into the resonator device wafer of the DRG.
摘要翻译：盘式谐振陀螺仪（DRG）及其制造方法。 DRG具有与谐振器器件晶片的对称性相关的对称性的键合金属的周围图案，其在蚀刻操作期间能够更均匀地散发来自DRG的谐振器器件晶片的热量。当使用传统的方形键合框架时，金属结合框架消除或显着降低了谐振器装置晶片通常经历的热不对称性，这反过来可能导致蚀刻到谐振器装置晶片中的光束的宽度的几何不对称 DRG。

10. 发明授权

US07328604B2 Microelectromechanical (MEM) fluid health sensing device and fabrication method 有权
标题翻译：微机电（MEM）液体健康感测装置及制造方法
公开(公告)号：US07328604B2
公开(公告)日：2008-02-12
申请号：US11234015
申请日：2005-09-22
申请人： Jeffrey F. DeNatale , Robert L. Borwick, III , Philip A. Stupar , Martin W. Kendig
发明人： Jeffrey F. DeNatale , Robert L. Borwick, III , Philip A. Stupar , Martin W. Kendig
IPC分类号： G01N11/00
CPC分类号： G01N33/2888 , G01N11/16
摘要： A microelectromechanical (MEM) fluid health sensing device comprises a viscosity sensor which provides an output that varies with the viscosity of a fluid in which it is immersed, and at least one other sensor which provides an output that varies with another predetermined parameter of the fluid. The viscosity sensor is preferably a MEM device fabricated by means of a “deep etch” process. The sensors are preferably integrated together on a common substrate, though they might also be fabricated separately and packaged together to form a hybrid device. A data processing means may be included which receives the sensor outputs and provides one or more outputs indicative of the health of the fluid. Sensor types which may be part of the present device include, for example, a temperature sensor, a MEM electrochemical sensor, a MEM accelerometer, a MEM contact switch lubricity sensor, and/or an inductive metallic wear sensor.
摘要翻译：微机电（MEM）流体健康感测装置包括粘度传感器，该粘度传感器提供随着浸入其中的流体的粘度而变化的输出，以及提供随流体的另一预定参数而变化的输出的至少一个其它传感器。粘度传感器优选是通过“深蚀刻”工艺制造的MEM器件。传感器优选地集成在公共基板上，尽管它们也可以单独制造并且封装在一起以形成混合装置。可以包括接收传感器输出并提供指示流体健康的一个或多个输出的数据处理装置。可以是本装置的一部分的传感器类型包括例如温度传感器，MEM电化学传感器，MEM加速度计，MEM接触开关润滑性传感器和/或感应金属磨损传感器。

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