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1. 发明授权

US08376130B2 Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport 有权
标题翻译：直接驱动模块式皮带输送机，墨盒和快速连接断开恒速驱动轴，用于高速FOUP运输
公开(公告)号：US08376130B2
公开(公告)日：2013-02-19
申请号：US12420529
申请日：2009-04-08
申请人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
发明人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
IPC分类号： B65G15/60
CPC分类号： B65G21/06 , B65G15/105 , B65G2201/0297 , B65G2207/30
摘要： A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.
摘要翻译：输送机系统包括限定输送机的一部分的料筒。在一个实施例中，盒包括多个轮，其被设计为传送器部分的单元，并且筒的轮被设计成保持带。在一个可选实施例中，输送机部分包括用于检测容器（例如，FOUP）的存在的集成传感器，并且每个输送机部分可以实施便于高速FOUP运输的精密金属板轨道。在一个实施例中，每个输送段具有两个侧面。每一侧都有一个带有一个皮带的墨盒。在特定实施例中，传送部分的一侧包括驱动传送器的驱动马达。

2. 发明申请

US20120267219A9 DIRECT DRIVE MODULAR BELT CONVEYOR, CARTRIDGE, AND QUICK CONNECT-DISCONNECT CONSTANT VELOCITY DRIVE SHAFT, FOR HIGH SPEED FOUP TRANSPORT 有权
标题翻译：直接驱动模块式皮带输送机，快速连接和快速连接不间断驱动轴，用于高速FOUP运输
公开(公告)号：US20120267219A9
公开(公告)日：2012-10-25
申请号：US12420529
申请日：2009-04-08
申请人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
发明人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
IPC分类号： B65G15/60
CPC分类号： B65G21/06 , B65G15/105 , B65G2201/0297 , B65G2207/30
摘要： A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.
摘要翻译：输送机系统包括限定输送机的一部分的料筒。在一个实施例中，盒包括多个轮，其被设计为传送器部分的单元，并且筒的轮被设计成保持带。在一个可选实施例中，输送机部分包括用于检测容器（例如，FOUP）的存在的集成传感器，并且每个输送机部分可以实现便于高速FOUP运输的精密金属板轨道。在一个实施例中，每个输送段具有两个侧面。每一侧都有一个带有一个皮带的墨盒。在特定实施例中，传送部分的一侧包括驱动传送器的驱动马达。

3. 发明授权

US07771151B2 Interface between conveyor and semiconductor process tool load port 有权
标题翻译：输送机和半导体加工工具加载口之间的接口
公开(公告)号：US07771151B2
公开(公告)日：2010-08-10
申请号：US11178072
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/68
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
摘要翻译：本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。工具装载设备可以服务于单个装载端口或多个装载端口。无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个加载端口。

4. 发明授权

US07410340B2 Direct tool loading 失效
标题翻译：直接加载工具
公开(公告)号：US07410340B2
公开(公告)日：2008-08-12
申请号：US11064880
申请日：2005-02-24
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译：本发明包括容器运输和装载系统。该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

5. 发明申请

US20080019811A1 METHOD AND APPARATUS FOR VERTICAL WAFER TRANSPORT, BUFFER AND STORAGE 审中-公开
标题翻译：垂直波浪运输，缓冲和储存的方法和装置
公开(公告)号：US20080019811A1
公开(公告)日：2008-01-24
申请号：US11775755
申请日：2007-07-10
申请人： Michael Krolak , Roger Hine , Anthony Bonora
发明人： Michael Krolak , Roger Hine , Anthony Bonora
IPC分类号： B65G65/02 , B65G1/00 , B65G65/32 , B65G65/38
CPC分类号： H01L21/67379 , H01L21/67017 , H01L21/67386 , H01L21/67769 , H01L21/67772 , H01L21/68707
摘要： A substrate support and transport system for substrates to be processed is provided. The system includes a container supporting a plurality of substrates in a substantially vertical orientation, where the container has an access door surrounded by a flange defined on a top surface. The system includes a conveying system supporting a bottom surface of the container opposing the top surface. The conveying system is configured to enable removal of the container from the conveying system to a processing tool while the plurality of substrates is in the substantially vertical orientation. The system further includes a receiving module for a processing tool configured to accept the container from the conveying system. The receiving module is configured to move the container in a two dimensional plane defined within the receiving module. A container holding the substrates in a substantially vertical orientation and a method for transporting and storing substrates is provided.
摘要翻译：提供了一种用于待处理衬底的衬底支撑和输送系统。该系统包括支撑基本垂直取向的多个基板的容器，其中容器具有由限定在顶表面上的凸缘包围的通道门。该系统包括支撑与顶表面相对的容器的底表面的输送系统。输送系统被构造成使得容器从输送系统移除到处理工具，同时多个基板处于基本垂直的方向。所述系统还包括用于处理工具的接收模块，所述接收模块被配置为从所述输送系统接收所述容器。接收模块被配置为在容纳模块内定义的二维平面内移动容器。提供了将基板保持为大致垂直取向的容器以及用于输送和存储基板的方法。

6. 发明申请

US20070010908A1 Belt conveyor for use with semiconductor containers 有权
标题翻译：带式输送机用于半导体容器
公开(公告)号：US20070010908A1
公开(公告)日：2007-01-11
申请号：US11484218
申请日：2006-07-10
申请人： Anthony Bonora , Michael Krolak , Roger Hine
发明人： Anthony Bonora , Michael Krolak , Roger Hine
IPC分类号： G06F7/00
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.
摘要翻译：本发明包括用于在整个制造设施中移动半导体容器的输送机。在一个实施例中，输送机包括多个独立控制的输送带。每个传送带包括第一带，第二带，用于以基本上相同的速度旋转第一带和第二带的驱动组件。第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。在另一个实施例中，输送机包括用于确定容器位置的传感器。

7. 发明申请

US20060257233A1 Interface between conveyor and semiconductor process tool load port 有权
标题翻译：输送机和半导体加工工具加载口之间的接口
公开(公告)号：US20060257233A1
公开(公告)日：2006-11-16
申请号：US11178072
申请日：2005-07-08
申请人： Anthony Bonora , Michael Krolak , Roger Hine
发明人： Anthony Bonora , Michael Krolak , Roger Hine
IPC分类号： H01L21/677
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
摘要翻译：本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。工具装载设备可以服务于单个装载端口或多个装载端口。无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个加载端口。

8. 发明授权

US06677690B2 System for safeguarding integrated intrabay pod delivery and storage system 有权
标题翻译：系统，用于保护一体化的内部荚运输和存储系统
公开(公告)号：US06677690B2
公开(公告)日：2004-01-13
申请号：US09776227
申请日：2001-02-02
申请人： William J. Fosnight , Daniel Babbs , Richard Gould , Michael Krolak , David Feindel , Timothy Luong
发明人： William J. Fosnight , Daniel Babbs , Richard Gould , Michael Krolak , David Feindel , Timothy Luong
IPC分类号： H02H100
CPC分类号： H01L21/67242
摘要： A system is disclosed for safeguarding fab operators and workpieces such as semiconductor wafers from harm as a result of collision between an operator and a transport assembly for the workpieces as the workpieces are transported between tools and storage nests within a tool bay.
摘要翻译：公开了一种系统，用于当工具在工具舱内的工具和存储巢之间传送时，保护工厂操作员和诸如半导体晶片的工件，这是由于工件与工件的运输组件之间的碰撞造成的危害的。

9. 发明授权

US06634851B1 Workpiece handling robot 有权
标题翻译：工件处理机器人
公开(公告)号：US06634851B1
公开(公告)日：2003-10-21
申请号：US09483625
申请日：2000-01-14
申请人： Anthony C. Bonora , Roger G. Hine , Michael Krolak , John F. Grilli
发明人： Anthony C. Bonora , Roger G. Hine , Michael Krolak , John F. Grilli
IPC分类号： B25J1804
CPC分类号： H01L21/68707 , B25J9/042 , B25J9/104 , B25J18/02 , B25J18/04 , B25J19/0079 , H01L21/67742 , Y10T74/20323
摘要： A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
摘要翻译：公开了一种晶片处理机器人，用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。机器人包括一个底座，它包括一个刚性骨架，为机器人提供了很大程度的结构稳定性。基座还包括桅杆，用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。肩部驱动系统包括用于提供桅杆部分的刚性，平滑和精确的输出旋转的谐波驱动减速系统。机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。肘部驱动器安装到近端连杆，向下延伸到桅杆部分中，用于驱动远端连杆相对于近端连杆的旋转。扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。类似地，扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。

10. 发明授权

US5265170A Devices and methods for reading identification marks on semiconductor wafers 失效
标题翻译：用于读取半导体晶圆上的识别标记的装置和方法
公开(公告)号：US5265170A
公开(公告)日：1993-11-23
申请号：US597082
申请日：1990-10-15
申请人： Derek L. Hine , Michael Krolak
发明人： Derek L. Hine , Michael Krolak
IPC分类号： G06K7/10 , G06K9/20 , G06T1/00 , H01L21/02 , G06K9/00
CPC分类号： G06K7/10861 , G06K9/2054 , G06K9/209 , Y10S414/138
摘要： Methods and apparatus for machine reading of identification marks incised on semiconductor wafers. Preferred apparatus makes it possible to view the mark either as a dark image on a light background (which is in itself novel) or as a light image on a dark background. Using a television camera and an optical character reader, the viewing method can be changed automatically if a preset confidence level is not reached, and provides a signal if neither method (or the combination of the two methods) gives a satisfactory result. The method is particularly useful for successively reading the identification marks on a number of wafers stacked in a cassette. Preferred apparatus for such reading comprises a wafer support which can be pushed upwards from underneath the cassette so that the wafer to be identified rests on one ledge of the support and the adjacent wafer rests on another higher ledge on the support, thus exposing and precisely locating the identification mark on the first wafer.
摘要翻译：在半导体晶片上切割识别标记的机器读取的方法和装置。优选的装置使得可以将标记视为浅色背景上的暗图像（其本身是新颖的）或作为黑色背景上的光图像。使用电视摄像机和光学字符读取器，如果没有达到预设的置信水平，则可以自动地改变观看方法，并且如果两种方法（或两种方法的组合）都没有得到令人满意的结果，则可以提供信号。该方法对于连续读取堆叠在盒中的多个晶片上的识别标记特别有用。用于这种读取的优选装置包括可以从盒下方向上推动的晶片支撑件，使得待识别的晶片位于支撑件的一个凸缘上，并且相邻的晶片搁置在支撑件上的另一较高的凸缘上，从而露出和精确定位第一晶圆上的识别标记。

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