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    • 2. 发明授权
    • Liquid concentration detecting apparatus
    • 液体浓度检测装置
    • US5903006A
    • 1999-05-11
    • US863139
    • 1997-05-27
    • Norihiro KiuchiKunimitsu TamuraSeiki Tsurudo
    • Norihiro KiuchiKunimitsu TamuraSeiki Tsurudo
    • G01N21/35
    • G01N21/359G01N21/3577
    • A liquid concentration detecting apparatus which permits a real-time and high-accuracy detection of concentration of a liquid (particularly an etching or cleaning solution) used in a semiconductor plant, with a simple configuration at a low cost. The liquid concentration detecting apparatus 1 has a cell 2 to which a liquid is supplied, and a projecting section 4 and a receiving section 5 arranged opposite to each other in a direction at right angles to the axial line of the cell. A light of a prescribed wavelength is projected from this projecting section 4 through the liquid in the cell 2 to the receiving section 5, and the concentration of the liquid is determined by detecting the amount of light received by the receiving section. The cell 2 has a plate-shaped spacer 6 having a slender hole 9 formed therein, and at least within a detecting section 3 region where the projecting section 4 and the receiving section 5 are arranged opposite to each other, the cell is configured to be substantially in close contact with the both surfaces of the spacer 6, whereby the liquid supplied to the cell flows in the slender hole 9 formed in the spacer 6 within the detecting section 3.
    • 一种液体浓度检测装置,其以简单的结构以低成本实现对半导体工厂中使用的液体(特别是蚀刻或清洗溶液)的浓度的实时和高精度检测。 液体浓度检测装置1具有供给液体的电池单元2以及与电池的轴线成直角的方向相互配置的突出部4和接收部5。 从该突出部4通过电池2内的液体向接收部5突出规定波长的光,并且通过检测由接收部接收的光量来确定液体的浓度。 电池单元2具有形成有细长孔9的板状间隔件6,并且至少在突出部4和接收部5相对配置的检测部3区域中,电池被构成为 基本上与间隔件6的两个表面紧密接触,由此供给到电池的液体流入形成在检测部分3内的间隔件6中的细长孔9中。