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    • 2. 发明授权
    • Beam lead formation method
    • 梁形成方法
    • US3952404A
    • 1976-04-27
    • US456269
    • 1974-03-29
    • Mituo Matunami
    • Mituo Matunami
    • H01L21/78B01J17/00
    • H01L21/78
    • The present disclosure is directed toward a method for making semiconductor devices having beam leads for electrical connections to external terminals. An undercoating metal film is deposited directly or via a protective film on a semiconductor wafer on which interconnections are formed together with electrode pad or contact areas. After subsequent deposition of an upper metal film, beam leads are formed in a desired pattern in a manner to contact with and extend from the electrode areas. The final step is to apply physical force to the semiconductor wafer such that the undercoating metal film serving also as a portion of the beam leads is forcibly spaced away from the major surface of the semiconductor wafer.
    • 本公开涉及一种用于制造具有用于到外部端子的电连接的光束引线的半导体器件的方法。 直接或通过保护膜沉积在底层金属膜上,半导体晶片上与电极焊盘或接触区域形成互连。 在随后沉积上部金属膜之后,以与所述电极区域接触并从电极区域延伸的方式以期望的图案形成束引线。 最后的步骤是将物理力施加到半导体晶片,使得还用作一部分光束引线的底涂金属膜被强制地与半导体晶片的主表面隔开。