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    • 1. 发明申请
    • Apparatus and method for irradiating electron beam
    • 用于照射电子束的装置和方法
    • US20060163499A1
    • 2006-07-27
    • US11338392
    • 2006-01-24
    • Naoyuki EchigoYo MaruiYoshihiro FuseMamoru UsamiKazushi TanakaMinao HimenoYukio Kaneko
    • Naoyuki EchigoYo MaruiYoshihiro FuseMamoru UsamiKazushi TanakaMinao HimenoYukio Kaneko
    • G21K5/10G01N23/00
    • G21K5/10
    • An electron beam irradiation apparatus includes an electron beam emission section having an electron beam irradiating tube that emits an electron beam; an electron beam irradiation section for irradiating the emitted electron beam to a target; a transfer mechanism for transferring the target to the electron beam irradiation section; a rotation mechanism for rotating the target on its own axis when irradiating the electron beam; and a linear movement mechanism for generating a relative linear movement such that the electron beam irradiating tube passes right above the target, between the target and the electron beam irradiating tube, when irradiating the electron beam. The linear movement mechanism generates a relative linear movement such that the electron beam irradiating tube goes from an end portion of the target toward the center of the target and turns back before the center of the electron beam emitting portion of the electron beam irradiating tube reaches the center of the target.
    • 电子束照射装置包括具有发射电子束的电子束照射管的电子束发射部分; 用于将发射的电子束照射到目标的电子束照射部分; 用于将靶转移到电子束照射部的转移机构; 旋转机构,用于在照射电子束时使靶在其自身轴上旋转; 以及用于产生相对线性运动的直线运动机构,使得当照射电子束时,电子束照射管在目标和电子束照射管的正上方通过。 线性移动机构产生相对线性运动,使得电子束照射管从靶的端部向靶的中心移动,并且在电子束照射管的电子束发射部分的中心到达之前返回 目标中心。