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    • 6. 发明申请
    • APPARATUS AND METHOD FOR TREATING PLATE-SHAPED PROCESS ITEMS
    • 用于处理板形工艺项目的装置和方法
    • US20140332347A1
    • 2014-11-13
    • US14341641
    • 2014-07-25
    • Michael GraffMartin M. Menschick
    • Michael GraffMartin M. Menschick
    • B65G17/00
    • B65G17/002H01L21/67057H01L21/67086H01L21/6776
    • In apparatuses and methods for treating a plate-shaped process item including a bottom side, a top side and edges between the bottom side and the top side with a process medium, a transport unit is used, which includes an endless unit with support elements projecting from the same. A bottom side of the plate-shaped process item is supported on support elements of the transport unit and the transport unit is driven to move the support elements together with the supported plate-shaped process item in parallel to a process media level of a process medium. In a first operating mode, during a movement of the plate-shaped process item in parallel to the process media level, no parts of the transport unit engage the edges of the plate-shaped process item.
    • 在用处理介质处理包括底侧,顶侧和底侧和顶侧之间的板状工艺物品的设备和方法中,使用传送单元,其包括具有突出的支撑元件的环形单元 从同一个 板状加工件的底侧被支撑在运输单元的支撑元件上,并且运送单元被驱动以将支撑元件与支撑的板状过程物体一起移动到平行于处理介质的处理介质水平 。 在第一操作模式中,在板状加工物体平行于加工介质水平运动的过程中,运输单元的任何部分都不接合板状加工件的边缘。