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1. 发明专利

JP2010272877A Method for forming unit including three-dimensional surface pattern, and use of the same 有权
标题翻译：用于形成包括三维表面图案的单元的方法及其使用
公开(公告)号：JP2010272877A
公开(公告)日：2010-12-02
申请号：JP2010152462
申请日：2010-07-02
申请人： Oerlikon Trading Ag Trubbach , エルリコントレーディングアクチェンゲゼルシャフト,トリューブバハ
发明人： GRABHER PATRICK , HEINE-KEMPKENS CLAUS , BISCHOFBERGER ROGER
IPC分类号： H01L21/027 , G03F7/00 , G03F7/26 , G03F7/40 , G03F7/42
CPC分类号： G03F7/0007 , G03F7/40 , G03F7/405 , G03F7/42 , G03F7/422 , G03F7/425
摘要： PROBLEM TO BE SOLVED: To provide a method for forming a unit including a three-dimensional surface pattern, and to provide use of the same.
SOLUTION: In a first processing step, a photoresist is applied to a base layer 3. A predetermined masking exposure 13 is executed to a photoresist layer 9 in a second processing step. In a third processing step, a part of the photoresist layer 9 is removed by development such that an initial surface pattern having sacrificial layer regions 25 is obtained. In a fourth processing step, coatings 29, 31 covering the initial surface pattern are applied, especially by a sputtering method, preferably as an alternating layer system. In a fifth processing step, energy is applied to the initial surface pattern in order to destabilize the sacrificial layer regions 25. In a sixth processing step, a high-pressure liquid jet 33 is made to act on the initial surface pattern at a predetermined processing temperature, whereby at least partial parts of the coatings 29 covering the sacrificial layer regions 25 are mechanically removed or at least broken off in order to provide the final surface pattern.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种形成包括三维表面图案的单元的方法，并提供其使用。解决方案：在第一处理步骤中，将光致抗蚀剂施加到基层3.在第二处理步骤中，对光致抗蚀剂层9执行预定的掩模曝光13。在第三处理步骤中，通过显影去除光致抗蚀剂层9的一部分，使得获得具有牺牲层区域25的初始表面图案。在第四处理步骤中，涂覆初始表面图案的涂层29,31，特别是通过溅射法优选作为交替层系统。在第五处理步骤中，将能量施加到初始表面图案，以使牺牲层区域25不稳定。在第六处理步骤中，使高压液体射流33以预定处理作用于初始表面图案温度，由此覆盖牺牲层区域25的涂层29的至少部分部分被机械地去除或至少断裂，以便提供最终的表面图案。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2014029862A Pulsed arc source actuation method 审中-公开
标题翻译：脉冲电弧源实现方法
公开(公告)号：JP2014029862A
公开(公告)日：2014-02-13
申请号：JP2013185669
申请日：2013-09-06
申请人： Oerlikon Trading Ag Trubbach , エルリコントレーディングアクチェンゲゼルシャフト,トリューブバハ
发明人： RAMM JUERGEN , OLIVER GSTOEHL , BENO WIDRIG , LENDI DANIEL
IPC分类号： H05H1/34 , C23C14/24
CPC分类号： H01J37/3444 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/083 , C23C14/325 , F01D5/288 , F05D2230/313 , H01J37/32055 , H01J37/34
摘要： PROBLEM TO BE SOLVED: To provide an insulation layer deposition method and low temperature coating method.SOLUTION: Energy supply is performed by direct current and pulse or alternative curent at the same time for electrical spark discharge that is fired or actuated on a surface of a target of an arc source. In addition, the present invention is related to an arc source in which the target is connected to a power source that is at least a pulsed high current source (18, 18') and another power source (13', 18''), or a power source (21, 21', 22) that is designed by combinational circuit technology.
摘要翻译：要解决的问题：提供绝缘层沉积方法和低温涂覆方法。解决方案：通过直流和脉冲或替代方式同时进行能量供应，用于在一个表面上发射或致动的电火花放电电弧源的目标。另外，本发明涉及一种电弧源，其中靶连接至至少是脉冲高电流源（18,18'）和另一电源（13'，18“）的电源，或通过组合电路技术设计的电源（21,21'，22）。

3. 发明专利

TWI498971B 穿透阻障層有权
简体标题：穿透阻障层
公开(公告)号：TWI498971B
公开(公告)日：2015-09-01
申请号：TW098103178
申请日：2009-02-02
申请人：厄利空貿易公司 , OERLIKON TRADING AG, TRUBBACH
发明人：拉瑪於爾根 , RAMM, JURGEN
IPC分类号： H01L21/3205 , G21C1/00
CPC分类号： B65D25/14 , B65D25/34 , C23C14/025 , C23C14/08 , F16C33/043 , F16C33/14 , F16C2223/60 , G21B1/11 , H01M8/04089 , H01M8/2475 , Y02P70/56 , Y10T428/13 , Y10T428/2933 , Y10T428/31678

4. 发明授权

US10041017B2 Coating with enhanced sliding properties 有权
公开(公告)号：US10041017B2
公开(公告)日：2018-08-07
申请号：US14384896
申请日：2013-03-11
申请人： Oerlikon Trading AG, Trubbach
发明人： Jurgen Ramm , Florian Seibert , Beno Widrig
IPC分类号： C10M103/06 , C23C14/00 , C23C14/06 , C23C14/32
摘要： The present invention relates to coated sliding parts having coating systems which allow better sliding performance under dry and/or under lubricated conditions. The coating systems according to the present invention being characterized by having an outermost layer which—is a smooth oxide-containing layer in case of sliding applications under lubricated conditions, or—is a self-lubricated layer comprising molybdenum nitride, in case of sliding applications under dry or lubricated conditions, is a selflubricated layer with a structured surface comprising a multitude of essentially circular recesses with diameters of several micrometers or below, the recesses randomly distributed over the surface.

5. 发明申请

US20150167153A1 HIGH-POWER PULSE COATING METHOD 审中-公开
标题翻译：高功率脉冲涂层方法
公开(公告)号：US20150167153A1
公开(公告)日：2015-06-18
申请号：US14413480
申请日：2013-06-24
申请人： Oerlikon Trading AG, Trubbach
发明人： Siegfried Krassnitzer , Denis Kurapov
IPC分类号： C23C14/34
CPC分类号： C23C14/3485 , C23C14/345 , C23C14/3464 , H01J37/3405 , H01J37/3467 , H01J2237/332
摘要： The invention relates to a method for coating substrates by sputtering of target material, the method comprising the following steps:-applying a first sputtering target made of a first material in a coating chamber to a power pulse by which, during a first time interval, a first amount of energy is transmitted to the sputtering target, wherein the maximum power density exceeds 50 W/cm2 and preferably 500 W/cm2;-applying a second sputtering target made of a second material that is different from the first material in the coating chamber to a power pulse by which, during a second time interval, a second amount of energy is transmitted to the sputtering target, wherein the maximum power density exceeds 50 W/cm 2 and preferably 500W/cm2, characterized in that the first amount of energy differs from the second amount of energy.
摘要翻译：本发明涉及通过溅射目标材料涂覆基板的方法，该方法包括以下步骤：将由涂覆室中的第一材料制成的第一溅射靶施加到第一时间间隔内的功率脉冲，第一量的能量被传送到溅射靶，其中最大功率密度超过50W / cm 2，优选为500W / cm 2;使用与涂层中的第一材料不同的第二材料制成的第二溅射靶在第二时间间隔内将第二量的能量传递到溅射靶，其中最大功率密度超过50W / cm 2，优选为500W / cm 2，其特征在于，第一量的能量与第二量的能量不同。

6. 发明申请

US20140311892A1 REACTIVE SPUTTERING PROCESS 审中-公开
标题翻译：反应溅射法
公开(公告)号：US20140311892A1
公开(公告)日：2014-10-23
申请号：US14362758
申请日：2012-11-23
申请人： Oerlikon Trading AG, Trubbach
发明人： Siegfried Krassnitzer
IPC分类号： C23C14/34
CPC分类号： C23C14/3485 , C23C14/0094 , C23C14/3492 , H01J37/3467 , H01J37/3485
摘要： Reactive sputtering in which, by ion bombardment, material is ejected from the surface of a target and transitions to the gas phase. Negative voltage pulses are applied to the target to establish electric current having a current density greater than 0.5 A/cm2 at the target surface, such that the material transitioning to the gas phase is ionized. Reactive gas flow is established and reacts with the material of the target surface. Voltage pulse duration is such that, during the pulse, the target surface where the current flows is at least partly covered most of the time with a compound composed of reactive gas and target material and, consequently, the target surface is in a first intermediate state, and this covering is smaller at the end of the voltage pulse than at the start and, consequently, the target surface is in a second intermediate state at the end of the voltage pulse.
摘要翻译：反应溅射，其中通过离子轰击，材料从靶的表面喷射并转变到气相。向目标施加负电压脉冲，以在目标表面建立电流密度大于0.5A / cm 2的电流，使得转移到气相的材料被电离。建立反应性气体流动并与目标表面的材料反应。电压脉冲持续时间使得在脉冲期间，电流流动的目标表面至少部分地被由反应性气体和靶材料组成的化合物大部分地覆盖，因此目标表面处于第一中间状态并且该覆盖在电压脉冲结束时比在开始时更小，因此，目标表面在电压脉冲结束时处于第二中间状态。

7. 发明申请

US20140048209A1 IGNITION APPARATUS FOR ARC SOURCES 有权
标题翻译：点火装置用于电弧源
公开(公告)号：US20140048209A1
公开(公告)日：2014-02-20
申请号：US13963128
申请日：2013-08-09
申请人： Oerlikon Trading AG, Trubbach
发明人： Siegfried Krassnitzer , Oliver Gstoehl , Juerg Hagmann
IPC分类号： H01J37/32 , C23F1/08
CPC分类号： H01J37/32 , C23F1/08 , H01J37/32009 , H01J37/32055
摘要： The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.
摘要翻译：点火装置技术领域本发明涉及一种用于点燃真空镀膜系统中电弧蒸发器的高电流放电的点火装置。通过机械地闭合和打开阴极和阳极之间的接触来进行点火。通过可在强制路径上移动的点火指示器建立接触。由于强制路径，点火指可以通过简单的机械驱动移动到停止位置，防止被涂覆，并且所述点火指也可用于点燃第二目标。

8. 发明授权

US09601316B2 Ignition apparatus for arc sources 有权
公开(公告)号：US09601316B2
公开(公告)日：2017-03-21
申请号：US13963128
申请日：2013-08-09
申请人： Oerlikon Trading AG, Trubbach
发明人： Siegfried Krassnitzer , Oliver Gstoehl , Juerg Hagmann
IPC分类号： H01J37/32 , C23F1/08
CPC分类号： H01J37/32 , C23F1/08 , H01J37/32009 , H01J37/32055
摘要： The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.

9. 发明申请

US20150111795A1 ARC-DEPOSITED AL-CR-O COATINGS HAVING ENHANCED COATING PROPERTIES 有权
标题翻译：具有增强涂层性能的ARC-DEPOSITED AL-CR-O涂料
公开(公告)号：US20150111795A1
公开(公告)日：2015-04-23
申请号：US14395897
申请日：2013-04-22
申请人： Oerlikon Trading AG, Trubbach
发明人： Richard Rachbauer , Jurgen Ramm , Joerg Paulitsch , Paul Heinz Mayrhofer
IPC分类号： C23C14/32 , C23C14/08 , C23C14/00 , C10M103/06 , C09D5/08 , C09D1/00
CPC分类号： C23C14/325 , C09D1/00 , C09D5/084 , C10M103/06 , C10M2201/0863 , C10M2201/1006 , C23C14/0021 , C23C14/08 , C23C14/081 , C23C14/083
摘要： The present invention relates to a method for coating AI-Cr-0 coatings with the help of a PVD-coating process. The PVD-coating process is performed with the help of Al and Cr comprising targets which are doped with Si. The doping of Si prevents the forming of oxide islands on the target during the reactive coating process.
摘要翻译：本发明涉及一种借助PVD涂层工艺涂覆Al-Cr-0涂层的方法。借助于包含掺杂有Si的靶的Al和Cr进行PVD涂覆工艺。 Si的掺杂防止在反应性涂覆过程中在靶上形成氧化物岛。

10. 发明申请

US20140305792A1 HIPIMS LAYERING 有权
标题翻译： HIPIMS分层
公开(公告)号：US20140305792A1
公开(公告)日：2014-10-16
申请号：US14357003
申请日：2012-10-26
申请人： Oerlikon Trading AG, Trubbach
发明人： Siegfried Krassnitzer , Markus Lechthaler
IPC分类号： C23C14/35
CPC分类号： C23C14/35 , C23C14/345 , C23C14/3485 , H01J37/3467
摘要： The present invention relates to a method for the vapor deposition of PVD layer systems by means of sputtering on at least one substrate, wherein the layer system comprises at least a first layer, characterized in that, at least in one step of the method, a HiPIMS method is used with a power density of at least 250 W/Cm2, wherein a pulse length with a duration of at least 5 ms is used while a substrate has is applied to the substrate.
摘要翻译：本发明涉及一种用于通过溅射在至少一个衬底上蒸镀PVD层系统的方法，其中层系统至少包括第一层，其特征在于，在该方法的至少一个步骤中， HiPIMS方法的功率密度至少为250W / Cm2，其中使用具有至少5ms的持续时间的脉冲长度，同时将衬底施加到衬底。

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