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1. 发明申请

WO2008085779A1 METHODS AND SYSTEMS FOR WAFER LEVEL PACKAGING OF MEMS STRUCTURES 审中-公开
标题翻译： MEMS结构的水平包装的方法和系统
公开(公告)号：WO2008085779A1
公开(公告)日：2008-07-17
申请号：PCT/US2007/089115
申请日：2007-12-28
申请人： MIRADIA INC. , YANG, Xiao , PAYNE, Justin , WANG, Yuxiang , JI, Wook , WANG, Ye
发明人： YANG, Xiao , PAYNE, Justin , WANG, Yuxiang , JI, Wook , WANG, Ye
IPC分类号： H01L21/00 , H01L21/50
CPC分类号： B81C1/00293 , B81C2203/0136 , B81C2203/0145
摘要： A method of forming a package for a MEMS structure coupled to a substrate includes depositing an encapsulant material on the substrate and patterning the encapsulant material to form a plurality of encapsulated structures. The method also includes depositing a first capping layer on the substrate and forming one or more release hole patterns in the first capping layer. The method further includes removing the encapsulant material and depositing a second capping layer.
摘要翻译：形成用于耦合到衬底的MEMS结构的封装的方法包括在衬底上沉积密封剂材料并图案化封装材料以形成多个封装结构。该方法还包括在衬底上沉积第一覆盖层并在第一覆盖层中形成一个或多个释放孔图案。该方法还包括去除密封剂材料并沉积第二盖层。

2. 发明申请

WO2007053527A2 PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：投影显示系统，包括一个高填充比率硅光空间光调制器
公开(公告)号：WO2007053527A2
公开(公告)日：2007-05-10
申请号：PCT/US2006/042243
申请日：2006-10-26
申请人： MIRADIA INC. , YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
发明人： YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括具有多个电极器件的半导体衬底以及耦合到半导体衬底的铰链结构。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并延伸到距半导体衬底预定距离的镜柱和耦合到镜柱且覆盖多个电极装置的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

3. 发明申请

WO2014055562A1 METHOD OF MONOLITHICALLY INTEGRATED OPTOELECTRICS 审中-公开
标题翻译：单片集成光电的方法
公开(公告)号：WO2014055562A1
公开(公告)日：2014-04-10
申请号：PCT/US2013/062926
申请日：2013-10-01
申请人： PAYNE, Justin
发明人： PAYNE, Justin
IPC分类号： H01L27/14 , G01V8/10
CPC分类号： H01L27/144 , H01L27/14601 , H01L27/14618 , H01L2924/0002 , H01L2924/00
摘要： A monolithically integrated sensor is disclosed in the form of light detector(s), visible light emitter(s) and associated control circuit(s) monolithically integrated on a single silicon microchip. The detector structures consist of p-i-n photodiode structures, both diffused into and deposited on the surface of the silicon substrate. The emitter structures consist of III-V compound semiconductor hetero-epitaxial layers deposited on the surface of the silicon substrate. The control circuits are fabricated using traditional CMOS high volume manufacturing techniques. The sensor assembly is designed to be processed in a traditional CMOS wafer fab. The sensor assembly is further designed to be packaged at the wafer level.
摘要翻译：以单片集成在单个硅微芯片上的光检测器，可见光发射器和相关联的控制电路的形式公开了单片集成传感器。检测器结构由p-i-n光电二极管结构组成，两者均扩散到并沉积在硅衬底的表面上。发射极结构由沉积在硅衬底表面上的III-V族化合物半导体异质外延层构成。控制电路使用传统的CMOS大容量制造技术制造。传感器组件设计为在传统的CMOS晶圆厂中进行处理。传感器组件进一步设计成在晶片级封装。

4. 发明申请

WO2008006870A1 FORMING FABRIC WITH EXTENDED SURFACE 审中-公开
标题翻译：成型织物与扩展的表面
公开(公告)号：WO2008006870A1
公开(公告)日：2008-01-17
申请号：PCT/EP2007/057142
申请日：2007-07-12
申请人： VOITH PATENT GMBH , FERNANDES, Lippi A. , RINGER, Martin , MORTON, Antony , JEFFERY, John , PAYNE, Justin
发明人： FERNANDES, Lippi A. , RINGER, Martin , MORTON, Antony , JEFFERY, John , PAYNE, Justin
IPC分类号： D21F1/00 , D21F11/00 , D21F11/14
CPC分类号： D21F11/006 , D21F1/0027 , D21F11/14 , D21F11/145 , Y10T442/172 , Y10T442/20
摘要： A fabric for an advanced dewatering system having a woven fabric, the woven fabric having a paper side and a roll side. The paper side has a paper side surface and the roll side has a roll side surface; and a polymer material is deposited onto the fabric that extends above the paper side surface. The polymer material has at least one of a random pattern, a random motif, a pseudo-random pattern, a pseudo-random motif, a predetermined pattern, and a predetermined motif.
摘要翻译：一种用于具有机织织物的先进脱水系统的织物，所述机织织物具有纸侧和辊侧。纸侧具有纸侧表面，并且辊侧具有辊侧表面; 并且聚合物材料沉积到在纸侧表面上延伸的织物上。聚合物材料具有随机图案，随机图案，伪随机图案，伪随机图案，预定图案和预定图案中的至少一个。

5. 发明申请

WO2007053453A2 HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：高比例硅太阳能调光器
公开(公告)号：WO2007053453A2
公开(公告)日：2007-05-10
申请号：PCT/US2006042045
申请日：2006-10-26
申请人： MIRADIA INC , YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
发明人： YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/008
摘要： An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
摘要翻译：一种用于显示器应用的光学偏转装置。光偏转装置包括：半导体衬底，包括上表面区域和设置在上表面区域上的一个或多个电极器件。光学偏转装置还包括铰链装置，其包括硅材料并且连接到上表面区域。光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔，以及反射镜结构，其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。

6. 发明申请

WO2008070669A3 METHOD AND APPARATUS FOR MEMS OSCILLATOR 审中-公开
公开(公告)号：WO2008070669A3
公开(公告)日：2008-06-12
申请号：PCT/US2007/086389
申请日：2007-12-04
申请人： MIRADIA INC. , YANG, Xiao , CHEN, Dongmin , WANG, Ye , PAYNE, Justin , WANG, Yuxiang , JI, Wook
发明人： YANG, Xiao , CHEN, Dongmin , WANG, Ye , PAYNE, Justin , WANG, Yuxiang , JI, Wook
IPC分类号： H03H9/24
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.

7. 发明申请

WO2007053527A3 PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：投影显示系统，包括高比例硅太阳能调光器
公开(公告)号：WO2007053527A3
公开(公告)日：2007-12-27
申请号：PCT/US2006042243
申请日：2006-10-26
申请人： MIRADIA INC , YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
发明人： YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
IPC分类号： G02B26/00 , B81B7/04 , H01L21/66 , H04N5/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并延伸到距离半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极装置的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

8. 发明申请

WO2007053453A3 HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
公开(公告)号：WO2007053453A3
公开(公告)日：2007-05-10
申请号：PCT/US2006/042045
申请日：2006-10-26
申请人： MIRADIA INC. , YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
发明人： YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
IPC分类号： G02B26/00
摘要： An optical deflection device for a display application The optical deflection device includes a semiconductor substrate (105) including an upper surface region and one or more electrode devices (112) provided overlying the upper surface region The optical deflection device also includes a hinge device (214) including a silicon material and coupled to the upper surface region The optical deflection device further includes a spacing defined between the upper surface region and the hinge device (214) and a mirror structure including a post portion (208) coupled to the hinge device (214) and a mirror plate portion (212) coupled to the post portion (208) and overlying the hinge device (214).

9. 发明申请

WO2014055560A1 DEVICE OF MONOLITHICALLY INTEGRATED OPTOELECTRICS 审中-公开
标题翻译：单片集成光电器件
公开(公告)号：WO2014055560A1
公开(公告)日：2014-04-10
申请号：PCT/US2013/062924
申请日：2013-10-01
申请人： PAYNE, Justin
发明人： PAYNE, Justin
IPC分类号： H01L31/04
CPC分类号： H01L31/1804 , G01S7/4811 , G01S17/026 , H01L31/103 , H01L31/105 , H01L31/18
摘要： A method is disclosed for fabricating optoelectronic component structures and traditional circuit elements on a single silicon substrate. Specific examples of optoelectronic components include, but are not limited to: photodiode structures, light emitter structures and waveguide structures. Traditional circuit elements include transistors, diodes, resistors, capacitors and associated metalized interconnects. The method of fabrication is compatible with traditional CMOS, Bi-CMOS and Bipolar processing requirements and design rules. The method consists of a set of processing steps to allow hetero-epitaxial deposition of III-V compound semiconductor films on to a suitably prepared silicon surface, a set of processing steps to allow this deposited wafer to continue processing in a traditional CMOS, Bi-CMOS or Bipolar processing line without the risk of contamination, and a set of steps to allow the fabrication of p-n and p-i-n photodiode/detector structures in parallel with the traditional CMOS, Bi-CMOS or Bipolar processing flow that produces the traditional circuit elements and also a set of steps for producing dielectric waveguides and optically black isolation films. The disclosed method also allows for wafer level encapsulation and wafer level packaging of the as-fabricated integrated optoelectronic chip.
摘要翻译：公开了在单个硅衬底上制造光电子元件结构和传统电路元件的方法。光电子部件的具体实例包括但不限于：光电二极管结构，光发射器结构和波导结构。传统的电路元件包括晶体管，二极管，电阻器，电容器和相关联的金属化互连。制造方法与传统的CMOS，Bi-CMOS和双极加工要求和设计规则兼容。该方法包括一组处理步骤，以允许将III-V族化合物半导体膜异质外延沉积到适当制备的硅表面上，一组处理步骤允许该沉积的晶片在传统的CMOS，Bi- CMOS或双极处理线，没有污染的风险，以及一组步骤，允许制造pn和pin光电二极管/检测器结构与传统CMOS，Bi-CMOS或双极处理流程并行生成传统电路元件，并且还用于制造介质波导和光学黑色隔离膜的一组步骤。所公开的方法还允许制造的集成光电芯片的晶片级封装和晶片级封装。

10. 发明申请

WO2012112362A1 NON-POLAR SEMICONDUCTOR LIGHT EMISSION DEVICES 审中-公开
标题翻译：非极性半导体光发射装置
公开(公告)号：WO2012112362A1
公开(公告)日：2012-08-23
申请号：PCT/US2012/024361
申请日：2012-02-08
申请人： SIPHOTON INC. , PAN, Shaoher X. , CHEN, Jay , PAYNE, Justin , HEUKEN, Michael
发明人： PAN, Shaoher X. , CHEN, Jay , PAYNE, Justin , HEUKEN, Michael
IPC分类号： H01L33/16 , H01L33/30 , H01L33/20 , H01L33/22
CPC分类号： H01L33/32 , H01L33/02 , H01L33/16
摘要： A light emitting device includes a silicon substrate having a (100) upper surface. The (100) upper surface has a recess, the recess being defined in part by (111) surfaces of the silicon substrate. The light emitting device includes a GaN crystal structure over one of the (111) surfaces which has a non-polar plane and a first surface along the non-polar plane. Light emission layers over the first surface have at least one quantum well comprising GaN.
摘要翻译：发光器件包括具有（100）上表面的硅衬底。（100）上表面具有凹部，凹部由硅衬底的（111）表面部分地限定。发光器件包括在（111）表面之一上具有非极性平面和沿着非极性平面的第一表面的GaN晶体结构。第一表面上的发光层具有至少一个包含GaN的量子阱。

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